NANYA TECHNOLOGY CORPORATION NTC 11102020 1 NTC CONFIDENTIAL

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NANYA TECHNOLOGY CORPORATION NTC 11/10/2020 1 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION NTC 11/10/2020 1 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION 三. 節能目標及計畫 Facility Group 94上半年Working Review Working Objectives Goal Actual 一.

NANYA TECHNOLOGY CORPORATION 三. 節能目標及計畫 Facility Group 94上半年Working Review Working Objectives Goal Actual 一. 效能提高 系統改善件數 設備故障率 > 2件(Fab-1) < 20 ppm(Fab-1) 3件 0 ppm 二. 風險降低 異常事故件數 風險評估檢討件數 < 1件/月(Fab-1) > 3件/月(Fab-1) 0件 6件/月 三. 費用降低 物料費用 < 63元/片(Fab-1) 49元/片 保養費用 < 95元/片(Fab-1) 96元/片 公用處 11/10/2020 5 備註 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION Facility Group 94上半年Working Review 一. Energy save and material cost down

NANYA TECHNOLOGY CORPORATION Facility Group 94上半年Working Review 一. Energy save and material cost down objective No. 改善內容及效益 執行狀況 備註 1 DI system active carbon reuse. (FAB-1) 94/6 done， cost down 11 KNTD/M。 2 Toxic gas detector use new XP type cassette project. (FAB-1) 94/5 done， cost down 10 KNTD/M。 3 Chiller system refrigerant additive project. (FAB-1) 94/5 done， cost down 192 KNTD/M。 公用處 11/10/2020 6 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION Facility Group 94下半年Technical Board Working Plan Working Objectives Goal 一. 效能提高

NANYA TECHNOLOGY CORPORATION Facility Group 94下半年Technical Board Working Plan Working Objectives Goal 一. 效能提高 系統改善件數 Fab 1 4件 設備故障率 Fab 1 < 10 ppm 異常事故件數 Fab 1 < 0件/月 風險評估檢討件數 Fab 1 >4件/月 Fab 1: < 48元/片 < 95元/片 二. 風險降低 三. 費用降低 物料費用(原料及物料) 保養費用 **以上基準以 94年 1~6月平均值修訂 公用處 11/10/2020 7 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION Facility Group 94下半年Technical Board Working Plans Goal Due Date Sponsor 一.

NANYA TECHNOLOGY CORPORATION Facility Group 94下半年Technical Board Working Plans Goal Due Date Sponsor 一. Energy consumption&material cost down objective 1. 1 B DI system UF membrane life time prolong. 21仟元/月 94/12 江萬力 2. 1 B DI anion tower resin take reused resin. 100仟元/月 94/9 江萬力 3. 1 A DI polisher tower resin take 2 nd source resin. 50仟元/月 94/10 江萬力 4. Change HBr cylinder from 10 kg to 50 kg. 節省人力 94/12 龔彥名 5. Cooling tower blow down water reuse to scrubber. 15仟元/月 94/9 蔡善飛 6. MAU control methodology take wet ball temperature. 108仟元/月 94/11 蔡善飛 7. MAU drain water reused to cooling tower. 94/11 蔡善飛 15仟元/月 共計 309仟元/月 公用處 11/10/2020 8 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION 8. 節能措施: 全廠主要pump/風車均採用變頻設計。 節能成效: 每年約可節省電力 1187. 2萬度/年。 PCW SYSTEM ZONE PUMP

NANYA TECHNOLOGY CORPORATION 8. 節能措施: 全廠主要pump/風車均採用變頻設計。 節能成效: 每年約可節省電力 1187. 2萬度/年。 PCW SYSTEM ZONE PUMP EXHAUST FAN 公用處 11/10/2020 MAU SYSTEM 17 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION 公用處 11/10/2020 24 NTC CONFIDENTIAL

NANYA TECHNOLOGY CORPORATION 公用處 11/10/2020 24 NTC CONFIDENTIAL

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