GranvillePhillips Company Product History 1954 1998 Actual Museum

Granville-Phillips® Company Product History 1954 - 1998 Actual Museum Booth displayed at AVS 2011 - Nashville © 2012 Brooks Automation, Inc. • Proprietary Information

2011 AVS History Committee Booth 2 © 2012 Brooks Automation, Inc. • Proprietary Information

2011 AVS History Committee Booth 3 © 2012 Brooks Automation, Inc. • Proprietary Information

Granville-Phillips Timeline 1954 to 1998 1956 to 1961 Pullman, WA 1962 to 1998 Boulder, CO 1998 to 2005 Longmont, CO 2005 to Present Longmont, CO (Purchased by Helix Technology in 1998) (Helix Technology merged with Brooks Automation in 2005) Granville-Phillips was formed in 1954 by Daniel Granville Bills and Nathaniel Phillips Carlton who were then physics students at Harvard University. In 1956 Dr. Bills moved the Company to Pullman, Washington. Since 1954, Granville-Phillips has pioneered in the vacuum industry and exemplified excellence in vacuum technology. The steadfast commitment to technological innovation, coupled with exceptional product quality, continues to set the standard for the vacuum industry. From the initial product offering in 1954 — the first all-metal ultra-high vacuum valve — to the award-winning Stabil-Ion ® and Micro-Ion® Gauges, and most recently the Vacuum Quality Measurement TM system, Granville-Phillips has continuously delivered innovative, highly reliable vacuum solutions to laboratories, researchers, universities, and various manufacturers worldwide. With numerous industry firsts, a strong focus on R&D, and a constant drive to improve vacuum technology, Granville-Phillips is positioned as the premier provider of advanced vacuum measurement solutions. The products displayed (plus many other products – see the Product Release Timeline) were all designed and manufactured by Granville-Phillips during the 1954 to 1998 time period. Portions of this document are Company Confidential 4 © 2012 Brooks Automation, Inc. • Proprietary Information

Granville-Phillips Product Release Timeline 5 © 2012 Brooks Automation, Inc. • Proprietary Information

ALL-METAL BAKEABLE VALVE § PRODUCT SERIES 202 - “C” VALVE § FIRST GRANVILLE-PHILLIPS CO. PRODUCT § 1954 - PRODUCT RELEASED § ~1985 - PRODUCT DISCONTINUED § FIRST ALL-METAL VALVE WITH UNDETECTABLE LEAK-TIGHT SEAL: § < 2 x 10 -10 Torr-l/s AFTER BAKEOUT § RELIABLE SEALING DID NOT REQUIRE FACTORY LEAK TESTING § ARTICLE IN RSI, 1955, PAGES 654 -656, SEE DISPLAY § LISTED WITH PHOTO IN DUSHMAN, 2 ND EDITION, “Scientific Foundations of Vacuum Technique”, PAGES 684 -685, SEE DISPLAY 6 © 2012 Brooks Automation, Inc. • Proprietary Information

ALL METAL BAKEABLE VALVE - [original RSI journal article] 7 § [sealing performance] © 2012 Brooks Automation, Inc. • Proprietary Information

ALL-METAL VARIABLE LEAK § PRODUCT SERIES 203 VARIABLE LEAK VALVE § 1961 - PRODUCT RELEASED § 2012 - STILL IN PRODUCTION § CONTINUOUS LEAK CONTROL : 2 x 10 -10 Torr-l/s to 100 Torr-l/s § EASY HAND TORQUE OPERATED § MECHANICAL READOUT FOR APPROXIMATE RETURN TO PREVIOUS LEAK RATE AND/OR SEALED INDICATION § 8 DRIVER REMOVEABLE FOR BAKEOUT © 2012 Brooks Automation, Inc. • Proprietary Information

UHV BAKEABLE L-VALVE § PRODUCT SERIES 204 L-VALVE (1 INCH) § 1961 - RELEASED WITH COPPER SEAL § 1968 - 2 nd RELEASE WITH GOLD SEAL AND REPLACEABLE SEAL § 2009 - PRODUCT DISCONTINUED § KNIFE-EDGE SEAL GEOMETRY § LEAK RATE < 2 x 10 -10 Torr-l/s after bakeout § OPEN CONDUCTANCE 10 l/s § OPEN/CLOSED MOTION WITH METAL BELLOWS § 250 °C BAKEOUT WITH DRIVER ATTACHED § 450 °C BAKEOUT WITH DRIVER REMOVED 9 © 2012 Brooks Automation, Inc. • Proprietary Information

