MTL The Microsystems Technology Laboratories at MIT Prof

MTL: The Microsystems Technology Laboratories at MIT Prof. Martin A. Schmidt Massachusetts Institute of Technology Microsystems Technology Laboratories - MIT

MTL - The Facilities • Integrated Circuits Laboratory – Class 10 - 2800 sq. ft. (6") – 1. 25 micron CMOS baseline process • Technology Research Laboratory – Class 100 - 2200 sq. ft. (6") – Flexible Process Environment • Exploratory Materials Laboratory – Class 1000 - 2000 sq. ft. – Thin Film Process Facility • IC Design Laboratory – Foundry IC Processes Microsystems Technology Laboratories - MIT

MTL Technology: A Tour of Scale Gyroscopes Displays Transistors Microengines mm mm Microchemical Plants Connectors Low Power IC Microsystems Technology Laboratories - MIT nm Nanotips

Lamination of Extruded 2 -D Shapes Valve Controller High Pressure Low Pressure Piezo Valve Electrical Power Microsystems Technology Laboratories - MIT

Opportunities • Rapid 2 -D Extrusion – Plastics, Silicon, Ceramics – First-Pass Success • Process modeling and tool characterization – Lower Cost • Transition from semiconductor mindset to machine tool mindset • Aligned Bonding of Chips – Transition from optical to mechanical/chemical • Self-assembly • LEGO (A. Slocum) Microsystems Technology Laboratories - MIT