Nanopositioning of the main linac quadrupole as means

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Nanopositioning of the main linac quadrupole as means of laboratory pre-alignment David Tshilumba, Kurt

Nanopositioning of the main linac quadrupole as means of laboratory pre-alignment David Tshilumba, Kurt Artoos, Stef Janssens 1 D. Tshilumba, CERN, 03 February 2015

OBJECTIVES • Investigate ways to combine alignment and nanopositioning into one actuation system •

OBJECTIVES • Investigate ways to combine alignment and nanopositioning into one actuation system • Upgrade of Type 1 nanopositioning prototype • Treatment of parasitic resonance modes • Reduction of translation – roll motion coupling 2 D. Tshilumba, CERN, 03 February 2015

CURRENT SYSTEM OVERVIEW • Coarse stage (cams) • Resolution : 0. 35µm • Stiffness:

CURRENT SYSTEM OVERVIEW • Coarse stage (cams) • Resolution : 0. 35µm • Stiffness: 50 k. N/µm • Stroke: 3 mm • Fine stage (piezo stacks) • Resolution: 0. 25 nm • Stiffness : 460 N/um (piezo) • Stroke: 5µm • Limitations: • precision of coarse stage (~10µm) • insufficient stroke of fine stage for thermal load in tunnel ( >100µm) 3 D. Tshilumba, CERN, 03 February 2015

GOALS Ø Goals: Ø increase the range of fine stage Ø Perform nanopositioning Parameters

GOALS Ø Goals: Ø increase the range of fine stage Ø Perform nanopositioning Parameters Resolution Precision step displacement Speed Rise time Settling time Value <0. 25 nm up to 50 nm 10μm/s 1 ms 5 ms 4 D. Tshilumba, CERN, 03 February 2015

DISTURBANCE SOURCES • Ground motion • External forces (Water cooling, ventilation, …) 5 D.

DISTURBANCE SOURCES • Ground motion • External forces (Water cooling, ventilation, …) 5 D. Tshilumba, CERN, 03 February 2015

STIFFNESS REQUIREMENTS • External forces (Water cooling, ventilation, …) • High stiffness • lateral

STIFFNESS REQUIREMENTS • External forces (Water cooling, ventilation, …) • High stiffness • lateral stability requirement met passively (0. 55 k. N/µm) • Active control still needed for vertical direction (1 k. N/µm) 6 D. Tshilumba, CERN, 03 February 2015

CONTROL FORCE REQUIREMENTS • Assuming P controller • Control force for ground motion compensation

CONTROL FORCE REQUIREMENTS • Assuming P controller • Control force for ground motion compensation (~10 N integrated RMS) • Nanopositioning force (~50 N integrated RMS) 7 D. Tshilumba, CERN, 03 February 2015

FUNCTIONAL AND PERFORMANCE REQUIREMENTS Parameters Resolution Precision Stroke step displacement Speed Rise time Settling

FUNCTIONAL AND PERFORMANCE REQUIREMENTS Parameters Resolution Precision Stroke step displacement Speed Rise time Settling time Control bandwidth Stiffness (vertical/lateral) Vertical force (dynamic) Horizontal force (dynamic) Value <0. 25 nm ± 3 mm 0. 25 up to 50 nm 10μm/s 1 ms 5 ms 300 Hz 1/0. 55 k. N/μm 50 N 30 N 8 D. Tshilumba, CERN, 03 February 2015

OPTIONS TO FULFIL THE REQUIREMENTS One single stage: Flexure lever mechanism • Possible monolithic

OPTIONS TO FULFIL THE REQUIREMENTS One single stage: Flexure lever mechanism • Possible monolithic design • No friction • No backlash • No wear • Avoid plastic deformation! • Effect on the dynamics of the system • Parameters to consider • Coupling stiffness • Pivot stiffness • Intrinsic flexure stiffness • • Effect on the effective attenuation factor • • n<1 => benefic effect on the dynamics of the system 9 D. Tshilumba, CERN, 03 February 2015

OPTIONS TO FULFIL THE REQUIREMENTS One single stage: active feedback • Features: • Bandwidth

OPTIONS TO FULFIL THE REQUIREMENTS One single stage: active feedback • Features: • Bandwidth increase • Higher robustness to disturbance at low frequency • Removal of steady state error 10 D. Tshilumba, CERN, 03 February 2015

OPTIONS TO FULFIL THE REQUIREMENTS • Coarse – fine resolution approach • Improvement of

OPTIONS TO FULFIL THE REQUIREMENTS • Coarse – fine resolution approach • Improvement of Coarse stage (Juha Kemppinen) • Improvement in the WPS measurement speed • Improvement in precision via feedback loop • Improvement of fine stage • Higher stiffness • Larger stroke (>200μm) Ø Compensation of thermal loads in tunnel Ø Beam time > 50 days 11 D. Tshilumba, CERN, 03 February 2015

ACTUATORS Lorentz actuators • Based on Lorentz force • Linear: • Zero stiffness •

ACTUATORS Lorentz actuators • Based on Lorentz force • Linear: • Zero stiffness • Resolution dependent on amplifier • Stroke: up to 75 mm • Heat dissipation • Compatibility with collider environment? 12 D. Tshilumba, CERN, 03 February 2015

