Magnetic Field Dynamic Electricity ElectroMagnetic Wave Electric Field

動電氣 磁界 (Magnetic Field) (Dynamic Electricity) 電磁波 (Electro-Magnetic Wave) 靜電氣 電界 (Electric Field) ( Static Electricity ) Electrostatic Discharge (ESD) Device Degradation, Process Malfunction Electrostatic Attractions (ESA) Particle Contamination

Contact Voltage φ1 - φ2 [V] Vs = After contact Before contact Φ, Φ 2 : Work Function Forbidden Band E φ1 f 1 e φ1 - φ2 φ2 Ef 1 Conduction Band φ2 φ1 d (A) - (B) Free Electron How to make free electron ; + Heavy Light, Heat, Physical shock (A) + + + + ε 0 (B) - Electrons inside Material A flow over to material B

Egg breaks if dropped from above this line How much is your target electrostatic voltage ? 정 전 전 압 A B

Particles + + + + +Charged Body + + Particles + Induced Charge + + Pearl chain 현상 + Hair Gradient Force ++ + Particles 1 Particle 1 + 2 Charged body >> 2 : Permittivity Constant

(a) Corona Discharge (b) Spark Discharge Charged body d Charged body E = V/d Arc Ground material

Semiconductors Type VMOS MOSFET Ga. As FET EPROM JFET OP-AMP CMOS Schottky Diodes FILM RESISTORS Bipolar Transistors SCR Schottky TTL logic ESD susceptible voltages[V] 30 1, 800 100 200 100 300 100 150 140 7, 000 190 2, 500 250 3, 000 300 2, 500 300 3, 000 380 7, 000 680 1, 000 2, 500

Conductor Earth Ground (Equipment) Ionization Methods Air Humidity Insulator Antistatic Materials (LCD & Wafer) (Charge Prevention and Shielding) Educations

Semicon. Process Surface Coating LCD/PDP Process Semiconductor Process q Photo Ionizer, Ion Bar, Ion Blower LCD / PDP / OELD Process q Photo Ionizer, Ion Bar, Ion Blower q Electrostatic Monitoring System Special Coating & Printing Process q Coating & Printing on PE, PP Film q Coating & Printing on Clean Paper Nanotechnology Treatment Chemical Process Consulting Education Chemical Process q HDPE Package Line, Powder Handling Process Line Nanotechnology Treatment Process q Photo Ionizer q System Structure Design Consulting & Education q Technical Consulting, Diagnosis Process Line

도전성 섬유에 의한 제전복의 대전방지 원리 0. 5 ∼ 1 cm Conductive Fiber Corona Discharge + + + +– + Synthetic Fiber (PE) + + +

2) 전압인가식 제전기 2 -1. 전압인가 방식에 따른 분류 - AC Type - Pulsed DC - DC Type 2 -2. Ion Blowing 방식에 따른 분류 - Air Injection Type – Ion Bar / Ion Gun / Ion Nozzle Etc - Fan Blowing Type – Ion Blower / Over Head Ion Blower Etc

DC AC Pulsed DC Pulsed AC

+ discharge Emitter Ground Emitter - discharge + V- V -------Ions ++++++++++++ -----------------Charged matter ++++++ ++ ++++ ---------------------- Electrostatic Potentials [k. V] 5 4 3 2 1 0 -1 10 20 30 40 50 -2 -3 -4 -5 Times[s] Characteristics of Pulsed DC and Steady state DC Ionizer 60

+ discharge Emitter Ground Emitter +V -V - - - discharge + + + - - Ions - - - + + + + + + - - - - - - - + + + + + - - - - - - + + + + + + High speed moved Charged matter - - - - - - - - - - -

Ion Concentrations[Ⅹ 1000 ions/cc] Characteristics of AC Ionizer 500 Measuring point : 1. 25 m distance 400 Down stream 0. 3 [m/s] 300 200 100 0. 1 0. 2 0. 3 0. 4 0. 5

Decay Time Characteristics As Function of Wind Speed Blowing Fan’s wind speed 30 distance Decay Time (t, sec) 250 mm 500 mm 25 750 mm 1000 mm 20 5, 000 to 500 V 15 10 5 0 0 0. 5 1 Wind Speed (m/s) 1. 5 2 2. 5

