ITRS 2003 Factory Integration Chapter Facilities Backup Section
ITRS 2003 Factory Integration Chapter Facilities Backup Section Details and Assumptions for Technology Requirements and Potential Solutions 2021/2/23 ITRS Factory Integration TWG 1
Backup Outline ¬ Contributors ¬ Facility Scope ¬ How Metrics were Selected ¬ Facilities Technology Requirements Table ¬ Translating Facilities Technology Requirements to Reality ¬ Supporting Material for Facilities Technology Requirements 2021/2/23 ITRS Factory Integration TWG 2
Contributors to this Section ¬ Bill Acorn (ACS) ¬ Carl Garrison (Hoffman Const) ¬ Mike Alianza (Intel) ¬ Ken Goldstein (CCI) ¬ Hal Amick (Colin Gordon & Assoc) ¬ Abbie Gregg (AGI) ¬ Jim Ammenhaeuser (ISMT) ¬ Dave Jones (Air Products) ¬ Todd Bird (CSCI) ¬ John Lake (DPR) ¬ Arnold Canales (Tri. Mega) ¬ Charlie Lynn (Fluor Corp) ¬ Al Chasey (ASU) ¬ Joe Mattrey (M-W Zander) ¬ Theron Colvin (IM&AGE) ¬ Mike Ohalloran (IDC) ¬ Anne Elder (Intel) ¬ Jim Wermes (HDR) 2021/2/23 ITRS Factory Integration TWG 3
Facilities Scope ¬ Facilities Definition F All buildings and infrastructure directly associated with manufacturing F “The biggest tool in the factory” ¬ Scope F F F 2021/2/23 Building (Fab, E-Test, Probe, Labs) Clean room Plumbing, HVAC, Utilities and piping Facilities support space – Subfab, Utility, CUB Direct manufacturing people space EHS space – scrubbers, showers, emergency response areas Life Safety Systems – LSS Factory Management System or BAS Waste treatment UPS and Power Generation (outside US) All infrastructure up to the back of the production equipment (pipes, power lines, etc. ) ITRS Factory Integration TWG 4
Pictorial of the Facility Filters, Airflow and HVAC Production Equipment (not included) Material Handling Equipment (not included) Labs EHS Support Mfg People Space Telecom Network Cleanroom Pipes, Gases, Plumbing Sub-Fab UPS & Electrical Service Mains Specialty support Utility 2021/2/23 Central Utility Building (CUB) Support space for boilers, chillers, Ultrapure water, gases, exterior tanks, waste treatment, emissions, etc. Factory Management Systems Support Equipment Power Generation ITRS Factory Integration TWG 5
How Metrics were selected ¬ Almost every metric is a best in class or close to best in class F Sources are: Rob Leachman’s published 200 mm benchmarking data, individual IC maker feedback, Trecenti/UMC 300 mm joint venture published data, and I 300 I Factory Guidelines for 300 mm tool productivity ¬ It is likely a factory will not achieve all the metrics outlined in the roadmap concurrently F Individual business models will dictate which metric is more important than others F It is likely certain metrics may be sacrificed (periodically) for attaining other metrics (Example: OEE/Utilization versus Cycle time) ¬ The Factory Integration metrics are not really tied to the technology nodes as in other chapters such as Lithography F However, nodes offer convenient interception points to bring in new capability, tools, software and other operational potential solutions ¬ Inclusion of each metric is dependent on consensus agreement We think the metrics provide a good summary of stretch goals for most companies in today’s challenging environment. 2021/2/23 ITRS Factory Integration TWG 6
Construction, Equipment, and Manufacturing Timeline Metrics • Facilities: Ground Break to Area ready for 1 st tool • Facilities: Ground Break to all facilities systems go • Equipment: From PO to move-in • Equipment: Area ready to 1 st tool move-in • Equipment: 1 st tool move-in to tool qual complete • Equipment: Qual complete to full throughput capable • Operations: 1 st tool move-in to 1 st full loop out Ground Break to Area ready for 1 st tool Tool install and facility systems operational PE Purchase Order to 1 st tool move-in to tool qual complete Qualify complete to full throughput capable Pilot Line operating Factory Ramp 2021/2/23 ITRS Factory Integration TWG 7