ACTUATORS Hydraulic actuators • Based on hydraulic pressure • • High stiffness achievable: •

ACTUATORS Hydraulic actuators • Based on hydraulic pressure • • High stiffness achievable: • Resolution dependent of control valves • Stroke: >>1 mm • Friction between cylinder and piston • Susceptible to leakage 13 D. Tshilumba, CERN, 03 February 2015

ACTUATORS Piezoelectric actuators • Based on inverse piezo effect • Piezo stacks • High

ACTUATORS Piezoelectric actuators • Based on inverse piezo effect • Piezo stacks • High stiffness (480 N/μm) • Limited stroke: up to 0. 2% • Piezo stepper • Lower stiffness (150 N/μm) • Higher stroke (20 mm) • No Heat dissipation • Compatible with collider environment 14 D. Tshilumba, CERN, 03 February 2015

ACTUATORS COMPARISON Resolution Stiffness Stroke Remarks Lorentz +++ + +++ Compatibility to external magnetic

ACTUATORS COMPARISON Resolution Stiffness Stroke Remarks Lorentz +++ + +++ Compatibility to external magnetic field hydraulic + +++ Reliability Piezo stack +++ + Lack in stroke Piezo stepper +++ ++ +++ Lack in stiffness Piezo stepper: good candidate for mechanical attenuation 15 D. Tshilumba, CERN, 03 February 2015

INTERMEDIATE CONCLUSION • Overview of the current system • Requirements for Nano-positioning summarized •

INTERMEDIATE CONCLUSION • Overview of the current system • Requirements for Nano-positioning summarized • Alternatives to increase the range • single stage • Passive mechanical solution • Active solution • coarse-fine stage • Comparison of classical actuators • Piezo stepper + mechanical attenuation 16 D. Tshilumba, CERN, 03 February 2015

UPGRADE TYPE 1 Parasitic resonance modes • Unexpected eigen modes detected by EMA between

UPGRADE TYPE 1 Parasitic resonance modes • Unexpected eigen modes detected by EMA between 30 Hz and 50 Hz • Suspect root cause: connection stiffness between components • Bolting: up to 40% drop in eigen frequency • Gluing: up to 8. 5% drop in eigen frequency Courtesy of M. Guinchard 17 D. Tshilumba, CERN, 03 February 2015

UPGRADE TYPE 1 Parasitic resonance modes • Problematic region: base plate • Improvement after

UPGRADE TYPE 1 Parasitic resonance modes • Problematic region: base plate • Improvement after gluing instead of bolting: lowest eigen mode at 50 Hz Courtesy of M. Guinchard D. Tshilumba, CERN, 03 February 2015 18

UPGRADE TYPE 1 Parasitic resonance modes Further improvement: • Monolithic base plate design •

UPGRADE TYPE 1 Parasitic resonance modes Further improvement: • Monolithic base plate design • Additional stiffeners 19 D. Tshilumba, CERN, 03 February 2015

UPGRADE TYPE 1 Roll motion reduction: parallel kinematics • Permissible roll displacement: 100μrad •

UPGRADE TYPE 1 Roll motion reduction: parallel kinematics • Permissible roll displacement: 100μrad • Aluminum eccentric shear pins • 5. 15μrad/μm coupling • Alternative: rotational symmetry hinges • 0. 47μrad/μm coupling • Features: • Less components • Tunable translational stiffness • Design optimization required (Space availability) 20 D. Tshilumba, CERN, 03 February 2015

UPGRADE TYPE 1 Roll motion reduction: parallel kinematics • Permissible roll displacement: 100μrad •

UPGRADE TYPE 1 Roll motion reduction: parallel kinematics • Permissible roll displacement: 100μrad • Rotational symmetry hinges • 0. 47μrad/μm coupling • Lost motion: 5% (vertical) • High resonance frequencies 21 D. Tshilumba, CERN, 03 February 2015

UPGRADE TYPE 1 Roll motion reduction: serial kinematics • Permissible roll displacement: 100 urad

UPGRADE TYPE 1 Roll motion reduction: serial kinematics • Permissible roll displacement: 100 urad • Further coupling reduction • 0. 094 urad/um coupling • Lost motion: 0. 02% (vertical) • Design optimization required • More compact • Avoid flexible deformation modes 22 D. Tshilumba, CERN, 03 February 2015

CONCLUSION • Actuator requirements defined • Existing actuation technologies Vs performance requirements • Introduction

CONCLUSION • Actuator requirements defined • Existing actuation technologies Vs performance requirements • Introduction of concepts for further study to increase the range • Type 1 upgrade proposals under study 23 D. Tshilumba, CERN, 03 February 2015

FUTURE WORK • Optimize the presented alternative concepts for the kinematic decoupling in type

FUTURE WORK • Optimize the presented alternative concepts for the kinematic decoupling in type 1 stage • Design a 1 dof extended nanopositioning stage with attenuation mechanism + Experimental validation • Secondment at TUDelft and TNO almost finished 24 D. Tshilumba, CERN, 03 February 2015