igc II Modular Surfacemount Design 2004 Swagelok Company
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igc II ™ Modular Surface-mount Design © 2004 Swagelok Company
Features of Modular Gas Systems • Reduces Space Requirements • Facilitates Easy Assembly and Maintenance • Reduces Inventory © 2004 Swagelok Company
igc II ™ • • • © 2004 Swagelok Company Simplifies Design and Assembly Reduces Potential Leak Points Reduces Panel Weight Complies with SEMI-PR 3. 1 Supported by Local Swagelok Distributors Competitive Cost of Ownership
Modular Technology 1. 53 in. (38. 9 mm) © 2004 Swagelok Company 1. 23 in. (31. 2 mm)
Open Architecture Surface-mount C-ring Gaskets Surface-mount Seals 3 port 2 port C-ring Gasket Assembly For Drop-down components © 2004 Swagelok Company 1 port
igc II Construction ™ Igc Panel © 2004 Swagelok Company
igc II Construction ™ Substrate Assemblies © 2004 Swagelok Company
igc II Construction ™ Surface-mount Components © 2004 Swagelok Company
igc II Construction ™ Substrate Flow Components Substrate Channel © 2004 Swagelok Company
igc II Construction ™ Substrate Assemblies © 2004 Swagelok Company
igc II Construction ™ Igc Panel © 2004 Swagelok Company
igc II Construction ™ Manifold Flow Components © 2004 Swagelok Company
igc II Construction ™ Mounting Components Base Plate © 2004 Swagelok Company
Substrate Layer Substrate Assembly © 2004 Swagelok Company
Substrate Layer Surface-mount Components © 2004 Swagelok Company
Substrate Flow Components Substrate End Connector Drop-down MFC Connectors Surface-mount Connector © 2004 Swagelok Company
Substrate Layer Substrate Clip Substrate Channel Substrate Component © 2004 Swagelok Company
Substrate Layer Lock-down plate Substrate Channel © 2004 Swagelok Company
Substrate Layer C-ring Gasket Substrate Channel © 2004 Swagelok Company
Substrate Layer Surface-mount Component Substrate Channel © 2004 Swagelok Company
Substrate Layer © 2004 Swagelok Company
Substrate Layer Load Bearing Insert © 2004 Swagelok Company
Manifold Layer Manifold Clip Manifold Component Manifold Channel © 2004 Swagelok Company
Manifold Layer Manifold Assembly © 2004 Swagelok Company
Manifold Layer Butt Weld End Connection © 2004 Swagelok Company
Manifold Layer Manifold Ports © 2004 Swagelok Company
Manifold Layer Manifold Plug © 2004 Swagelok Company
Manifold Layer Cap © 2004 Swagelok Company
Manifold Layer Cap Screws Substrate Channel Manifold Clip Manifold Component © 2004 Swagelok Company Manifold Channel
Manifold Layer Locating Rib © 2004 Swagelok Company
Manifold Layer Parallel Manifold © 2004 Swagelok Company
Manifold Layer Parallel Manifold Jumper Component © 2004 Swagelok Company
Support Layer Foot Block Mid-line Support Block Foot Block © 2004 Swagelok Company
Accessories Cartridge Style Heater Clip © 2004 Swagelok Company
Accessories Vertical Port Mass Flow Controller Conversion Plates Cap © 2004 Swagelok Company
igc II ™ © 2004 Swagelok Company