SERVO-DRIVEN LEAK VALVE § SERIES 213/216 AUTOMATIC PRESSURE CONTROLLER § 1961 - PRODUCT RELEASED § 2012 - STILL AVAILABLE FOR EXISTING REPLACEMENTS § LEAK RATE CONTROLLED BY SIGNAL FROM USER’S PRESSURE TRANSDUCER § DRIVER: COMBINATION OF DRIVE SCREW + HYDRAULIC MULTIPLIER § CONTINUOUS LEAK CONTROL: • 2 X 10 -9 Torr-l/s to 400 Torr-l/s § 10 DRIVER REMOVABLE FOR BAKEOUT © 2012 Brooks Automation, Inc. • Proprietary Information

DIFFERENTIAL PRESSURE CAPACITANCE DIAPHRAGM GAUGE SERIES 212 CAPACITANCE MANOMETER 1962 - PRODUCT RELEASED ~1975 - PRODUCT DISCONTINUED • MEASUREMENT SIDE: ALL METAL • REFERENCE SIDE: ALL METAL + ALUMINA • CAPACITANCE BRIDGE & CIRCUITRY REMOVABLE FOR BAKEOUT • DIFFERENTIAL PRESSURE RANGES FOR EACH MODEL: 10 m. Torr, 100 m. Torr, 10 Torr 1 Torr, 100 Torr 10 Torr, 1000 Torr 11 © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE CONTROLLER § PRODUCT SERIES 236 § FIRST IONIZATION GAUGE CONTROLLER BY GRANVILLEPHILLIPS CO. § 1963 - PRODUCT RELEASED § 1975? - PRODUCT DISCONTINUED § DUAL-RANGE, MIRRORED METER § ELECTRON EMISSION CURRENT: o § CONTINUOUS CONTROL ELECTRON BOMBARDMENT DEGAS: CONTINUOUS CONTROL OF POWER BOTH ANODE AND ION COLLECTOR § AUTOMATIC PRESSURE RANGE SWITCHING § GAUGE CATHODE USED AS PIRANI GAUGE SENSOR DURING PUMPDOWN 12 © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE CONTROLLER § Included Features 13 © 2012 Brooks Automation, Inc. • Proprietary Information

LIQUID NITROGEN COLD TRAPS (244 …) § PRODUCT SERIES 244 - 2 INCH CRYOSORB® § PRODUCT SERIES 250 - 4 INCH CRYOSORB® § PRODUCT SERIES 251 - 6 INCH CRYOSORB® § 1963 - PRODUCT RELEASED § ~1986 - PRODUCT DISCONTINUED § CONSTANT TEMPERATURE (OF SURFACES IN LINE OF SIGHT OUT OF TRAP) HOLDING TIME: 16 HOURS § SURFACES IN LINE OF SIGHT OUT OF TRAP ARE THERMALLY CONNECTED TO BOTTOM OF LN 2 RESERVOIR 14 © 2012 Brooks Automation, Inc. • Proprietary Information

TRIODE ELECTROSTATIC GETTER ION PUMP § PRODUCT SERIES 220 ION PUMP: ELECTRO-ION ® § 1967 - PRODUCT RELEASED § ~1973 - PRODUCT DISCONTINUED § RELATED TO ORB-ION PUMP, EXCEPT GETTER PUMPING IS FUNCTIONALLY INDEPENDENT FROM ION PUMPING § PUMPING SPEED AT LOW PRESSURE: § o NITROGEN - 1600 l/s o ARGON - 14 l/s FOUR IONIZER CELLS, EACH CONTAINING: o ONE ANODE AT + 3000 V o TWO TUNGSTEN ELECTRON INJECTORS (CATHODES) § TITANIUM CENTRAL SUBLIMATOR AT 1400 °C WITH 750 W § TITANIUM SUBLIMATION RATE INDEPENDENT OF LIFE OF TITANIUM USE FROM SUBLIMATOR § ELECTRODE STRUCTURE AT + 350 V w. r. t. PUMP HOUSING AT GROUND § WATER COOLED § INCLUDED GRANVILLE-PHILLIPS PIRANI GAUGE: PRESSURE RESOLUTION: § 2 m. Torr FOR PUMP TURN-ON § 4 m. Torr FOR PUMP TURN-OFF § 15 16 INCH LONG PIRANI SENSOR WIRE © 2012 Brooks Automation, Inc. • Proprietary Information

