microfabrication Jacopo Bronuzzi Riccardo Callegari Timothe Frei Alessandro

microfabrication Jacopo Bronuzzi, Riccardo Callegari, Timothée Frei, Alessandro Mapelli EP-DT-DD Section Meeting 30. 11. 2018 100 µm 1 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

graduations • Riccardo CALLEGARI, MSc Thesis, Università di Genova, Integration of a microfluidic circuitry in a CMOS device operating in HEP experiments (EDMS Doc No 2052856), Oct. 2018 • Jacopo BRONUZZI, Ph. D Thesis, EPFL, Transient Current Technique characterisation of bonded interfaces for monolithic silicon detectors (EDMS Doc No 2053017), Nov. 2018 • Timothée FREI, Ph. D Thesis, EPFL, Radiation hard, micro-engineering solutions for thermal management in high energy physics and space applications, exp. Mar. 2021 • Candidacy Exam, Mar. 2021 • Collaborative R&D between CERN and CSEM on Radiation hard, micro-engineering solutions for thermal management in High Energy Physics activities and space applications (AGREEMENT KN 4137/KT/EP/283 C) Ricky Dr. B. Timo 2 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

integrating microfluidics into microelectronics Riccardo Callegari, Roberto Cardella & the DSF Team 100 µm Develop an in-house CMOScompatible process to embed microchannels into MALTA chips. 3 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

integrating microfluidics into microelectronics Riccardo Callegari, Roberto Cardella & the DSF Team Capillaries (Øext 1. 6 mm) 3 D printed connector O-rings (1. 15 mm x 1 mm) Unsupported adhesive tape MALTA chip (Ø 500 µm) 4 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

micro-BPM Jacopo Bronuzzi & the IRRAD Team • Al Si. O 2 Si • • 5 Homemade Beam Profile Monitors fabricated at EPFL: • Al (400 nm) on Si. O 2 on Si; • Al (400 nm) on Polyimide; • Al (400 nm), 2 layers; • Al (50 nm) on Si. O 2 on Si; • Al (8000 nm) on Si. O 2 on Si. Standard BPMs • 6 layers of Cu, 15 µm thick on kapton Experimental data shows good correlation between standard BPMs and micro-BPMs Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

Thermo-mechanical prototypes Jacopo Bronuzzi & EP-DT-EO Pads metal RTDs metal Heaters metal Si. O 2 Si • • Heaters with different power dissipation regions Resistive Temperature Detectors (4 -pts meas. ) 6 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

micro-OHP Timothée Frei & EP-DT-EO in collab. with CSEM, EPFL and SSC • • • New approach for on-detector cooling based on micro Oscillating Heat Pipes (OHP). Decoupling the fluidic interface by creating independent cooling loops. MEMS Heat Pipes Review (EDMS Doc No 1852809). μOHP μOHP Cooling plant 7 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

micro-OHP Timothée Frei & EP-DT-EO in collab. with CSEM, EPFL and SSC • Heat Source(s) at “ evaporators” 20 mm Heat Sink(s) at “condensers” First batch of prototypes • assess the feasibility of μOHPs in silicon for HEP and space applications. • dual-diameter design to counteract gravity effects. Cross-section of the prototype (in µm) First microfabricated porotype in silicon and glass 8 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

high school interns • Internship at EPFL - J. Bronuzzi • Fabrication and characterisation of thin film resistors • Thin films deposition, Photolithography, Etching, Observations (Optical microscope, profilometer, SEM), Elec. probing. • Since Dec. 2017 • Next: 13 Dec 2018 • EDMS CERN-0000194315 • Internship at CERN - R. Callegari • Connecting microfluidics to the real world • Under preparation • First date: 19 Dec. 2018 • EDMS CERN-0000194316 9 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

silicon microchannel cooling NA 62 LHCb • Experiment switched OFF 12. 11. 2018. • 3 GTKs removed yesterday. • 3 GTKs for beginning of Run 3 are ready. • Detector database being finalised. • WP DT/NA 62 finishes at the end of the year. • EDMS Doc No 1738693. • Continued support to cooling plates fabrication and module assembly for Upgrade I (Run 3 + Run 4). • Discussions for Upgrade II (beyond Run 4) have started in Mar 2018 (https: //indico. cern. ch/event/681201/). 10 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

Keyence VR-3200 • Currently in TFG lab (bdg 3). • Will soon be moved to the DSF with the help of Ruddy Costanzi. 11 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018

• • e-group: micro-fabrication@cern. ch indico: https: //indico. cern. ch/category/4273/ weekly meetings: Fridays at 14 h 00 in room 20 -1 -004 EDMS: https: //edms. cern. ch/project/CERN-0000175876 100 µm 12 Alessandro Mapelli | EP-DT-DD Section Meeting | 28. 11. 2018