NANOMANUFACTURING Boris N Chichkov Leibniz University Hannover Laser

NANOMANUFACTURING Boris N. Chichkov Leibniz University Hannover Laser Zentrum Hannover, Germany 10/26/2020 b. chichkov@lzh. de

Laser nanomanufacturing technologies near IR fs-pulses resin Two-photon polymerization Boris Chichkov, Nanomanufacturing Laser printing Laser ablation

Fs laser microstructuring SEM image of high quality microchip fabricated in 400 µm thick Al. N substrate Boris Chichkov, Nanomanufacturing

Laser generation of nanoparticles laser Nanoparticle Liquid target • • • High purity and stability Monoatomic materials Alloy nanoparticles Particle surface-functionalization Polymer-embedded nanoparticle Coatings with nanosized particles Controlled drug-release Stoichiometric nanoparticles Novel methods better control J. Phys. Chem. C, 2010 Appl. Phys. A, 2010 Boris Chichkov, Nanomanufacturing

FABRICATION OF SPHERICAL NANOPARTICLES BY LASER PRINTING Receiver substrate (glass) Thin Au film Donor substrate (glass) Tightly focused fs laser pulse „Laser-induced transfer of metallic nanodroplets for plasmonics and metamaterial application“ JOSA B, Vol. 26, No. 12, B 130, 2009 5 Boris Chichkov, Nanomanufacturing

Controlled fabrication and precise deposition of silicon nanoparticles Receiver substrate (glass) Silicon nanoparticle Tightly focused fs laser pulse Bulk silicon Silicon dioxide 200 nm Silicon donor layer 50 µm „Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses“, Nature Communications, 5, No. 3402, (2014). 6 Boris Chichkov, Nanomanufacturing

NANOTECHNOLOGY WITH LASERS 3 D nanostructuring by two-photon polymerization Ormocer near IR fs-pulses resin Opt. Lett. 28, 301, (2003) Adv. Eng. Mat. 5, 551, (2003) Boris Chichkov, Nanomanufacturing Deutsches Patent 101 52 878. 7 -43

PHCS FABRICATED IN ZR-HYBRID POLYMERS Nature Photonics, v. 3, 450 (2009) Boris Chichkov, Nanomanufacturing

TWO-PHOTON POLYMERIZATION (5 CM/S) Commercially available 2 PP system from LZH: b. chichkov@lzh. de Boris Chichkov, Nanomanufacturing

Microoptics: Tapered waveguides Boris Chichkov, Nanomanufacturing

Fabrication of SRRs by laser direct-writing -Mechanical properties of the polymer allow fabrication of free standing SRRs -Excitation of magnetic resonance for radiation incident perpendicular to substrate surface (kz) Ring diameter: 5 µm Wire diameter: 800 nm Gap width: 800 nm Boris Chichkov, Nanomanufacturing FDTD simulation of single SRR response Resonance: 11 µm wavelength (RLC model)

3 D CONDUCTIVE POLYMER MICROSTRUCTURES } PEG-DA and EDOT blends are used for 2 PP and sequential in-situ oxidative polymerization; } Real-3 D, physically stable and biocompatible microstructures are produced; } Interpenetrating polymer network of PEG-DA and PEDOT leads to conductivities of up to 0. 04 S/cm. EDOT PEG-DA EDOT PEDOT Boris Chichkov, Nanomanufacturing : poly(ethylene glycol) diacrylate : 3, 4 -ethylenedioxythiophene : poly(3, 4 -ethylenedioxythiophene)

3 D ULTRALIGHT AND ULTRA STRONG MATERIALS Boris Chichkov, Nanomanufacturing

SURFACE PLASMON-POLARITONS FOR DATA TRANSPORT Plasmonics Photonics Operating speed 1 THz 1 GHz Electronics 1 MHz The Pa 1 k. Hz st 10 nm 100 nm 1 µm 100 µm Critical dimension R. Zia et al. , Materials Today 9, 20 (2006) 14 Boris Chichkov, Nanomanufacturing 1 mm

SURFACE PLASMON-POLARITONS Bandwidth of light: Core size: 400 THz – 750 THz ~ 8 µm Bandwidth of 15 pitch: electronics: ~ 65 nm ~ 10 GHz Boris Chichkov, Nanomanufacturing