Factors affecting the depth of field for SEM

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Factors affecting the depth of field for SEM Afshin Jooshesh

Factors affecting the depth of field for SEM Afshin Jooshesh

outline Introduction and definition of Depth of field DOF equation Example Enhancement

outline Introduction and definition of Depth of field DOF equation Example Enhancement

Depth of Field Is the distance of the nearest and farthest object from the

Depth of Field Is the distance of the nearest and farthest object from the detector if it appears sharp and with enough details.

Depth of Field In optics DOF is defined as Which depends on the focal

Depth of Field In optics DOF is defined as Which depends on the focal length of the lens, the f-number of the lens opening (the aperture), and the camera-to-subject distance. f is the lens focal length, N is the lens f-number, and c is the circle of confusion. in SEM systems DOF is dependent to two variables 1. the final aperture size (radius R) 2. the working distance (W)

Depth of Field At some distance D/2 above and below the focus plane the

Depth of Field At some distance D/2 above and below the focus plane the diameter of the beam becomes twice the pixel diameter for the mag being used, whereupon the signals from adjacent pixels overlap enough to cause the image to appear blurred. Over the distance D, the image will appear to be in acceptably sharp focus, and so this distance is called 'the depth of field‘.

Some effects DOF will be larger when the emission disc is smaller DOF will

Some effects DOF will be larger when the emission disc is smaller DOF will be larger when the aperture is smaller DOF will be larger higher when the working distance is longer DOF will be larger when the SEM is at lower magnifications

Example for a specimen At working distance of 10 mm we Can find D

Example for a specimen At working distance of 10 mm we Can find D in different conditions

Enhancement of DOF Namely, to increase the depth of field we must either: decrease

Enhancement of DOF Namely, to increase the depth of field we must either: decrease the size of the aperture in the final lens A decrease the magnification M being used, or increase the distance W between the specimen and the lens

Decreasing the size of the aperture can produce an increased depth of field a

Decreasing the size of the aperture can produce an increased depth of field a decrease in probe current a possible improvement in the probe resolution a change in astigmatism (needs to be corrected again)

increasing the distance W * Can potentially increased depth of field * lower attainable

increasing the distance W * Can potentially increased depth of field * lower attainable limits for low magnification * some loss of resolution * a possible decrease of signal strength * astigmatism will worsen at long W * some serious distortions in

Thank you

Thank you

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