MPI Halbleiterlabor fr Physik und fr extraterrestrische Physik
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Semiconductor Detector Workshop 2005 Taormina / June 19 – 24, 2005 A pn. CCD detector system for high speed optical applications Robert Hartmann 1 , Hubert Gorke 2 , Norbert Meidinger 3 , Heike Soltau 1 and Lothar Strüder 3 R. Hartmann SDW 2005 Taormina 21. 06. 2005 1) 2) 3) PNSensor Gmb. H, Römerstraße 28, 80803 München, Germany Forschungszentrum Jülich, Leo-Brandt-Straße, 52428 Jülich, Germany Max-Planck-Institut für extraterrestrische Physik, Giessenbachstraße, 85741 Garching, Germany
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Overview • Principles of pn. CCD • Optical properties • Detector format and geometry • Readout and data acquisition • Measurements and Performance • Summary and outlook R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Principles of the pn. CCD § § R. Hartmann SDW 2005 Taormina 21. 06. 2005 Fully depleted 3 -phase CCD Back side illuminated Cooled to -40º C. . -80º C (typ. ) Small detector capacitance ≈ 25 f. F → low noise § One integrated FET per channel § Channel-Parallel-CCD → fast readout § p-implanted registers § High radiation hardness
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Overview • Principles of pn. CCD • Optical properties • Detector format and geometry • Readout and data acquisition • Measurements and Performance • Summary and outlook R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik pn. CCD for optical applications § back illuminated detector Ø unstructured entrance window results in a homogeneous responsitivity Ø application of an ultra-thin rectifying implant leads to a high QE in the blue and UV region Ø easy to apply an anti-reflective coating § entire detector volume of 450µm is radiation sensitive Ø high quantum efficiency in the red and NIR region Ø fringing effects are negligible § small detector capacitance Ø high signal to noise ratio R. Hartmann SDW 2005 Taormina 21. 06. 2005 • highest electric field at readiation entrance side Ø narrow PSF
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Measured and modelled reflectivity of CCD entrance window : Measured data : Model of Si-Si. Ox-Si. O 2 Interface : Model of pure Si-Si. O 2 R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Internal quantum efficiency R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Measurement of optical response at room temperature Optimized for Cs. I(Ti) scintillator readout (λ = 548 nm) Standard entrance window, consisting of a thin Si. O 2 layer § Reflectivity of Silicon resp. ARC: Si/Si. O 2 ≈ 30% Technological compatible § Use layer stack of Si. O 2/Si 3 N 4 as ARC ØHigh QE in visible, maximum at 580 nm § Technology allows to taylor responsitivity over ØOptimum QE in NIR region a wide wavelength range ØBlue and UV optimized (50% @ 300 nm) R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik 150 mm Wafer of recent fabrication R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Fringing effects due to multiple light reflection between detector front and back side R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Overview • Principles of pn. CCD • Optical properties • Detector format and geometry • Readout and data acquisition • Measurements and Performance • Summary and outlook R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Schematic layout of 51 mm CCD with double-side readout R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik 51 mm pn. CCD with a double-sided readout, mounted onto a ceramic substrate Ø image area = 13. 0× 13. 5 mm 2 Ø chip area = 16. 0× 31. 0 mm 2 Ø 51 mm pixel size R. Hartmann SDW 2005 Taormina 21. 06. 2005 Ø 256× 264 pixel plus 2× 4 “light insensitive” columns Ø readout transfer to both sides
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Performance overview R. Hartmann SDW 2005 Taormina 21. 06. 2005 Fast transfer time 25 μs/image (split to both detector sides) CTI ≈ 1 · 10 -5 Charge handling capacity > 105 e¯ / pixel Fill factor 100 % Readout time Normal mode: 15 μs/row, i. e. 500 fps Fast mode: 6. 5 μs/row, i. e. 1000 fps Pixel rate 70 Mpixel/s , split on 8 readout nodes Readout noise Normal mode → < 500 fps : 1. 8 e¯ (rms) Fast mode → 1000 fps : 2. 3 e¯ (rms) Transfer binning (× 2, × 3, × 4) 2000, 3000, 4000 fps : 2. 3 e¯ (rms) Operating temperature - 55º C for all measurements above Dynamic output range 70 d. B → total charge loss < 0. 15 %
