Lecture 19 OUTLINE The MOS Capacitor contd Final

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Lecture 19 OUTLINE The MOS Capacitor (cont’d) • Final comments The MOSFET: • Structure

Lecture 19 OUTLINE The MOS Capacitor (cont’d) • Final comments The MOSFET: • Structure and operation • CMOS devices and circuits Reading: Pierret 17. 1; Hu 6. 1 -6. 2

Clarification: Effect of Interface Traps (c) (b) (a) “Donor-like” traps are charge-neutral when filled,

Clarification: Effect of Interface Traps (c) (b) (a) “Donor-like” traps are charge-neutral when filled, positively charged when empty Positive oxide charge causes C-V curve to shift toward left (more shift as VG decreases) Traps cause “sloppy” C-V and also greatly degrade mobility in channel EE 130/230 M Spring 2013 Lecture 19, Slide 2 (a) (b) (c)

Bias-Temperature Stress Measurement Used to determine mobile charge density in MOS dielectric (units: C/cm

Bias-Temperature Stress Measurement Used to determine mobile charge density in MOS dielectric (units: C/cm 2) Na+ located at lower Si. O 2 interface reduces VFB DVFB Na+ located at upper Si. O 2 interface no effect on VFB Positive oxide charge shifts the flatband voltage in the negative direction: EE 130/230 M Spring 2013 Lecture 19, Slide 3

Invention of the Field-Effect Transistor In 1935, a British patent was issued to Oskar

Invention of the Field-Effect Transistor In 1935, a British patent was issued to Oskar Heil. A working MOSFET was not demonstrated until 1955. EE 130/230 M Spring 2013 Lecture 19, Slide 4

Review: NMOS Band Diagrams (Lecture 16, Slide 5) increase VG VG = VFB EE

Review: NMOS Band Diagrams (Lecture 16, Slide 5) increase VG VG = VFB EE 130/230 M Spring 2013 VG < VFB VT > VG > VFB Lecture 19, Slide 5 increase VG

Modern Field Effect Transistor (FET) • An electric field is applied normal to the

Modern Field Effect Transistor (FET) • An electric field is applied normal to the surface of the semiconductor (by applying a voltage to an overlying electrode), to modulate the conductance of the semiconductor. ® Drift current flowing between 2 doped regions (“source” & “drain”) is modulated by varying the voltage on the “gate” electrode. EE 130/230 M Spring 2013 Lecture 19, Slide 6

The MOSFET Metal-Oxide-Semiconductor Field-Effect Transistor: Desired characteristics: • High ON current • Low OFF

The MOSFET Metal-Oxide-Semiconductor Field-Effect Transistor: Desired characteristics: • High ON current • Low OFF current GATE LENGTH, Lg OXIDE THICKNESS, Tox Intel’s 32 nm CMOSFETs Gate Source Drain Substrate • “N-channel” & “P-channel” MOSFETs operate in a complementary manner “CMOS” = Complementary MOS EE 130/230 M Spring 2013 Lecture 19, Slide 7 CURRENT • Current flowing between the SOURCE and DRAIN is controlled by the voltage on the GATE electrode VT |GATE VOLTAGE| 7

N-channel vs. P-channel NMOS PMOS N+ poly-Si P+ poly-Si N+ N+ P+ p-type Si

N-channel vs. P-channel NMOS PMOS N+ poly-Si P+ poly-Si N+ N+ P+ p-type Si P+ n-type Si • For current to flow, VGS > VT • For current to flow, VGS < VT • Enhancement mode: VT > 0 • Enhancement mode: VT < 0 • Depletion mode: VT > 0 Transistor is ON when VG=0 V EE 130/230 M Spring 2013 Lecture 19, Slide 8 Transistor is ON when VG=0 V

Enhancement Mode vs. Depletion Mode Enhancement Mode Depletion Mode Conduction between source and drain

Enhancement Mode vs. Depletion Mode Enhancement Mode Depletion Mode Conduction between source and drain regions is enhanced by applying a gate voltage A gate voltage must be applied to deplete the channel region in order to turn off the transistor EE 130/230 M Spring 2013 Lecture 19, Slide 9

CMOS Devices and Circuits CIRCUIT SYMBOLS N-channel MOSFET P-channel MOSFET CMOS INVERTER CIRCUIT VOUT

CMOS Devices and Circuits CIRCUIT SYMBOLS N-channel MOSFET P-channel MOSFET CMOS INVERTER CIRCUIT VOUT VDD S D VIN D GND INVERTER LOGIC SYMBOL VDD VOUT S 0 VDD VIN • When VG = VDD , the NMOSFET is on and the PMOSFET is off. • When VG = 0, the PMOSFET is on and the NMOSFET is off. EE 130/230 M Spring 2013 Lecture 19, Slide 10

“Pull-Down” and “Pull-Up” Devices • In CMOS logic gates, NMOSFETs are used to connect

“Pull-Down” and “Pull-Up” Devices • In CMOS logic gates, NMOSFETs are used to connect the output to GND, whereas PMOSFETs are used to connect the output to VDD. – An NMOSFET functions as a pull-down device when it is turned on (gate voltage = VDD) – A PMOSFET functions as a pull-up device when it is turned on (gate voltage = GND) VDD EE 130/230 M Spring 2013 Pull-up network PMOSFETs only F(A 1, A 2, …, AN) … A 1 A 2 AN … input signals A 1 A 2 AN Pull-down network Lecture 19, Slide 11 NMOSFETs only

CMOS NAND Gate VDD A A 0 0 1 1 B F A B

CMOS NAND Gate VDD A A 0 0 1 1 B F A B EE 130/230 M Spring 2013 Lecture 19, Slide 12 B 0 1 F 1 1 1 0

CMOS NOR Gate VDD A 0 0 1 1 A B F B EE

CMOS NOR Gate VDD A 0 0 1 1 A B F B EE 130/230 M Spring 2013 A Lecture 19, Slide 13 B 0 1 F 1 0 0 0

CMOS Pass Gate A Y X A EE 130/230 M Spring 2013 Lecture 19,

CMOS Pass Gate A Y X A EE 130/230 M Spring 2013 Lecture 19, Slide 14 Y = X if A