FILTER DIFFUSER 1 Membrane 2 Filter Diffuser 3

FILTER & DIFFUSER

목차 1 Membrane 개요 2 Filter & Diffuser 3 제조공정도 4 ASFLOW 기술력 5 ASFLOW 제품군 6 평가 SYSTEM 7 응용분야 2

1 Membrane 개요 www. asflow. com Metal Membrane 주요제작업체 Metal Powder Metal Mesh Metal Powder Metal Fiber Metal Mesh PTFE, PE Metal Powder Metal Fiber Metal Mesh Polymer Metal Powder Teflon ▶국내 반도체용 금속 membrane 자체 제작 업체 전무 (수처리 및 2차 전지용 Polymer 계열의 연구 다수) ▶국내 반도체용 금속 membrane 경우 대부분 membrane을 수입하여 Housing 체결 후 판매(ex. ㈜태린) 5

2 Filter & Diffuser FILTER 구조 www. asflow. com DIFFUSER 구조 Metal Body Metal Housing과 Membrane으로 구성되 어 있으며, IN-Line 형태임 Metal Membrane Metal Body 와 Membrane으로 구성되어 있으며, 다양한 형태의 제품이 있음. 9

3 제조공정도 Selection TEST (Particle, Flow) www. asflow. com Mixing Shaping Sintering Welding Cleaning (Auto Clean) Cleaning (EP&ultra sonic) 10

4 ASFLOW 기술력 www. asflow. com Customizing 고객 중심의 제품 공급 제품설계 Membrane Process 고객 정보 Membrane Process 제품화 Process 측정 및 검사 • Chamber 용량 • Powder selection • Welding • Vent-up Test • Vent Time • Mixing • 1 st Cleaning • Gas Flow Test • Gas Pressure • Shaping • 2 nd Cleaning • Particle Test • Sintering • Packing 12

4 ASFLOW 기술력 www. asflow. com ASFLOW Filter& Diffuser 특성 Material Connections Maximum Operating Temperature Diffuser Element Sintered 316 L Stainless Steel Membrane Housing 316 L Stainless Steel Surface finish interior ≤ 32μin Ra Inlet VCR, LOK, Butt weld, etc. Outlet VCR, LOK, Butt weld, etc. 460℃(inert gas) Grade 2 Grade 3 Grade 4 Grade 5 Grade 8 15

5 ASFLOW 제품군 Specifications & Ordering conditions § Materials Filter & Diffuser element Housing Surface Finish internal Sintered Stainless 316 L membrane filter 316 L stainless steel ≤ 32 µinch Ra § Membrane Type Tube / Disk / Cup § Size Tube Disk Cup Sheet : Φ 10~30, length : 1~120 mm : Φ 10~80, thickness : 0. 5~5 mm : Φ 10~20, length : 1~50 mm : 60 x 60, thickness : 1~5 mm § Flow 0 ~ 20, 000 slpm § Connections VCR, Lok, Weld 16 www. asflow. com

5 ASFLOW 제품군 제품 Catalog 17 www. asflow. com

5 ASFLOW 제품군 20, 000 LPM Diffuser Ø 제품명 437 L DIFFUSER-M 30(P 1. 5) Ø 제품설명 Sputter 장비용 고성능 디퓨져 Specification Material Operation Condition Media Sintered 316 L Stainless Steel Membrane Cover Punched 316 L Stainless Tube Connector 316 L Stainless (M 30 x P 1. 5) O-ring Viton (V 35) Filter Area 339. 12㎠ Removal Rating ≥ 0. 003㎛ Flow Rate 5500 LPM at 5 kgf/㎠ Max. Inlet Pressure 5 kgf/㎠, 0~40℃ Max. Operating Temperature 460℃(Inert gas) 18 www. asflow. com

6 평가 SYSTEM www. asflow. com Particle TEST SYSTEM Flow TEST SYSTEM Video Microscope SYSTEM 19

7 응용분야 www. asflow. com 주요분야 Semiconductor process Display (LCD/PDP/FED etc. ) process Gas chemical mixer Gas supply system Clean room system 응용분야 Beverage Industry Sparger 정유/화학 20

