Litho Works PEB Plate repeatability Dataset 3 data

Litho. Works PEB Plate repeatability Dataset: 3 data sets, each one 2 days apart from previous Metrology: On-Wafer analysis TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@enter. net Sept. 2003 Litho. Works PEB August 27, 2003

Project Summary • Program: • Situation: Litho. Works PEB ? Three data sets have been presented from PEB Bake 8: • July 16, 18 & 21 of 2003 • Objective of this analysis: ? Determine PEB stability ? Note: Activation temperatures are set at 100 o. C Sept. 2003 Litho. Works PEB SLS Inc. Confidential 2

July 16 PEB 8 • Thermal variation from wafer mean vs time Sept. 2003 Litho. Works PEB SLS Inc. Confidential 3

July 16: Total THERMAL Energy Integrated area under the time-temp curve Sept. 2003 Litho. Works PEB SLS Inc. Confidential 4

July 16; Energy Variation Sept. 2003 Integrated area under the time-temp curve showing temperature delta from wafer average Litho. Works PEB SLS Inc. Confidential 5

July 16; Range & rise times Sept. 2003 Litho. Works PEB SLS Inc. Confidential Plot of range of temperature about the mean temperature AND mean temperature 6

July 16: Thermal Maps Temperature before heating (left) and at end of maximum temperature period (right) Sept. 2003 Litho. Works PEB SLS Inc. Confidential 7

July 18; PEB 8 Sept. 2003 Litho. Works PEB SLS Inc. Confidential 8

July 18; Energy Total Sept. 2003 Litho. Works PEB SLS Inc. Confidential 9

July 18; Energy Variation Sept. 2003 Litho. Works PEB SLS Inc. Confidential 10

July 18; Thermal Range Sept. 2003 Litho. Works PEB SLS Inc. Confidential 11

July 18; hi/low steady state Sept. 2003 Litho. Works PEB SLS Inc. Confidential 12

July 21; PEB 8 Sept. 2003 Litho. Works PEB SLS Inc. Confidential 13

July 21; Thermal Energy Total Sept. 2003 Litho. Works PEB SLS Inc. Confidential 14

July 21; Variation in Thermal Energy Sept. 2003 Litho. Works PEB SLS Inc. Confidential 15

July 21; Thermal Range over Time Sept. 2003 Litho. Works PEB SLS Inc. Confidential 16

July 21; Steady state temperature profiles Sept. 2003 Litho. Works PEB SLS Inc. Confidential 17

July 21; Thermal Heating Click on image to play movie of thermal heating. Press esc to exit. Sept. 2003 Litho. Works PEB SLS Inc. Confidential 18

Comparison of Rise/Fall Cycles Recall that the July 16 cycle had a slightly larger range/rise in temperature at 127 seconds. Notice that none of the 3 ranges achieved steady state during at the high temperature cycle. Range across the wafer was still at about 1 o. C when cooling started. Start of cooling Sept. 2003 Litho. Works PEB SLS Inc. Confidential 19