Micro and Nano Fabrication Technology Road Map and
![Micro and Nano Fabrication Technology Road Map and Commercialization Challenge in Japan Ryutaro MAEDA Micro and Nano Fabrication Technology Road Map and Commercialization Challenge in Japan Ryutaro MAEDA](https://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-1.jpg)
Micro and Nano Fabrication Technology Road Map and Commercialization Challenge in Japan Ryutaro MAEDA Principal Research Scientist Advanced Manufacturing Research Institute National Institute of Advanced Industrial Science and Technology (AIST) National Institute of Advanced Industrial Science and Technology(AIST)
![Road map of Micro and Nano Fabrication Technology Ø Government Investment is not so Road map of Micro and Nano Fabrication Technology Ø Government Investment is not so](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-2.jpg)
Road map of Micro and Nano Fabrication Technology Ø Government Investment is not so large for Fabrication Technology l l 1 B US$ for Micro/Nano, IT based fabrication , RT and Nano materials technology C. f. 4. 5 B US$ for bio technology, 2 B US$ for ICT, 6 B US$ for Energy Ø While 70 % of export is come from Machine, automobile industry in Japan
![Road map of Micro/Nano fabrication Ø ROAD map can be found at; http: l Road map of Micro/Nano fabrication Ø ROAD map can be found at; http: l](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-3.jpg)
Road map of Micro/Nano fabrication Ø ROAD map can be found at; http: l //www. nedo. go. jp/roadmap/index. html Ø Effective for long term planning can be separated by personal change. Ø Different from Electronics, target is not so simple, but diverse. Ø Application is not visible.
![Commercialization Difficulties and solutions Business difficulties l l l Ø High Cost of facilities Commercialization Difficulties and solutions Business difficulties l l l Ø High Cost of facilities](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-4.jpg)
Commercialization Difficulties and solutions Business difficulties l l l Ø High Cost of facilities Lack of Engineers Small batch production Solutions l l l Fabrication and Prototype Service Education Look for Mega hits? • From commercial needs to social needs? l Low Cost Process R&D • Nanoimprint • Desk-top MEMS factory National Institute of Advanced Industrial Science and Technology(AIST)
![Fabrication service for Industry Bridge from Basic Study to Commercialization back National Institute of Fabrication service for Industry Bridge from Basic Study to Commercialization back National Institute of](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-5.jpg)
Fabrication service for Industry Bridge from Basic Study to Commercialization back National Institute of Advanced Industrial Science and Technology(AIST)
![Micro Nano innovator education From Product to System, Product Based Learning National Institute of Micro Nano innovator education From Product to System, Product Based Learning National Institute of](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-6.jpg)
Micro Nano innovator education From Product to System, Product Based Learning National Institute of Advanced Industrial Science and Technology(AIST)
![Wireless Networked MEMS “Animal Watch Project” Sensing unit + Power Management unit + Communication Wireless Networked MEMS “Animal Watch Project” Sensing unit + Power Management unit + Communication](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-7.jpg)
Wireless Networked MEMS “Animal Watch Project” Sensing unit + Power Management unit + Communication Unit Encupsulation Smart Flea Less than 5 mm 2 distance: 30 m 2. 4 GHz -250 kbps Solution by System in Package Wafer Level Packaging Minituarization of Passivecomponents (Low Temperature Cofired Ceramic) Wafer Level CSP Wireless Communication Power Management Unit Conventional Zig. Bee Chip Passive components Physical Sensors Flexible film packaigng 70% of Area is Passive componen 8 bit micro computer Quartz 2. 4 GHz. RFLSI (Sensors and Power is not installed) National Institute of Advanced Industrial Science and Technology(AIST)
![Monitoring of Human Conditions (esp. sleep) Brain waves Blood pressure Electrocardiogram Present: Measurements at Monitoring of Human Conditions (esp. sleep) Brain waves Blood pressure Electrocardiogram Present: Measurements at](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-8.jpg)
Monitoring of Human Conditions (esp. sleep) Brain waves Blood pressure Electrocardiogram Present: Measurements at Hospital • not frequently • inconvenient Wireless measurements at Home • Continuous monitoring (ex. every morning) National Institute of Advanced Industrial Science and Technology(AIST)
![Green IT by MEMS Energy consumption by IT industry in Japan Senario NTT1 After Green IT by MEMS Energy consumption by IT industry in Japan Senario NTT1 After](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-9.jpg)
Green IT by MEMS Energy consumption by IT industry in Japan Senario NTT1 After Basic counter measure MItsui 2 2010 Electric Power consumption 2020 Electric Power Consumption 45 B k. Wh ― 54 B k. Wh ― SCI 3 No counter measure 327 B k. Wh ― Mitsubishi 4 ― 66 B k. Wh 2, 38 B k. Wh METI 5 ― 47 B k. Wh 87 B k. Wh Emission of CO 2 by IT industry is more than 2% and comparable to that of Avian industry Total energy consumption: 約980 B k. Wh(2005) National Institute of Advanced Industrial Science and Technology(AIST)