TITANUIM SUBLIMATION PUMP § PRODUCT SERIES 287 - TSP § 1968 - PRODUCT RELEASED § 1969 - RECEIVED R&D 100 AWARD § ~1973 - PRODUCT DISCONTINUED § USES SAME TITANIUM SUBLIMATOR AS 220 ION PUMP, 1400 °C WITH 750 W § PUMPING SPEED AT LOW PRESSURE: o NITROGEN: 1600 l/s IN A CHAMBER WITH 6 INCH PUMP PORT o LIMITED ONLY BY CONDUCTANCE OF PUMP PORT FOR LOWER PRESSURES 16 © 2012 Brooks Automation, Inc. • Proprietary Information

TITANUIM SUBLIMATION PUMP § Fully heated to 1400℃ 17 © 2012 Brooks Automation, Inc. • Proprietary Information

TITANUIM SUBLIMATION PUMP § Internal design from issued patent 18 © 2012 Brooks Automation, Inc. • Proprietary Information

ALL-METAL GATE VALVE §PRODUCT SERIES 265 GATE VALVE § 1968 - PRODUCT RELEASED §~1997 - PRODUCT DISCONTINUED • 6 -INCH DIAMETER THROUGHCONDUCTANCE BY 4 INCH LENGTH • OPEN CONDUCTANCE = 1300 l/s • GOLD-PLATED KNIFE-EDGE SEAL • SEALS TO < 2 x 10 -9 Torr-l/s After Bakeout • NO ROLLING OR SLIDING SURFACES INSIDE VACUUM FOR GATE OPEN ←→ CLOSED • SEALS VIA 400 PSI ON SEAL BELLOWS • AVAILABLE WITH REMOTE ACTUATION 19 © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE CONTROLLER § PRODUCT SERIES 260 IGC § 1970 - PRODUCT RELEASED § 1993 - PRODUCT DISCONTINUED § FIRST LOW-COST IGC BY GRANVILLE-PHILLIPS CO § RESISTIVE ANODE DEGAS § ELECTRON EMISSION RANGES § INCLUDED OPERATION OF GRANVILLE-PHILLIPS PIRANI GAUGE: 260 THERMOGAUGE® 20 © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE CONTROLLER § PRODUCT SERIES 271 UHV IGC § 1973 - PRODUCT RELEASED § ~1995 - PRODUCT DISCONTINUED § MODERIZATION OF SERIES 236 IGC § ELECTRON BOMBARDMENT DEGAS OF ANODE § ELECTRON EMISSION SELECTABLE RANGES § INCLUDES OPERATION OF HIGH PRESSURE GAUGES § IG PRESSURE RANGES: 10 -11 – 10 -2 Torr § HIGH PRESSURE GAUGE RANGES: 10 -2 – ATM 21 © 2012 Brooks Automation, Inc. • Proprietary Information

LIQUID NITROGEN COLD TRAP § PRODUCT SERIES 278 CRYOCLEAN® § 1974 - PRODUCT RELEASED § ~1986 - PRODUCT DISCONTINUED § CONSTANT TEMPERATURE HOLDING TIME: 20 HOURS § SURFACES IN LINE OF SIGHT OUT OF TRAP ARE THERMALLY CONNECTED TO BOTTOM OF LN 2 RESERVOIR § HIGH CONDUCTANCE: EQUIVALENT TO 6 INCH DIA TUBE x 9 INCHES LONG. 22 © 2012 Brooks Automation, Inc. • Proprietary Information

CONVECTION ENHANCED PIRANI GAUGE § PRODUCT SERIES 275 CONVECTRON® § 1977 - PRODUCT RELEASED § 2012 - STILL IN PRODUCTION § FIRST COMMERCIAL CONVECTION-ENHANCED PIRANI GAUGE § WELL OVER 1, 000 SOLD TO DATE § SELF-TEMPERATURECOMPENSATED IN THE GAUGE § PRESSURE READING RANGE: o § ATM TO 10 -4 Torr GOLD-PLATED TUNGSTEN SENSOR WIRE 23 © 2012 Brooks Automation, Inc. • Proprietary Information