Decay Time Characteristics As Function of Skewed Angle Ionizer ■ 250 mm θ 150 Decay Time ( t , sec ) * Distance ▲ 500 mm ◆ 750 mm ▼ 1000 mm ● 1500 mm ◆ 100 ◆ 50 ● ▲ 0 ■ -60 -45 -30 ▲ ▼ ◆ ■ ▲ -15 0 ■ 15 30 45 Horizontal Skewed Angle, θ ( ˚ ) 60

Pearl Chain Phenomena

Needle (Not Used) After 60 days

SEM/EDX Spectrum of deposited particles on the electrode (Poly Si)

Controller 1 EA 당 16 EA의 Ion Bar 연결가능, 총 16 × 8 (Multi port) = 2, 048 EA 1대의 PC로 2, 048 EA의 Ion Bar Control 및 Alarm Check 가능 함.

Current/second Distance Air flow Tact Time of changed matter

빛의 스펙트럼 Wave [cm] Photo Energy Application mm me. V mm Wave Infrared ray Visible ray Ultraviolet ray Vacuum Ultraviolet ray Soft X-ray rage Hard X-ray Medical treatment µm e. V Laser work Light work nm ke. V Roentgen pm Me. V -ray VLSI Ringraphy, Chemical Analysis, Microscope Cancer treatment Radiography High Energy ray fm Ge. V Nuclear Physics Elementary Particle Physics am Te. V

Photo Ionizer의 구조

e 1’- e 3 e e + + 3 + - e + - + e - e- e e + + h + + - - 2’ - - e- e- e 1 + - - Soft X-ray h e 1’e 2 + e- h ee- e e - + - ee- + + e- e - e. Gas, Atom + - + ion - ion e- electron + h Phonton energy

Photo Ionizer CE 2002 Certified 이온 발생 방식 Ion Generation Soft X-Ray 인가전원 Input Power 100~230 VAC, 50~60 Hz 관전압 / 전류 Anode Voltage / Current DC 9. 5 k. V/150μA 안전기능 Safety Interlocked by door switch 원격조작 Function Remote No / Off Control 표시기능 Remote Control Running Indication □ Particle Free □ Maintenance Free Function □ High Ion Density □ No Addition CDA or N 2 Indicate Function □ 5 V Ion Balance □ Less O 3 gas generation Sunje [SXN-10 Series] 보증수명 Warranty Period 8, 000 Hrs – 사용수명 10, 000시간 사용환경 Operating Circumstance Temperature : 0~40℃ Humidity : 0~60% RH Without condensing Decay Time Graph Hamamatsu

정전기 제거 장치의 관리 주기 기준 방전전극 청소주기(권장사 항) 전극 교체주기 (권장사항) 기능 Check -Decay Time -Ion Balance 반도체, LCD Line 1회/1 Month 1회/1 year 1회/6 Month Module Line 1회/1 Month 1회/2 year 1회/6 Month Super Clean Room 환 경 1회/1 Month 1회/1 year 1회/6 Month

HARDWARE 정전기 제거 대책 제전기 Floor body 대책 Environment(humidity) 수입품검사 SOFT WARE Hardware 유지, 보수 (직, 반장) Electrostatic Mind (Education)

Ionizer의 목적과 관리방안 2006. 06 Sun. Je Hi-Tek Co. , Ltd www. sunstat. com

Reference 1. Ken Murray, Vaughn Gross, “Ozone and small Particle Production by Steadystate DC Hood Ionization” : EOS/ESD symposium Proceeding(1989) 2. 阪田 : 차세대 클린룸의 정전기 대책, RCJ 2제 2회 EOS/ESD 심포지움 예고집(1992. 11) 3. ESD Association : Standard for Protection of Electrostatic Discharge Susceptible Items – Ionization, EOS/ESD S 3. 1 -1001 4. ESD Association : for the Protection of Electrostatic Discharge Susceptible Items–Selection and Acceptance of Air Ionizers, ESD-ADV 3. 2 -1995 5. 일본전자부품신뢰성센터편 : 이오나이져의 규격에 관한 동향조사연구 보고서 R-5 -ES-02(1994 -3) 6. ESD Association : ESD handbook 7. 클린룸에서의 정전기 장해와 이오나이져에 의한 대전방지, 정전기학회지 15, 2(1991) 134 -143) 8. IEC TC-47(1330)IONIZATION 9. ANSI, EOS/ESD S 3. 1 -1991 www. sunstat. com

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