High potential measurement electrode Additional electrode Equipotential lines

High potential measurement electrode Additional electrode Equipotential lines Effective area High potential measurement electrode Additional electrode Equipotential lines Outermost electric line of force Additional Low potential Additional electrode measurement electrode Low potential measurement electrode (b) Analyzed result (a) Analyzed result without additional electrode with additional electrode 補助電極の効果 4

High potential side Equipotential lines Effective area Outermost electric line of force Low potential side High potential side Effective area Ineffective electric line of force Equipotential lines Outermost electric line of force Low potential side 　　location of dielectric dx=0 mm, dy=5 mm 　　 dx=0 mm, dy=15 mm 　　location of dielectric dx=0 mm, dy=25 mm 　 dx=0 mm, dy=35 mm C = 4. 72× 10 -14 F (Analyzed) C = 2. 55× 10 -14 F (Analyzed) 二次元有限要素法を用いた数値解析結果 5

研究経過 10 m m • 従来は，誘電体位置の二次元的計測 • 三次元化（誘電体形状を三次元的計測） Dielectric 180 mm Dielectric Low potential measurement electrode 10 mm High potential measurement electrode Low potential measurement electrode High potential measurement electrode 6

Additional electrodes 各測定電極での静電容量 C [× 10 -14 F ] 平均値　 2. 33 理論値 　2. 21 Low potential measurement electrode 低電位側測定電極 9

High potential measurement electrode 　　　 Dielectric Low potential measurement electrode 誘電体の位置設定 10

6. 0 静電容量　C [　× 10 -14 F　]　　　 5. 5 誘電体の移動 High potential measurement electrode 5. 0 4. 5 Low potential measurement electrode 4. 0 y Dielectric 3. 5 3. 0 計測する測定電極の位置 2. 5 2. 0 5 10 15 20 25 誘電体の ｙ 方向の位置　　　dy (mm) 実験結果 30 35 11

(a) First measurement (b) Second measurement 誘電体位置推定法の提案 12

6. 0 静電容量　C [　× 10 -14 F　]　　　 5. 5 誘電体の位置 First measurement Second measurement 5. 0 4. 5 10 mm 4. 0 First measurement 30 mm Second measurement 3. 5 3. 0 2. 5 2. 0 5 10 15 20 25 30 誘電体の ｙ 方向の位置　　　dy (mm) 測定電極を切り替えて実験した結果 35 13

誘電体の位置 誘電体の ｙ 方向の位置　　　dy (mm) 35 30 30 mm 10 mm 25 First measurement Second measurement 20 15 10 5 -0. 15 -3. 0 -2. 0 -1. 0 0. 54 0 1. 0 静電容量の差分　C [× 10 -14 F ] 誘電体位置推定 3. 0 2. 0 14