![Networked Sensing of Energy consumption Electrical energy consumption Time 21: 22: 30 21: 25: Networked Sensing of Energy consumption Electrical energy consumption Time 21: 22: 30 21: 25:](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-10.jpg)
Networked Sensing of Energy consumption Electrical energy consumption Time 21: 22: 30 21: 25: 13 21: 40: 20 21: 40 ----- Hom e Home Energy Management system (HEMS) Building Energy Management systems (BEMS) Node ID 201 53 125 16 --- Visualization of CO 2 emission Micro ubiquitous power meter Offic e ID C ULP IDC back National Institute of Advanced Industrial Science and Technology(AIST)
![Nanoimprint Low cost process for sub micron machining Photonics Bio-chemical technology Reactor Lenz array Nanoimprint Low cost process for sub micron machining Photonics Bio-chemical technology Reactor Lenz array](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-11.jpg)
Nanoimprint Low cost process for sub micron machining Photonics Bio-chemical technology Reactor Lenz array Optical guide Diffraction lattice Photonic devices Micro channel Mixer Bio-chip 100 -200 billion US$(2010)DVD Lithography (50 nm) Magnetic memory Display Electronics HDD Storage Media National Institute of Advanced Industrial Science and Technology(AIST)
![Nanoimprint R&D Materials, especially glasses Ø Applications Ø l l Bio Data storage Fuel Nanoimprint R&D Materials, especially glasses Ø Applications Ø l l Bio Data storage Fuel](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-12.jpg)
Nanoimprint R&D Materials, especially glasses Ø Applications Ø l l Bio Data storage Fuel cell 3 D packaging Large area Ø Inspection Ø Nm resolution Overlay Alignment Ø National Institute of Advanced Industrial Science and Technology(AIST)
![Bio applications of Nanoimprint Cell growth Nano pillar for cell growth http: //www. hitachi. Bio applications of Nanoimprint Cell growth Nano pillar for cell growth http: //www. hitachi.](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-13.jpg)
Bio applications of Nanoimprint Cell growth Nano pillar for cell growth http: //www. hitachi. co. jp/New/cnews/month/2005/02/0224. html Osaka Pref. University Professor Hirai National Institute of Advanced Industrial Science and Technology(AIST)
![Prototype Structure of Nanoimprint Fuel Cell -DMFC Si mold National Institute of Advanced Industrial Prototype Structure of Nanoimprint Fuel Cell -DMFC Si mold National Institute of Advanced Industrial](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-14.jpg)
Prototype Structure of Nanoimprint Fuel Cell -DMFC Si mold National Institute of Advanced Industrial Science and Technology(AIST)
![Nanoimprinting Application for Packaging Start substrate Metallization Polymer deposition Si-substrate CMP Nanoimprint substrate 戻り Nanoimprinting Application for Packaging Start substrate Metallization Polymer deposition Si-substrate CMP Nanoimprint substrate 戻り](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-15.jpg)
Nanoimprinting Application for Packaging Start substrate Metallization Polymer deposition Si-substrate CMP Nanoimprint substrate 戻り substrate National Institute of Advanced Industrial Science and Technology(AIST)
![For further large area of Nano patterning ーRoll type fabricationー Max. temperature: 250℃ Max. For further large area of Nano patterning ーRoll type fabricationー Max. temperature: 250℃ Max.](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-16.jpg)
For further large area of Nano patterning ーRoll type fabricationー Max. temperature: 250℃ Max. press force: 10 k. N Scan speed: 0. 1 mm/sec – 10 mm/sec Max. stamp size: 300× 500 mm 戻り National Institute of Advanced Industrial Science and Technology(AIST)
![Desktop Nanofactory TOP down Nanotech or MEMS approach Larger wafer Process Standard Winner American Desktop Nanofactory TOP down Nanotech or MEMS approach Larger wafer Process Standard Winner American](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-17.jpg)
Desktop Nanofactory TOP down Nanotech or MEMS approach Larger wafer Process Standard Winner American Capital China Production Need Change National Institute of Advanced Industrial Science and Technology(AIST)
![Desktop Factories Ceramic heater back National Institute of Advanced Industrial Science and Technology(AIST) Desktop Factories Ceramic heater back National Institute of Advanced Industrial Science and Technology(AIST)](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-18.jpg)
Desktop Factories Ceramic heater back National Institute of Advanced Industrial Science and Technology(AIST)
![For Commercialization Ø Networked MEMS l l Ø New process development for MEMS l For Commercialization Ø Networked MEMS l l Ø New process development for MEMS l](http://slidetodoc.com/presentation_image_h2/a790a89a3343878f4abc6c8ca7a0aa9a/image-19.jpg)
For Commercialization Ø Networked MEMS l l Ø New process development for MEMS l l Ø Ø Bio-technology applications ( u. TAS, Artificial Organs) Security monitoring of Nature and Constructions Forming and Nano-imprinting Miniature MEMS fabrication system Education for Industry Real obstacle for high technology venture company l l Japanese ethics and restriction (compliance, conflict of interest etc. ) Mother heritage system National Institute of Advanced Industrial Science and Technology(AIST)
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