ESD SYSTEM OVERVIEW Transport rod Cu Sample 1

ESD SYSTEM OVERVIEW Transport rod Cu Sample 1 Butterfly valve 2 Bias Sample Holder plate Electrometer RGA B-A gauge Pumping group Filament Conductance Gas Injection Line Full Range Gauge Filament Power Supply Bias Filament

ESD SYSTEM OVERVIEW

Cu SAMPLES

Circuit 35 KV A 2 -3 A +15 V V A V

Cu Samples main steps: Machining Cleaning Heat treatment ESD

Bake – out: lower part 9 8 7 6/11 1 2 3 5 10 4

Bake – out: upper part 3 B 4 B 2 B 1 B

RGA scans

RGA scans (valve closed)

Degassing: 9 Cycles @ 0. 35 KV H 2 % H 2 O% N 2/CO % O 2 % F% Ar % CO 2 % 9. 56 34. 1 16. 9 13 12. 4 9. 25 36. 9

Degassing: 9 Cycles @ 0. 70 KV H 2 % H 2 O% N 2/CO % O 2 % F% Ar % CO 2 % 23 34 30. 8 40 18. 9 16. 2 44. 9

Degassing: 9 Cycles @ 1. 5 KV H 2 % H 2 O% N 2/CO % O 2 % F% Ar % CO 2 % 0. 94 -0. 22 0. 77 3. 7 -0. 44 -3. 29 1. 47

Calibration: H 2 Calibration Factor

Calibration: N 2 Calibration Factor

Calibration: N 2 nd 2 set of data Calibration Factor

Degassing: 30 Cycles @ 0. 35 KV

CURRENT!!!!!

Desorption Yield

Desorption Yield • 15 RGA Cycles for background Signal + biassing of the sample • 15 RGA Cycles with the filament switched on • filament + sample degassing

Desorption Yield • switch on the filament • 15 RGA Cycles for background pressure • 15 RGA Cycles with the sample biased

Desorption Yield @ 0. 35 KV

Desorption Yield @ 10 KV

N 2 calibration

Energy correlation

Desorption Mechanisms

Desorption Mechanisms

Stopping power and Range Kinetic energy Stopping Power (Me. V cm 2/gr) Me. V Collision Radiative Total 1. 00 E-02 1. 32 E+01 1. 21 E-02 1. 32 E+01

Stopping power and Range Kinetic Energy Me. V Range gr/cm 2 Thickness cm 1. 00 E-02 4. 601 E-04 5. 15 E-05

Energy correlation

Circuit 35 KV A 2 -3 A +15 V V A V

Extra-electron source Positive Polarization [KV] Current [μA] Negative Polarization [KV] Current [μA] 7 0 -0. 2 -7 0. 6 8 1. 1 -1. 2 -8 0. 8 9 2. 2 -9 1. 8 10 3. 9 -10 5 15 30 -15 100

Degassing @ 5 KV

Improvements