Translating Facilities metrics to Reality (1) Metrics Key Issue or Challenge Manufacturing (Cleanroom) area as a % of Total site building area ¬ Equipment and support elements are getting larger which is increasing the size of clean room and sub-fab space ¬ New and different support equipment is moving into the nonclean room area Manufacturing (Cleanroom) area/Wafer starts per month (m 2/WSPM) ¬ Cleanroom size is increasing faster ¬ Reduce move-in size of equipment to than WSPM due to increased minimize isle widths equipment size and more/different ¬ More layout density / Vertical layout process steps optimization. ¬ Scalability implications to meet large 300 mm factory needs Facility Life (in 3 year nodes) ¬ Reuse of Facilities across multiple technology nodes ¬ Ability to convert 200 mm facilities to 300 mm wafer size ¬ Complexity of integrating NGL into the factory ¬ Standard facility concepts and system designs ¬ Improved factory layout Tool maintenance level and Facility level classification of air cleanliness in the manufacturing (cleanroom) area ¬ Thermal energy management and tool backside maintenance, (not wafer level cleanliness) are now preventing cleanliness class and airflow reduction ¬ Reuse of Buildings across multiple technology nodes ¬ Coordinate with Production Equipment suppliers to reduce facility cleanliness ¬ Process cooling water vs Air cooling ¬ Tool Vendor design-in for maintenance 2021/2/23 Potential Solutions ¬ Robust Design and Factory Modeling tools ¬ Reduce move-in size of equipment to minimize isle widths ¬ More efficient and smaller support equipment (match tool footprint in manufacturing area) ITRS Factory Integration TWG 8
Translating Facilities metrics to Reality (2) Metrics Key Issue or Challenge Production Equipment Installation and qualification cost as a % of capital cost ¬ Lack of consistency between equipment, constantly changing equipment design, incorrect documentation, ¬ Increasing gas and chemical connections, and ESH compliance ¬ Reduce time to ramp factories ¬ Rapid and frequent factory plan changes ¬ Minimize downtime to ongoing operations while converting factories to new technologies ¬ Earlier involvement with new technology tool designers ¬ Base construction "design for tool install" emphasis. ¬ Standard / consistent equipment connections ¬ Correct documentation and improved change control Facility operating cost including utilities as a % of total fab operating cost ¬ Higher depreciation from construction costs ¬ Higher cost and consumption of utilities (power, water, gases and chemicals) ¬ Higher labor costs ¬ Reduced makeup air and exhaust requirements, wider variation in facility humidity and temperature control specifications. ¬ Heat reclaim ¬ Water reclaim/recycle ¬ Alternative power solutions Utility cost per Total fab ¬ Higher consumption of power, operating cost (percent) water, gases and chemicals ¬ Lack of good data to measure factory effectiveness for optimization and improvement programs 2021/2/23 Potential Solutions ¬ Higher voltage power for equipment to get more efficient distribution ¬ Water reclaim/recycle ITRS Factory Integration TWG 9
Translating Facilities metrics to Reality (3) Metrics Key Issue or Challenge Potential Solutions Utility Utilization (demand/installed) ¬ High initial construction cost and ¬ Matching production equipment operating high operating cost due to under loads with installed system capacities. utilization of Mechanical, Electrical, ¬ Earlier and more accurate identification of and Plumbing utilities. tool installation demand requirements (e. g. ¬ Increasing process complexity due Pressures, flows, loads, consumptions) to increasing number of utility ¬ Standardized measuring and reporting of requirements power utilization at equipment [Applies to ¬ New Material Introduction water and gas systems also] Vibration criteria for Facility Critical and non Critical areas ¬ Complexity of integrating NGL equipment into the factory ¬ Understand the upfront costs to incorporate EFS ¬ Standardized facility concepts to reduce custom factory designs ¬ Robust Design and factory modeling tools Fab to sub fab ratio ¬ Scalability implications to meet large 300 mm factory needs (50 K wspm) ¬ Improve factory layout density/vertical layout optimization Reliability ¬ Overall reliability is not an issue ¬ Continuous improvement for issues like power quality ¬ Standalone and Integrated Reliability required to keep factories operating ¬ Increased impacts that single points of failure have on highly complex factories ¬ Benchmarks to understand best known methods for the industry ¬ Develop Risk Assessment tools for understanding economic impact of facility designs 2021/2/23 ITRS Factory Integration TWG 10
