MCW 9 SOI Microring Modulator for Optical CDMA

MCW 9 SOI Microring Modulator for Optical CDMA Dr. Sagi Mathai, Joanna Lai, Xin Sun Prof. Tsu-Jae King, Prof. Ming C. Wu © 2006 University of California Prepublication Data March 2006

Code Division Multiple Access WDMA Time CDMA Wavelength TDMA Time • Wavelength interleaved • Shared time-freq space • Share time slots • Unique spreading code • Independent modulation • Enhanced security • Anti-jamming • Resistant to multi-path Time Division Multiple Access effects • Time interleaved • Share bandwidth • Common modulation TDMA: Wavelength Division Multiple Access CDMA: Code Division Multiple Access © 2006 University of California Prepublication Data March 2006

Optical CDMA Encoder Building Block Tunable SOI Microring Modulator Contact Pads MEMS Gap Closing Actuators Optical Waveguide Thin Film Heater SOI Substrate Contact Pads © 2006 University of California Microring Modulator Coplanar Transmission Line Prepublication Data March 2006

Fabrication Process (1) Waveguide Partial Etch (2) LDS Implant (3) Waveguide Completion Etch PR Si 3 N 4 PR Si. O 2 Si BOX (6) Ohmic Contact Implant BOX (5) Poly Gate Electrode PR (4) Sidewall Spacer Si 3 N 4 n+ Poly BOX (8) Al Liftoff (9) HF Vapor Release BOX (7) Stringer Removal PR Si. O 2 PR PR Al BOX © 2006 University of California BOX Prepublication Data March 2006

Process Development Microring and MEMS Actuators Submicron Waveguides BOX Thin Film Heater © 2006 University of California Prepublication Data March 2006

Process Development (cont) Submicron Waveguide MEMS Actuators Microring Resonator Thin Film Heater Submicron Waveguide © 2006 University of California Prepublication Data March 2006

Acknowledgement DARPA OCDMA Program © 2006 University of California Prepublication Data March 2006