Thank you 21 www. asflow. com

Gas 적용 Guide Membrane Chemical Formula Nickel PTFE/PFA Stainless (316 L) NH 3 Ar As. H 3 B 11 F 3 BCl 3 BF 3 Br 2 CO CCl 4 Cl 2 Cl. F 3 B 2 H 6 CCl 2 F 2 CH 2 Cl 2 Si. H 2 Cl 2 CH 2 F 2 C 2 H 6 F 2 Ge. H 4 C 2 Cl. F 5 C 2 F 6 ● ● ● ● ● ● ● ● ● ● ● ● Hydrocarbon/Halogenated Hydrocarbons CCl. F 3 CF 4 ● ● ● Hydrocarbon/Halogenated Hydrocarbons C 3 F 8 ● ● ● Hydrocarbon/Halogenated Hydrocarbons CHF 3 ● ● ● Hydrocarbon/Halogenated Hydrocarbons C 4 F 8 ● ● ● Inerts Hydrocarbon/Halogenated Hydrocarbons He C 4 F 6 ● ● ● ● ● Name of Gas Category Ammonia Argon Arsine Boron 11 Trifluoride Boron Trichloride Boron Trifluoride Bromine Carbon Dioxide Carbon Monoxide Carbon Tetrachloride Chlorine Trifluoride Diborane Dichlorodifluoromethane Dichlorosilane Difluoromethane Ethane Fluorine Germane Halocarbon 115 Halocarbon 116 Hexafluoroethane Halocarbon 13 Halocarbon 14 Tetrafluoromethane Halocarbon 218 Perfluoropropane Halocarbon 23 Trifluoromethane Halocarbon 318 Octafluorocyclobutane Helium Hexafluoro-2 -butyne Hexafluorobutadiene Hydrogen/Hydrides Inerts Hydrogen/Hydrides Halogen/Hydrides Oxygen/Oxides Hydrocarbon/Halogenated Halogen/Hydrides Hydrogen/Hydrides Hydrocarbon/Halogenated Halogen/Hydrides Hydrocarbon/Halogenated Hydrocarbons Hydrocarbons ● ● ● ● ▲ ● ● ● ● ●

Name of Gas Category Chemical Formula Hydrogen Bromide Hydrogen Chloride Hydrogen Fluoride Hydrogen Selenice Hydrogen Sulfide Krypton Methane Methyl Fluoride Methylsilane Neon Nitric Oxide Nitrogen Dioxide Nitrogen Trifuoride Nitrous Oxide Octafluorocyclopentene Oxygen Ozone Pentaborane Phosphine Phosphorous Trifluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Trichlorofluoromethane Trichlorosilane Trichlorotrifluoroethane Trimethylamine Trimethylsilane Tungsten Hexafluoride Xenon Hydrogen/Hydrides Halogen/Hydrides Hydrogen/Hydrides Inerts Hydrocarbon/Halogenated Hydrogen/Hydrides Inerts Oxygen/Oxides Halogen/Hydrides Oxygen/Oxides Hydrocarbon/Halogenated Oxygen/Oxides Hydrogen/Hydrides Halogen/Hydrides Oxygen/Oxides Halogen/Hydrides Hydrocarbon/Halogenated Hydrogen/Hydrides Halogen/Hydrides Inerts H 2 HBr HCl HF H 2 Se H 2 S Kr CH 4 CH 3 F Si. H 3(CH 3) Ne NO N 2 NO 2 NF 3 N 2 O C 5 F 8 O 2 O 3 B 5 H 9 PH 3 PF 3 Si. H 4 Si. Cl 4 Si. F 4 SO 2 SF 6 CCl 3 F CHCl 3 Si. HCl 3 C 2 Cl 3 F 3 (CH 3)3 N Si. H(CH 3)3 WF 6 Xe ● Compatible Hydrocarbons Hydrocarbons ▲ Compatible with limitation Membrane Nickel ● ● ● ● ● ▲ ● ● ● ● Reference : PTFE/PFA Stainless (316 L) ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● Entegris Gas Filter Compatibility Guide Not compatible