Introduction to the Over Viz Simulation Suite February

Introduction to the Over. Viz Simulation Suite February, 2018 1301 South Capital of Texas Hwy, Suite B-330 Austin, TX 78746, USA Web: www. esgeetech. com Email: info@esgeetech. com

2 Company Overview Industry leader in non-equilibrium and thermal plasma multiphysics simulation Location Headquartered in Austin, Texas, USA History Incorporated in 2003 Market International customer base across US, Europe, and Asia Team Diverse team with domain expertise in plasmas, reactive flows, gas and surface chemistries, thermal fluids, electromagnetics and hybrid plasma systems Products Develops, supports, consults, and distributes the Over. Viz Simulation Suite and Over. Viz modules. Offers academic and commercial licenses.

3 Our Mission Develop and maintain customer relationships • • • Ongoing commitment to helping customers maximize value from Over. Viz simulation suite Provide customer guidance for problem setup, definition, and execution New feature development plans are based on current customer needs. Our tools evolve with your needs Provide state-of-the-art multiphysics simulation software • • Viz. Glow CCP Hybrid Plasma Simulation with Dust Particles Provide comprehensive physics-based simulations for complex engineering problems Ensure robust and flexible simulations • Seamless multiphysics coupling • Advanced solver technologies • Scalable, parallel simulation • Intuitive user interface Expand the current domain of computational plasma-fluidelectromagnetics-particle methods Perform ongoing research and development to support current and future customer challenges

4 Our Services Esgee Technologies is dedicated to helping customers leverage the Over. Viz Suite to solve technical challenges, improve design performance, reduce product timelines, and improve manufacturing quality. Training Introductory and customized training to help customers maximize utility of the Over. Viz Simulation Suite. Training is offered in-person at the Esgee office, in-person at customer sites, or remotely via Web. Ex. Technical Support Dedicated support for all licensed customers, enabling them to work effectively and efficiently in achieving their simulation goals Consulting Utilizing our team of highly specialized domain experts to help customers solve complex multiphysics problems

5 Industrial Applications Semiconductor • • Integrated-circuit manufacturing Thin film etching / deposition Identify and correct process anomalies Capacitively coupled plasmas (CCPs) Inductively coupled plasmas (ICPs) Direct current plasmas (DCPs) Microwave plasmas (MPs) Flat Panel Displays • • • Plasma display panel development Thin film manufacturing Film uniformity and quality Solar Cell Fabrication • • • Solar cell fabrication equipment design Multi-metal co-evaporation process Magnetron sputter deposition Automotive • • • Spark plugs Plasma-combustion ignition HID lamps

6 Industrial Applications Electrical / Industrial • • Circuit breakers Arc welding/cutting Plasma torches for spray coatings AC/DC arc furnaces Arc lamps Electrical switch-gears Ablation controlled arcs Oil and Gas • • Oil/gas flares Pipe flow systems Combustion mechanisms in complex fuels Plasma cutting tools and processes Aerospace and Defense • • • Space vehicle charging Ion thrusters Magneto-plasma-dynamic thrusters Arcjet propulsion Gas lasers Aerodynamic flow control

Over. Viz Parallelized, scalable framework for creating 1 D/2 D/3 D, coupled simulations using a comprehensive suite of multiphysics modules Viz. Glow Non-equilibrium cold plasma systems Viz. Spark Thermal (arc) plasma systems Viz. EM Static and wave electromagnetic fields in both time and frequency domains Viz. Flow Robust flow modeling from incompressible to high-Mach compressible Viz. Grain Gas-DSMC, PIC, hybrid-plasma / macro-particle kinetics Viz. Mesh Hybrid unstructured 2 D mesh generation tool Chem. Zone Viz. Data Generalized 0 D fast reactor model for complex chemical reactive systems Comprehensive database of finite-rate chemistries and equilibrium thermodynamics 7

CCP etch reactor with coupled flow, electromagnetics, and particles Dome inductively coupled plasma reactor PIC model of ion beam neutralization Spark plug arc channel formation and electrode erosion Capacitively Coupled Plasma Reactor Circuit breaker with arc physics and dynamic moving contact Satellite flying through charged dust particles Inductively coupled plasma reactor with bias

10 Viz. Glow Industrial solutions for cold plasma simulations

11 Viz. Spark Industrial solutions for thermal plasma simulations

12 Viz. Grain Industrial solutions for kinetic particle simulations

13 Chem. Zone Industrial solutions for reactive system simulations

Viz. Data – Plasma Chemical Mechanisms 14 Viz. Data is an expansive library of properties and chemistries of solids, liquids, and gases that offers convenience and flexibility for defining a wide range of problems. Data Categories Thermodynamic Properties Thermal-fluid Properties Transport Properties Finite-rate Reactions Surface Chemistries Sample Chemistries Pure noble gas plasmas • Helium • Argon • Xenon Pure molecular gas plasmas • Helium • Nitrogen • Oxygen Metal vapors • Iron, tungsten, copper Plasma and combustion chemistries • Methane-air-exhaust • GRI mechanism 3. 0 Molecular gas mixture plasmas • Argon-hydrogen • Argon-oxygen-hydrogen • Argon-carbon dioxide • Air (nitrogen-oxygen) • Air (nitrogen-oxygen-argon) Semiconductor process gas plasmas • • CF 4 C 2 F 6 C 4 F 8 CHF 3 CF 4 -O 2 -He C 2 H 2 -Ar HBr Polymers • Polyamide 6, 6 • • Si. H 4 -N 2 NH 3 -N 2 -H 2 -Ar NF 3 -O 2 SF 6 -O 2 BF 3 -Ar

18 Summary Over. Viz provides robust, plasma-fluid-electromagnetic-particle multiphysics capabilities Esgee Technologies is strongly focused on developing and maintaining customer relationships Advancements in hybrid, feature scale, and IEADF modeling target challenges in semiconductor applications Continue developing new features to support industry challenges

19 End of presentation www. esgeetech. com