High Tech Fab HVAC System Control ChihChang Wei

高科技廠房空調系統控制 High Tech Fab HVAC System Control 魏志昌 Chih-Chang Wei 2020/10/29 1

FS 209 D Particle/ft³ 等級 ≧ 0. 1 um ≧ 0. 2 um ≧ 0. 3 um ≧ 0. 5 um ≧ 5 um 1 35 7. 5 3 1 NA 10 350 75 30 10 NA 100 NA 750 300 100 NA 1000 NA NA NA 1000 7 10, 000 NA NA NA 10, 000 70 100, 000 NA NA NA 100, 000 700 2020/10/29 15

FS 209 D 需求條件 size Class μｍ 1 粒子數目 Particles/ft 3 壓差 mm. Aq 溫度℃ 範圍 ~ 100 1 K 10 0. 5 μｍ 22. 2 ± 2. 8 25 100 層流式 0. 35~0. 55 m/s 溼度 1, 080~ 1, 620 >1. 25 1 K 10 K 100 K 2020/10/29 誤差值 照度 lux 19. 4 1 10 推薦值 風速 45 ~ 30 ± 10 亂流式 ≧ 20 次/hr 16

Clean room 相關法規比較 Fed. std. 209 E 英制 SI ISO/ TC 209 ISO 8 100, 000 微塵粒子上限 0. 1μｍ /m 3 M 7 M 6. 5 0. 5μｍ /ft 3 0. 5μｍ /m 3 10, 000 100, 000 3, 530, 000 M 6 ISO 7 10, 000 1, 000 M 5. 5 10, 000 M 5 ISO 6 ISO 5 1, 000 M 4. 5 100 M 4 M 3. 5 100, 000 1, 000 35, 300 10, 000 3, 530 M 3 ISO 4 10 ISO 3 1 M 2. 5 M 2 M 1. 5 1, 000 1000 10 1 353 100 35 0 0 10 3 0 M 1 ISO 2 ISO 1 2020/10/29 353, 000 10 17

除濕模式〈夏季〉 Pre-heat Coil (1) Air Washer (3) Reheating(5) OA Pre-cooling Coil(2) Dehumidify Coil(4) 2 1 2. Pre-cooling Coil 4. Dehumidify Coil 5. Reheating Coil 6. DCC〈Dry Cool Coil〉 4 ROOM CONDITION 5 2020/10/29 6 23

加濕模式〈冬季〉 Pre-heat Coil(1) Air Washer(3) Pre-cooling Coil (2) Reheating Coil(5) Dehumidify Coil(4) 1. Preheating Coil 3. Air Washer 4. Dehumidify Coil 5. Reheating Coil 6. DCC〈Dry Cool Coil〉 4 5 6 ROOM CONDITION OA 1 2020/10/29 3 24

TCWP SYSTEM 2020/10/29 25

TCWP CONTROL 2020/10/29 26

TT/HT SENEOR 2020/10/29 27

Dry coil 閥體控制 2020/10/29 28

AHU一般控制 2020/10/29 29

AHU 恆溫恆濕控制 2020/10/29 30