Inert Atmosphere Systems in OLED Research and Fabrication

Inert Atmosphere Systems in OLED Research and Fabrication Copyright, 1996 © Dale Carnegie & Associates, Inc.

Inert Atmosphere System Definition: An enclosure that provides a non reactive work area for processing materials sensitive to oxygen and/ or water. The system may be a single work-station or multiple work-station glove box or a large enclosure for automation of air sensitive processes. Inert Atmosphere: < 1 PPM oxygen and water

Typical Research Systems Single work station glove box

Typical Research Systems Multi station glove box

Inert Atmosphere Systems Components: • Enclosure or Glove Box - The work area • Airlock or Antechamber - entry and exit from glove box • Recirculating gas purifier - maintains inert conditions • Pressure control - Maintains safe pressure • Instruments - Monitor the environment

Applications in OLEDs • Material Research • Vapor Deposition of Metal Oxides and Polymers • Polymer Deposition by Spin Coating • Deposition by Printing Processes • Sealing- Epoxy/UV Curing and LASER Welding • Automated Pilot Production Facilities

Material Research New Compound Synthesis • Synthesis of light emitting polymers and small molecule organics. • TFT polymers • Substrates - both glass AND plastic • Plastic barrier and sealant formulation • Characterization - Voltammetry and probing stations

Glove Box Accessories for Research • Cold Storage Unit - for temperature sensitive materials • Cold Well - for low temperature synthesis • Vacuum Oven - bake out water/volatiles from materials • Mini-antechamber - Rapid transfer of small items • Various Interface Assemblies - connect the glove box environment to the outside world

Applications in OLEDs • Material Research • Vapor Deposition of Metal Oxides and Polymers • Polymer Deposition by Spin Coating • Deposition by Printing Processes • Sealing- Epoxy/UV Curing and LASER Welding • Automated Pilot Production Facilities

Thermal Vapor Deposition of Metal Oxides and Polymers • Integrated Glove Box/Vapor Deposition Systems • “Outboard” Deposition Systemsconnected to glove box

Integrated Glove Box/ Vapor Deposition Systems • Multi source system with glass bell jar

Integrated Glove Box/ Vapor Deposition Systems Multi source system with glass bell jar. Another view.

Integrated Glove Box/ Vapor Deposition Systems Custom system with stainless deposition chamber integrated in laminar flow glove box

“Outboard” Deposition System Integrated with glove box

Applications in OLEDs • Material Research • Vapor Deposition of Metal Oxides and Polymers • Deposition by Spin Coating • Deposition by Printing Processes • Sealing- Epoxy/UV Curing and LASER Welding • Automated Pilot Production Facilities

Polymer Deposition by Spin Coating • Integrated glove box/ spin coater

Applications in OLEDs • Material Research • Vapor Deposition of Metal Oxides and Polymers • Polymer Deposition by Spin Coating • Deposition by Printing Processes • Sealing- Epoxy/UV Curing and LASER Welding • Automated Pilot Production Facilities

Deposition by Printing Processes • Laminar flow glove box- “Clean room in a glove box. ” This view shows the clean room filter at top of box

Laminar flow glove box- “Clean room in a glove box. ” View showing perforated floor and return plenum

Applications in OLEDs • Material Research • Vapor Deposition of Metal Oxides and Polymers • Polymer Deposition by Spin Coating • Deposition by Printing Processes • Sealing- Epoxy/UV Curing and LASER Welding • Automated Pilot Production Facilities

Sealing - Epoxy/UV Curing and LASER Welding • Proper integration of curing stations requires external UV source and quartz window for UV transmission into glove box. • LASER Sealing processes may be adapted from other industries.

Applications in OLEDs • Material Research • Vapor Deposition of Metal Oxides and Polymers • Polymer Deposition by Spin Coating • Deposition by Printing Processes • Sealing- Epoxy/UV Curing and LASER Welding • Automated Pilot Production Facilities

Automated Pilot Production Roll to roll manufacturing within an inert atmosphere enclosure