Ewha Womans University MEMS ancilla Science Presented by

Ewha Womans University MEMS ancilla Science? Presented by Koo Hyun Nam Ewha/RCMST Invite Talk Feb. 22. 2010 me. berkeley. edu/~koonam

Overview MEMS? § Micro-electro-mechanical system § Tiny + electronically driven + mechanical device/system § Adopt IC fabrication processes (photo-litho, deposition, etching) § Since 1960’s (Gold Resonating MOS gate structure) § NEMS (nanoelectromechanical system) § Applications § Sensor § Accelerometer (car airbag) § Gyroscope (Nintendo Wii and Iphone) § Actuator § Optical switch (data communication) § Bubble ejector (inkjet printer) Ewha W. Univ. MEMS ancilla Science? 2/11

Overview Manufacturing Processes § Deposition § Process to deposit processing material (Si. O 2, Si 3 N 4, metals, …) § Physical deposition (sputtering, evaporation, …) § Chemical deposition (CVD, thermal oxidation, …) § Patterning § Lithography § E-beam Lithography, Ion Beam Lithography, … § Etching § Wet etching – liquid solutions § Dry etching – vapor etching § Plasma etching – plasma reaction (Sputtering, RIE, …) [dry etching] Ewha W. Univ. MEMS ancilla Science? 3/11

Research Trend MEMS ancilla Science? § MEMS research trend 1980 1960 2000 Future Pure MEMS reserch Applications § New trend § Integration with nanotechnology (physics, chemistry, …) § Bio. MEMS (biology) §… § As philosophia ancilla theologiae, MEMS ancilla science? Ewha W. Univ. MEMS ancilla Science? 4/11

Research Trend Sad story ! 15 years later ? Then… ? Ewha W. Univ. MEMS ancilla Science? 5/11

Research Trend Research Directions § Assist current science § Microfabrication is repeatable process § Can make works easier § Increase usability of existing technology and science § MEMS enable scaledown of size, fast operation, inexpensive manufacturing § ex. Increase sensitivity , enable in-situ measurement, multi-point detection § Change view (breakthrough) § Same science, but overcome difficulties for realization § Richard Feynman’s lecture ‘There's Plenty of Room at the Bottom. ’ Tom Newman, 1985. Ewha W. Univ. MEMS ancilla Science? 6/11

Assist Current Science Case 1 [Example Researches] § MEMS supercapacitor § MEMS provide domain structure § Increase surface area § MEMS separate region for CNT growth § MEMS is not necessary process, but helpful Y. Jiang and L. Lin § Repeatable fabrication § Promising structure formation Carbon Nanotube electrodes Ewha W. Univ. MEMS ancilla Science? 7/11

Increase Usability Case 2 [Example Researches] 50 cm § MEMS ellipsometer § MEMS significant reduce size § Enable in-situ and multi-point detection 1 0. cm § Lowered operation power and time are plus K. Nam and L. Lin § MEMS CVD for graphine synthesis § Miniaturized CVD system § Enable quick temperature change Q. Zhou and L. Lin Ewha W. Univ. MEMS ancilla Science? 8/11

Breakthrough Case 3 [Example Researches] § Obscura telescope using MEMS mirror array § Current telescope has difficult to achieve prompt observation of randomly positioned object § Gamma ray burst § Fast moving object § MEMS mirrors substitute pinhole of telescope § Provide fast response time § Realization of new telescope J. Park and I. Park Ewha W. Univ. MEMS ancilla Science? 9/11

Conclusion Welcome to MEMS world § Rough and brief introduction to MEMS world § MEMS ancilla is waiting for you! § How to utilize is your work! Ewha W. Univ. MEMS ancilla Science? 10/11

Bye Thank you! Questions or Comments? Ewha W. Univ. MEMS ancilla Science? 11/11