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Brief overview • Principles of pn. CCD • Optical properties • Detector format and geometry • Readout and data acquisition • Measurements and Performance • Summary and outlook R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik CAMEX Amplification- and Readout-Chip R. Hartmann SDW 2005 Taormina 21. 06. 2005 • • • Multi-correlated double-sampling filtering (MCDS) Signal processing of all channels in parallel (132) Serialized readout parallel to analogues signalprocessing Selectable gains and operating modes Electronic noise contribution less than 1 e. Readout-speed per node up to 10 MHz (i. e. 6. 6µs per line on two readout nodes)
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Data acquisition and real-time correction Example for a SH detector: § 1000 frames / sec. § 264 lines / frame § 264 pixel / line Ø 70 Mpixel / sec. !!! Ø 140 MB/sec. Split on 4 DAQ boards Ø á 17. 5 Mpixel / sec. Ø 2× 14 bit flash-ADC Pipelined data processing in fast FPGA processor for real-time data correction and reduction Output of 1 st CCD line is available with a latency time < 40 ms R. Hartmann SDW 2005 Taormina 21. 06. 2005 Ø constructing frame Ø MIP and cluster analysis Ø latency ~ 1. 2 msec
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Overview Camera Controller 19’’ crate double height ADC-Modul 3 ADC-Modul 4 2 2 2 PS-Control ADC-Modul 2 2 Sequencer ADC-Modul 1 Fiber Interface c. PCI-Bus Front-End-Boards (incl. clock-drivers) Linux PC 30 in total, free-to-ground, PC controlable, incl. monitor 32 80 MB/s 300 m R. Hartmann SDW 2005 Taormina 21. 06. 2005 Power-Supplies CAMEX pn. CCD-Chip
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Data acquisition electronic system Sequenzer R. Hartmann SDW 2005 Taormina 21. 06. 2005 1 …Spare 4 ADC-Boards Optical for Voltage Interface á 2 Controller ADCs
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Overview • Principles of pn. CCD • Optical properties • Detector format and geometry • Readout and data acquisition • Measurements and Performance • Summary and outlook R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Spectroscopic soft X-ray performance of pn. CCD Ø Operating Temperature = -55° C Ø Overall noise contribution : 2. 3 eØ All events reconstructed Ø FWHM for singles: 45 e. V R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Low and uniform noise performance 66× 264 pixel, ⅛ of 51 mm CCD (“worst” section) • 1 of 4 output nodes on one readout side • image plus storage area • operating temperature = -55°C • “ 1000 fps” - timing scheme Mean noise = 2. 3 electrons (rms) 98. 8% of all pixel exhibit less than 2. 7 e- noise 100% are below 3. 1 e- R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Increase readout speed for dedicated applications Ø Repetively readout of n lines with signal . . Ø merely transfer with no readout lines w/o signal Ø readout of next n lines Ø and so on … 40× 40 SH with 5× 5 Pixel: 1 k. Hz → 1. 3 k. Hz frame rate R. Hartmann SDW 2005 Taormina 21. 06. 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Conclusion Ø pn. CCDs exhibit a high quantum efficiency from the optical to NIR region Ø device with 256× 264 (13. 0 x 13. 5 mm 2) image size and a double side readout was successfully tested for a frame rate of 1000 fps Ø total readout noise of 2. 3 e- (RMS) was achieved in this mode at an operating temperature of -55ºC Ø binning in transfer direction allows 2 k. Hz, 3 k. Hz, . . . frame rates with same noise figures due to very low leakage current Ø low and homogeneous noise performance over entire area (no bright or hot pixel, even at higher temperatures) R. Hartmann SDW 2005 Taormina 21. 06. 2005 Ø optical photon counting possible down to ≈ 8 γ/pixel
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik Back to the beginning Long term stability of pn. CCD detector aboard XMM-Newton (1999): Total area = 36 cm 2 all 12 Sub-CCDs are still operating same operating parameters (T = -90°C) quantum efficiency unchanged noise performance unchanged slight radiation damage as expected: CTI FWHM after 5 years in orbit: R. Hartmann SDW 2005 Taormina 21. 06. 2005 Al-K (1. 5 ke. V): 110 e. V → 111 e. V Mn-Kα (5. 9 ke. V): 155 e. V → 160 e. V ← 6 cm → § § §
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik R. Hartmann SDW 2005 Taormina 21. 06. 2005
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