IC ICIntegrated Circuit ICPCB IC SSI MSI LSI

• 何謂積體電路(IC) • IC=Integrated Circuit • 為很多電路元件積集在一起, 產生某些電性的功能. • IC就像是印刷電路板(PCB)的濃縮版. • 依照IC積集度多寡, 可分為: • • • SSI: MSI: LSI: VLSI: ULSI: Small Scale Integration (<100) Medium Scale Integration (100~1000) Large Scale Integration (>1000) Very Large Scale Integration (>100, 000) Ultra Large Scale Integration (>10000, 000)

IC積集度的演進 SI UL SI VL I LS MS SS I I

半導體依摻雜可分為N型/P型半導體 N型半導體 P型半導體 Si Si P Si Si B Si Si Si Extra electron Si Hole Si Si Si

IC 製造過程 初始晶片 (primary wafer) PR PR Initial ox Ini ox Si substrate Si sub Thin film module Diff module PHOTO module ETCH module Diff, PHOTO, ETCH, T/F Chip Cutting Wafer Sorting Bonding Packaging IC cross section WAT Final Test