CONVECTION ENHANCED PIRANI GAUGE § [cutaway drawing] 24 © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE CONTROLLER § SERIES 307 IGC § 1986 - PRODUCT RELEASED § 2012 - STILL IN PRODUCTION § HEATED POWER REGION SEPARATE FROM CONTROL CIRCUITRY § SELECTABLE EMISSION CONTROL § LOWER PRESSURE RANGE: o § 10 -11 Torr OPERATES TWO HIGH PRESSURE GAUGES SIMULTANEOUSLY: o SERIES 275 CONVECTRON® GAUGE 25 o THERMOCOUPLE GAUGE © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE CONTROLLER § SERIES 303 IGC § 1993 - PRODUCT RELEASED § ~1998 - PRODUCT DISCONTINUED § FIRST MICROPROCESSER-BASED PRODUCT § MANY PARAMETERS CONTROLLABLE BY FRONT PANEL KEYBOARD: o ELECTRON EMISSION • FIXED VALUES • STEPPED VALUES WITH PRESSURE 26 o DEGAS POWER o DEGAS TIME § GAS TYPE © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE § PRODUCT SERIES 360 STABIL-ION® GAUGE § 1993 - PRODUCT RELEASED § 1995 - RECEIVED R&D 100 AWARD § 2012 - STILL IN PRODUCTION § FIRST HCIG WITH ENHANCED ACCURACY AND LONG-TERM STABILITY UNDER 5 %: o INITIAL ACCURACY VERIFIED ON EVERY GAUGE TUBE § PRESSURE RANGE: 5 X 10 -3 TO § 2 X 10 -10 Torr § X-RAY LIMIT: 2 X 10 -10 Torr § AVAILABLE WITH INDIVIDUALIZED CALIBRATION MEMORY § TWO SELECTABLE EMISSION CURRENTS § GAS TYPE SELECTABLE 27 © 2012 Brooks Automation, Inc. • Proprietary Information

HOT CATHODE IONIZATION GAUGE § PRODUCT SERIES 370 STABIL-ION® GAUGE § 1997 - PRODUCT RELEASED § 2012 - STILL IN PRODUCTION § HCIG WITH ENHANCED ACCURACY AND LONG-TERM STABILITY UNDER 5 %: o INITIAL ACCURACY VERIFIED ON EVERY GAUGE TUBE § PRESSURE RANGE: § EXTENDED RANGE: 5 X 10 -3 TO 2 X 10 -10 Torr § UHV MODEL: 5 X 10 -3 TO 2 X 10 -11 Torr § X-RAY LIMITS: 2 X 10 -10 & 2 x 10 -11 Torr § INDIVIDUALIZED CALIBRATION MEMORY WITH EVERY GAUGE § TWO SELECTABLE EMISSION CURRENTS § GAS TYPE SELECTABLE 28 © 2012 Brooks Automation, Inc. • Proprietary Information

MINIATURE HOT CATHODE IONIZATION GAUGE (355) § PRODUCT SERIES 355 MICRO-ION® HCIG 1997 - PRODUCT RELEASED 1998 - RECEIVED R&D 100 AWARD 2012 - STILL IN PRODUCTION FIRST MINIATURE IONIZATION GAUGE BY GRANVILLE-PHILLIPS CO. USES MANY PHYSICAL ELECTRONICS PRINCIPLES OF STABIL-ION® HCIG PRESSURE RANGE: 2 X 10 -10 TO 5 X 10 -2 Torr ACCURACY: +/- < 15 % INITIAL ACCURACY VERIFIED ON EVERY GAUGE TUBE X-RAY LIMIT : 2 X 10 -10 Torr § § § § § 29 Std. Glass BA IG For comparison © 2012 Brooks Automation, Inc. • Proprietary Information 355

MINIATURE HOT CATHODE IONIZATION GAUGE (355) [cutaway drawing] 30 © 2012 Brooks Automation, Inc. • Proprietary Information

MASS SPECTROMETER § PRODUCT SERIES 830 VQMTM VACUUM QUALITY MONITORTM § 2010 - PRODUCT RELEASED § 2012 - STILL IN PRODUCTION § FIRST USE OF AUTORESONANCE TO DO ION SEPARATION IN MASS SPECTROMETRY § FASTER, SMALLER, AND SIMPLER THAN TRADITIONAL RESIDUAL GAS ANALYZERS § MASS RANGE: 1 -135 AMU § PRESSURE RANGE: 1 x 10 -5 Torr to UHV § CALIBRATION ON ANY SINGLE GAS IN THE VACUUM CHAMBER § SOFTWARE VIEWER CONVERTS RAW DATA TO EASY-TO-UNDERSTAND INFORMATION 31 © 2012 Brooks Automation, Inc. • Proprietary Information