NCTU NFC Scanning Electron Microscope S4700 I Tool

NCTU NFC 高解析度場發射掃描電子顯微鏡暨能量散佈分析儀 Scanning Electron Microscope (S-4700 I) Tool expert: Prof. Shun-Tun Yen Technician：Ms. Lien-Chu Chen

Tool name Chinese name： 高解析度場發射掃描式電子顯微鏡 � 能量散佈分析儀 English name： High-Resolution Scanning Electron Microscope & Energy Dispersive Spectrometer Acronym： SEM & EDS NCTU NFC Yue-Ting Chen

Tool info manufacturer：Hitachi model：S-4700 I Date of purchase：May 1 st, 1999. NCTU NFC Yue-Ting Chen

Features SEM： High-resolution inspection of devices, thin films, and cross-sections. EDS： Energy-dispersive spectroscopic analysis of material or contamination composition on a desired spot. NCTU NFC Yue-Ting Chen

Tool spec E-gun source：Cold cathodic E-gun Operation voltage： 0. 5 k. V~30 k. V Sample size： 25 mm diameter x 25 mm(t) Working distance：current setting at 12 mm resolution： 1. 5 nm (at 15 k. V) or 2. 5 nm (at 1 k. V) Highest mag: 500 K(depending on the sample） Resolution of secondary electrons: 1. 5 nm(below 15 k. V) EDS could provide qualitative/quantitative atomic （ B 5~U 92） and elemental distribution analysis across the whole energy spectrum. NCTU NFC Yue-Ting Chen

Principles of SEM (Scanning Electron Microscope) Tool introduction ü E-gun: electron source ü Electromagnetic lens: for altering electron path direction ü Optical focus system Principles ü Electron migration path ü Interactions between electrons and matters Vacuum necessity and specimen chamber structure. NCTU NFC Yue-Ting Chen

Vacuum system Good vacuum is prerequisite for obtaining high quality images in SEM The vacuum is maintained by the following pumps : Electron chamber and electromagnetic lens: 3 ion pumps S. C. -Specimen Chamber: cycled-water chilled diffusion pump and rough pumping by a rotary pump S. E. C. - Specimen Exchange Chamber: Rotary pump NCTU NFC Yue-Ting Chen

Operation procedures Procedures：SEM basic SOP( please click) NCTU NFC Yue-Ting Chen

Tips Good sample conductivity： The sample should be highly conductive to ensure sufficient detection of secondary electrons and clear images. Pt or Au capping can help improve the conductivity. However, too thin the capping does not help a lot and too thick of it might cover the inspected area. For less conductive samples such as Si or Si. O 2, it is recommended to attach the carbon tape on the sample front side after Au deposition. This way, electrons are attracted toward the stage and only a slit is available for secondary electrons. NCTU NFC Yue-Ting Chen

Tips Avoid vibration： For high-mag inspection, make sure the sample is firmly attached and the stage is well fastened. Stage lock feature can be enabled to reduce the vibration caused by external factors. (Once stage lock is enabled, tilt cannot be adjusted) NCTU NFC Yue-Ting Chen

Tips Vacuum：the lower the better Accelerating voltage: higher voltage can lead to better images. The maximum voltage a sample can withstand depends on its own properties. Too high the voltage might damage the sample and result in pollutant generation. Discretion, attention, and patience are highly appreciated. NCTU NFC Yue-Ting Chen

SEM Pictures—taken by Ms. Yue-Ting Chen Gold particles with 10 K mag NCTU NFC Yue-Ting Chen mag 500 nm for each spacing

SEM Pictures—taken by Ms. Yue-Ting Chen Surface of gold particles is clear with 150 K mag NCTU NFC Yue-Ting Chen mag 30 nm for each spacing

SEM Pictures—taken by Ms. Yue-Ting Chen Surface of gold particles with 250 K mag NCTU NFC Yue-Ting Chen mag 20 nm for each spacing

SEM Pictures—taken by Ms. Yue-Ting Chen Surface of gold particles with 300 K mag NCTU NFC Yue-Ting Chen mag 10 nm for each spacing

SEM Pictures—taken by Ms. Yue-Ting Chen Surface of gold particles with 400 K mag NCTU NFC Yue-Ting Chen 10 nm for each spacing

SEM Pictures—taken by Ms. Yue-Ting Chen Surface of gold particles with 450 K mag NCTU NFC Yue-Ting Chen mag 10 nm for each spacing

SEM Pictures—taken by Ms. Yue-Ting Chen Surface of gold particles with 500 K mag NCTU NFC Yue-Ting Chen 10 nm for each spacing mag 10 nm for each spacing

SEM Pictures—taken by Ms. Yue-Ting Chen The following pictures are taken by students from various affiliations. Through SEM, we can share our own skills and excellent pictures. NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Carbon nano tube NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Zno nanowire NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student MOSFET device NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student High-K material NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Material for high-frequency devices NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student High-speed device NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Si. O 2 nanoparticle-fixing substrate NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student polymer micelles NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Carbon nano tube NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Ce. O nano cube NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Cu NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student photonic crystal NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Nanoscale linewidth NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Surface analysis NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Surface analysis of Ti NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Ga. N surface roughening for blue light LED NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Oxide-based nanowire NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Nylon film NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student Blocking layer deposited via PECVD on Pet film NCTU NFC Yue-Ting Chen

SEM Pictures—taken by a student fiber NCTU NFC Yue-Ting Chen

Conclusion Please cherish this multifunctional SEM !! NCTU NFC Yue-Ting Chen