LERe. C Cathode Puck Insertion System with DC gun 12/6/2016 CJ Liaw Mobile Lift Table Preparation table
Insertion Mechanism and supports Update design Port Aligner ~35” Port Aligner Mechanical Manipulator X-Y-Z Manual Adjustment Z-Axis Translator UHV Magnetic Manipulator Dbl Linear/Rot, 30” Travel Linear/Rot Travel: 32”
Support Stand: Ready for the installation at 1002.
Puck Insertion Section : • To be assembled in 912 Clean Room. • To pre-survey puck position at 912.
Cross section of Puck Insertion Section
Manipulator in the Insertion Section
Puck alignment support
Insertion Section Viewing from Transfer Section ‘L’ shape Puck support
Puck Transfer Section: • To be assembled in 912 Clean Room. • To Pre Survey Puck position after the assembly. Puck Transfer Chamber Load lock Port Aligner
Integrate Puck Transfer Section, Puck Insertion Section, Vacuum Equipment, and Support Stand at 1002. (Survey load lock mounting flange location w. r. t Guide rail. )
Single Carrier Suitcase Assembly: (2 units) • To be assembled in 912 Clean Room (2 X). • To pre-survey gate valve mounting flange position w. r. t. edge of the Top pallet plate. Make adjustments as required.