Introduction to CLEANROOM Introduction to cleanroom Micro Fab
Introduction to CLEANROOM Introduction to cleanroom Micro. Fab Group 1
Lecture objectives • Able to define cleanroom and the principles of clean environment • Able to explain contamination to cleanroom and its control procedures • Able to describe gowning and de-gowning procedures • Able to discuss on cleanroom etiquettes • Able to interpret health and safety necessities Introduction to cleanroom Micro. Fab Group 2
Lecture contents Introduction • What is Cleanroom • Principles of the Clean Environment Contamination • Types of contamination, sources and control • Dress code and personal hygiene • Gowning and De-gowning Etiquette • Materials • Behaviour • Wafer handling Health and safety • First aid Introduction to cleanroom Micro. Fab Group 3
What is a Cleanroom? A clean environment designed to reduce the contamination of processes and materials. This is accomplished by removing or reducing contamination sources. Introduction to cleanroom Micro. Fab Group 4
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Principles of the Clean Environment • Air is highly (HEPA) filtered (99. 99% @ 0. 3 m) • Layout should minimise particle sources in filtered air stream • Air flow should remove most particles generated by process Introduction to cleanroom Micro. Fab Group 9
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Types of Contamination Particulate Chemical Biological • Dust • Skin • Hair • Makeup • Oil • Grease • Metal ions Perfume • Bacteria • Fungi • Pollen • Rodents Introduction to cleanroom Micro. Fab Group Radiation • Ultraviolet light • Electromagnetic • X-ray 11
Contamination Sources Introduction to cleanroom Micro. Fab Group 12
Contamination Control • Personnel Control – Dress code – Personal Hygiene – Gowning • Environmental Control – Entrance and exit – Materials and supplies – Etiquettes – Cleaning and maintenance – Atmospheric Introduction to cleanroom Micro. Fab Group 13
Dress code • No sleeveless shirts • No shorts or skirts • No slippers or sandals • No jewelry that can puncture garments or gloves • Avoid clothing that sheds Introduction to cleanroom Micro. Fab Group 14
Personal Hygiene • Shower each day before entry • Control Dermatitis & Dandruff • Do not smoke before entry • No chewing gum or tobacco • No Cosmetics should be worn • Facial hair will need to be covered Introduction to cleanroom Micro. Fab Group 15
Gowning procedure • Remove all street garment, watches, jewellery • Remove makeup and wash hand • Enter the change area walking across Tacky Mat • Tacky Mats are set in place to remove any dirt particles from the bottom of your shoes before entering the gowning area and cleanroom. • Tacky Mats should be replaced when dirty Introduction to cleanroom Micro. Fab Group 16
Gowning procedure GOWN UP Step 1 - In order: • Hair net - Contain all hair. • Shoe Covers • Wash hands thoroughly using bactericidal soap and dry thoroughly. • Don first pair of sterile gloves following aseptic technique by touching only the inside of the gloves. Sanitise. • Sanitise gloves after donning each article, if required. Introduction to cleanroom Micro. Fab Group 17
Gowning procedure GOWN UP Step 2 - In order: • Put sterile boots (high-top shoe covers) on using aseptic technique. • The first boot donned can now be placed in the “clean” side of gowning area. Don second boot and place the other foot in the “clean” side of gowning area. Introduction to cleanroom Micro. Fab Group 18
Gowning procedure GOWN UP Step 3 - In order: • Sterile Hood - Ensure snug fit and proper neck seal. • Sterile Mask - Adjust for a snug facial fit. May be worn over or under hood. • Sterile Coveralls - Carefully remove coverall from package by holding the inside neck area. Unfold garment while preventing it from touching the floor, your clothes or bench. Don using aseptic technique. Tuck coverall legs into boots. • Goggles - Adjust for a snug facial fit. Introduction to cleanroom Micro. Fab Group 19
Gowning procedure GOWN UP Step 4 - In order: • Perform a final inspection in gowning room mirror prior to entry into the sterile cleanroom. • Complete gowning steps by aseptically donning second pair of sterile gloves over the first pair, making sure the cuffs are securely over the sleeves. Introduction to cleanroom Micro. Fab Group 20
