MEMS Rotary Engine Power System Apex Seal Albert
MEMS Rotary Engine Power System / Apex Seal. Albert Fabrication Eri Takahashi, Pisano APP 90 MEMS Rotary Engine Power System Project Long Term Goal The thing is… To fabricate an engine sealing system capable of high compression ratios. Apex tip Refer to APP 46 “MEMS Rotary Engine Power System / Apex Seal Design” by Fabian C. Martinez = Apex Seal for 500 um rotor Aspect Ration Dependant Etch (ARDE) The undercutting around the apex tip was observed Two Approaches How to planarize the trench? 40 µm Guard Trenches Cut out around a rotor with 40 µm guard trenches Guard Trench • Can be filled comformally in desent amont of time? Trench width = 40 µm, Trench depth = 500, 900 µm • Would it fit to later process? 20µm Radius Etch the trench, fill-in to protect the tips, and then etch a rotor shape Apex Tip Protection • Can it be removed easily afterwards? Planarization Methods Deposition Process fit Having a narrow trench between rotor body and apex seal laid out close to outer sidewall caused this problem Removal Next Step: Test Structure Other factors 5 mm CVD rate too slow LPCVD Nitride, Poly, PSG Good, but trench may be too big… Good 7000 A/min by PE-CVD SOG TEOS Electroplati ng Good ? May “bubble” when heated Good Nitride, Poly low selectivity to Si Good 1 mm 5 mm Exotic material New apparatus needed Test for; • Aspect ration • Pitch 1 mm 2 mm • Angular orientation BSAC © 2004 Spring IAB. Confidential Information. Not to be made public without permission from UC Regents.
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