Nanotechnology Cleanroom Design Considerations l l Scott Mackler

Nanotechnology Cleanroom Design Considerations l l Scott Mackler Tim Loughran Weizmann Institute of Science 1 11/5/2020

Outline How to Define the User Requirements? l Basic Contaminate Control l Design Concepts? l Case Studies? l Outline Requirements? l First- Tell us about your level of expertise and understanding. Weizmann Institute of Science 2 11/5/2020

What is Nanotechnology? l l l Research and technology development at the atomic, molecular or macromolecular levels Ability to control or manipulate on the atomic scale Creating and using structures, devices and systems that have novel properties due to their small and/or intermediate sizes Weizmann Institute of Science 3 11/5/2020

Size of Nanometer l l l 1 Nanometer = One-Billionth of a Meter Nanometer sized particles are smaller than a living cell and can be seen only with the most powerful microscopes Width of human hair is approx. 80, 000 nanometers The average human can see in the 80, 000 nanometer range One small dust particle seen in a ray of sun equates to approx. 60, 000 nanometers DNA is in the 2. 5 nanometer range Weizmann Institute of Science 4 11/5/2020

The Scale of Things Weizmann Institute of Science 5 11/5/2020

Nanotechnology Applications l l l Creation of new materials w/ superior strength, electrical conductivity, resistance to heat and other properties Microscopic machines, including probes that could be injected into the body for medical diagnosis and repair Creation of “bio-chips” that detect food-borne contamination, dangerous substances in the blood or chemical warfare agents in the air Weizmann Institute of Science 6 11/5/2020

Defining a Cleanroom Designed, built, and operated to provide cleanliness, control, and/or isolation l Built with smooth, hard, cleanable surfaces l Air filtration system is critical – HEPA filters (High Efficiency Particulate Air) l Strict procedures control operation, personnel, process and materials l Weizmann Institute of Science 7 11/5/2020

Why have a Cleanroom? l To protect the product or process from contamination l To restrict access to the product or process l To contain hazards located within the cleanroom Weizmann Institute of Science 8 11/5/2020

What is Contamination? l Contamination is anything (material, substance, or energy) which corrupts the process or makes the product impure by either touching or mixing with it Solid / Liquid / Gas l Organic / Non-Organic l Airborne / Surface l Chemical Makeup l Size and Shape l Static Charge + / l Weizmann Institute of Science 9 11/5/2020

How is Cleanroom Contamination Measured? Measured in microns or micrometers l 1 micron = One millionth of a meter l There are 25, 400 microns in an inch l A human hair is approx. 75 microns in diameter l Human eye can see particles down to about 50 microns l Bacteria is approx. 2 to 10 microns in size l Weizmann Institute of Science 10 11/5/2020

How is Cleanroom Contamination Measured? l Cleanrooms are measured in the amount of ½ micron size particles in one cubic foot of sampled air. (½ micron particle =. 00001968”) Weizmann Institute of Science 11 11/5/2020

What Creates Contamination? l Personnel activity within the cleanroom generates and transports contamination l Moving l Talking l Breathing l Scratching l Sneezing Weizmann Institute of Science 12 11/5/2020

What Creates Contamination? People Contaminate! Activity PPM Motionless 100, 000 PPM Walking @ 2 mph 5, 000 PPM Walking @ 3. 5 mph 7, 000 PPM Weizmann Institute of Science Walking @ 5 mph 10, 000 PPM Horseplay 100, 000 PPM 13 11/5/2020

What Creates Contamination? l People generate contamination l Skin flakes and oil l Spittle (smokers especially) l Hair l Perspiration l Clothing debris (lint, fibers, etc. ) Weizmann Institute of Science 14 11/5/2020

What Creates Contamination? l Materials generate contamination Wood products l Construction materials (drywall, concrete dust, etc. ) l Pencils l Duct tape l Cardboard and paper l Paint and coatings l Weizmann Institute of Science 15 11/5/2020

What Creates Contamination? l Equipment generates contamination l Electric motors l Scaffolds l Ladders l Gang boxes l Brooms, mops and dusters Weizmann Institute of Science 16 11/5/2020