Translating Facilities metrics to Reality (4) Metrics Key Issue or Challenge Factory Construction Time from Ground break to first tool movein (months) ¬ Reduced time to ramp factories ¬ Lack of sufficient resources ¬ Limits on total number of people able to work in a limited space… ¬ Variation of global code regulations ¬ Increasing ESH/Code requirements ¬ Process complexity driving facilities complexity and less than optimal scope clarity. ¬ ¬ ¬ Gas, Water, and Chemical Purity ¬ Increasing complexity and construction costs from more and different types of gases and chemicals ¬ Comprehend increased purity requirements ¬ Innovative, yet cost effective, point-of-use and/or factory-wide abatement and reclaim/recycle technologies Power, Water, and Chemical Consumption ¬ More stringent EHS regulations ¬ Understanding Upfront costs to incorporate EFS ¬ Chemical and Material restrictions ¬ Earlier involvement with new technology tool designers to incorporate innovative, yet cost effective, point-of-use and/or factory wide abatement and reclaim/recycle technologies ¬ Risk assessment tools to understand economic impact of design for ESH regulations ¬ Power and water reduction protocols 2021/2/23 Potential Solutions Standardized design concepts Minimize change allowed Design tools including e-tools More off-site fabrication Improved collaboration between the IC maker and factory design/builders ITRS Factory Integration TWG 11
Prod Equipment – Backup slides based on Facilities WG inputs Design tools to operate within mainstream facilities services capabilities Heat load removal by increased use of Process Cooling Water Drive 3 -5 most important tool installation standards including pass/fail criteria test methods Predictable & consistent tool connections for Utilities, Drains, Exhaust, Interconnects Production equipment must Not be affected by use of mainstream wireless technologies (cell phones, pagers, PDA, etc) Side view (Prod Equip) Use higher efficiency (higher Voltage not current) power distribution. (> 480 V, 3 phase, today most are 208 V, single phase, very high current) Raised floor Physical Separation of waste streams See Next Page for Additional Details 2021/2/23 Shadow footprint in sub-fab ITRS Factory Integration TWG Sub-fab space: support equipment must fit into shadow footprint as determined by prime manufacturing area (Fab/Subfab ratio <1) 12
Feedback to Prod Equip Team from Facilities 2021/2/23 ITRS Factory Integration TWG 13
Facilities Standards Work access standards to eliminate Ergo issues Ceiling level Cleanroom height standards Cleanroom Noise Criteria standards Cleanroom Temperature & RH ranges Environment/ stds Rear of production Wall interface standards Utility, fluids, equipment exhaust, drains Rear hook-up U/I standards Standards for install pedestals, jigs/fixture for alignment Fab levels Vibration stds Raised floor height standards Max Global Maximum weight Construction move-in standard size stds Codes Sub-fab standards Sub-fab level Standards for facilities systems safety counter-measures Facility electrostatic levels stds 2021/2/23 Legend: -> Standards Exist -> Standards Are Under Development -> Standards Are Needed Materials supply container standards ITRS Factory Integration TWG 14
Vibration Criteria Curves Ref: IEST RP-CC 012. 1, Considerations in Cleanroom Design, Institute of Environmental Sciences and Technology, Mt Prospect, IL, pg 38 2021/2/23 ITRS Factory Integration TWG 15
Ref: IEST RP-CC 012. 1, Considerations in Cleanroom Design, Institute of Environmental Sciences and Technology, Mt Prospect, IL, pg 39 2021/2/23 ITRS Factory Integration TWG 16
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