Gowning procedure DEGOWNING Steps: • Enter gowning area from cleanroom and head directly to the “exit gown room” (preferred method). If no “exit gown room” is available, go directly to the “nonclean” side, usually divided by a bench and/or line. Remove items in reverse order of gowning procedure and discard. Introduction to cleanroom Micro. Fab Group 21
Gowning Basics • Garments should not be removed from cleanroom unless in approved containers • Don’t walk out of the cleanroom with your garments on • Change garments when soiled or showing any visible signs of wear • Don’t reach inside your garment while in the cleanroom Introduction to cleanroom Micro. Fab Group 22
Etiquettes – Materials Do(s) • Papers kept in a plastic sleeve • Clean everything you carry into the cleanroom • Use ball-point pen on cleanroom paper Introduction to cleanroom Micro. Fab Group Don’t(s) • Carry non-cleanroom items • Carry cleanroom items out of the cleanroom • Use pencils or erasers • Cut the cleanroom wipers 23
Etiquettes – Behaviour Do(s) • Wear mask and gloves all the time • Use cleanroom standard stationeries • Walk in steady and slow motion unless in emergency Introduction to cleanroom Micro. Fab Group Don’t(s) • Scratch bare skin or comb hair • Run, jump or hop • Smoke, chew gum or eat • Sneeze, do not enter cleanroom if you have a flu/cold 24
Etiquettes – Wafer handling Tools • Vacuum Handler • Flat Finder/Roller • Wafer Transfer • Tweezers • Cassette • Box Introduction to cleanroom Micro. Fab Group 25
Etiquettes – Wafer handling • Do not touch wafer, cassette and box with bare hand/finger. Use glove. • Carry wafer with cassette and box. • Do not shake box when inspecting the contain. • Clean cassette and box in accordance to the maintenance schedule. • Always use cassette and box in colors that have been designed for identical processes. • Always open box under air filters. • When not in use, all boxes must remain close at all times. • All wafer handlers shall be cleaned in accordance to their maintenance schedule Introduction to cleanroom Micro. Fab Group 26
First aid Chemical Splashes (on person) • Rinse for 15 minutes (minor) • Shower and seek professional help (major) Hydrofluoric Acid • Rinse for 5 mins and massage calcium glutamate Burns • Minor burns should be treated with cold water. More extensive burns should be covered with a clean cloth until professional help arrives. Introduction to cleanroom Micro. Fab Group 27
First aid Poisoning • Determine the cause of poisoning and call for professional help. Dizziness • Remove them to fresh air and have them sit down. If fainting occurs, get medical attention. Introduction to cleanroom Micro. Fab Group 28
Conclusion • Cleanroom is a clean environment designed to reduce the contamination • Four types of contamination are particles, chemical, biological and radiation • Contamination can be minimised mainly by personnel control • Cleanroom etiquette rule of thumb - avoid generating particles • Safety rule - prevention is better than cure and always seek professional help in emergency cases Introduction to cleanroom Micro. Fab Group 29
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Q&A Credits: University of Southampton Phillips Laboratory VWR manual Vanderbilt University Introduction to cleanroom Micro. Fab Group 32
Quiz • Cleanroom is a man-made environment that has much lower particle contents than the normal environment. i. Define cleanroom according to the International Organization for Standardization (ISO). ii. List FOUR (4) prohibited materials in the cleanroom. iii. State THREE (3) purposes of cleanroom protocol. Introduction to cleanroom Micro. Fab Group 33
(i)List and briefly explain on FOUR (4) regular principles that all personnel must obey to ensure constant cleanliness in a cleanroom. (ii)State EIGHT (8) cleanroom work ethics that are purposely use to avoid particles airborne in the cleanroom. Introduction to cleanroom Micro. Fab Group 34
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