What are Cleanroom Classifications? l l l All cleanrooms are not built or operated to the same cleanliness standard due to the size of the devices that are being built or handled at each customers location. ISO 14644 -1, which replaces Federal Standard 209 E, is the basis of Cleanroom Classification. ISO 14644 classifies a Cleanroom based on the size and number of airborne particles Weizmann Institute of Science 17 11/5/2020

What are Cleanroom Classifications? Chart of ISO-14644 & FED-STD-209 E classifications ISO 14644 - FED-STD 1 Class 209 E Class 8 100, 000 0. 5µm particles per meter cubed 3, 520, 000 7 10, 000 352, 000 10, 000 6 1, 000 35, 200 1, 000 5 100 3, 520 100 4 10 352 10 3 1 35 1 Weizmann Institute of Science 0. 5µ particles per foot cubed 100, 000 18 11/5/2020

Clean-Build Goals and Methods l Minimize and remove contaminants from the environment Don’t allow contaminate into the cleanroom l Control behaviors in the clean room l Continual clean-up and removal of debris l Vacuuming, wet mopping, wipe downs l Weizmann Institute of Science 19 11/5/2020

Clean-Build Goals and Methods l Neutralize threat within the environment l l Grounding (Electro-Static Discharge control) Safety l Immediate spill cleanup Weizmann Institute of Science 20 11/5/2020

Case Studies l l Purdue University- Birck Nanotechnology Center Brookhaven National Laboratory (BNL)- Center for Functional Nanomaterials University of North Carolina and North Carolina AT&T- Joint School of Nanoscience and Nanoengineering (JSNN) Iberian National Laboratory (INL)- Brage Portugal Weizmann Institute of Science 21 11/5/2020

Purdue University Weizmann Institute of Science 22 11/5/2020

Purdue Birck Nanotechnology Center Weizmann Institute of Science 23 11/5/2020

Purdue Birck Nanotechnology Center Cleanroom Floor Plan Weizmann Institute of Science 24 11/5/2020

Brookhaven National Laboratories Weizmann Institute of Science 25 11/5/2020

BNL Center for Functional Nanomaterials Cleanroom Weizmann Institute of Science 26 11/5/2020

BNL Center for Functional Nanomaterials Cleanroom Floor Plan Weizmann Institute of Science 27 11/5/2020

UNC and NC A&T Weizmann Institute of Science 28 11/5/2020

UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom Weizmann Institute of Science 29 11/5/2020

UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom Weizmann Institute of Science 30 11/5/2020

Iberian National Laboratory Weizmann Institute of Science 31 11/5/2020

Iberian National Laboratory (INL)Cleanroom Weizmann Institute of Science 32 11/5/2020

Iberian National Laboratory (INL) Cleanroom Weizmann Institute of Science 33 11/5/2020

Define Requirements l l l l Functions/Processes Control Parameters Type of Room- Bay Chase vs. Ballroom Type of Systems- Air Delivery Vibration Criteria EMI Requirements Nano Bio Functions and Interface Weizmann Institute of Science 34 11/5/2020

Define Requirements Functional Processes: – – – – – Wet Process/Etch Dry Etch Photolithography Thermal Deposition MBE Inspection Characterization Nano Bio Weizmann Institute of Science 35 11/5/2020

Define Requirements Control Parameters: – – ISO Class Temperature/RH Process Services Exhaust Streams Weizmann Institute of Science 36 11/5/2020

Define Requirements Type of Rooms: – Bay/Chase – Ballroom Weizmann Institute of Science 37 11/5/2020

Define Requirements Type of Systems- Air Delivery: – – Fan Filters Duct Supply/Open Return Ducted Supply/Ducted Return Make Up Air Introduction Weizmann Institute of Science 38 11/5/2020

Define Requirements Vibration Criteria: – – Equipment Requirements Location within building Adjacent spaces Parameters (Millimeters per Second): • 125 MPS Areas • 200 to 500 MPS Areas • Over 500 MPS Areas Weizmann Institute of Science 39 11/5/2020

Define Requirements EMI Requirements: – Equipment Requirements – Fields AC and/or DC (milli. GAUSS) – 0. 1 m. G peak-to-peak Weizmann Institute of Science 40 11/5/2020

Define Requirements Nano Bio Functions – What is different? – How does it interface with the function fab? Weizmann Institute of Science 41 11/5/2020

Conclusion Questions Stated Design Parameters Weizmann Institute of Science 42 11/5/2020