EPDT Miranda van Stenis Thin Film and Glass

EP-DT Miranda van Stenis Thin Film and Glass Service (TFG) Laura Funder Thomas Schneider Florian Jenny Jerome Noel (apprentice) (technical student) • Thin film coating More than 50 years growing experience • Glass & ceramic machining • Optics Quality Control lab • Apprentices training (~3*3 months) • General support to DT detector projects Standard service Production See link=> https: //ep-dt. web. cern. ch/thin-film-glass-service T. Schneider DT seminar 11/03/2020 R&D 1

EP-DT-TFG Location Optical QC lab (Microscopes) (optical spectrometer) Clean room for 7 coating devices Offices Entrance area with ovens and gluing facility Entry Glass and Ceramic workshop Building 108 Building 3 R T. Schneider DT seminar 11/03/2020 2

EP-DT-TFG Infrastructure Ovens Gluing area ( Fibre beam monitor) Entrance area Glass and Ceramic workshop Chemistry and cleaning Entry Turning and milling machine Basic glass ceramics cutting facilities CNC machine T. Schneider DT seminar 11/03/2020 Building 3 R 3

EP-DT-TFG Infrastructure Clean room preparation areas open for EP-DT and other detector groups Cleanroom assembly area (NA 62) Several Ultra sonic baths 3 laminar flow cabinets for assembly activities (ISO class 7) Dry nitrogen glove box Visual inspection LHCb Muon T. Schneider DT seminar 11/03/2020 4

EP-DT-TFG Infrastructure Optical Quality Control equipment Different microscopes OGP 3 D metrology UV spectrometer HPD/PM QE measurement Perkin Elmer spectrometer for spectral/diffuse reflection and transmission (200 -900 nm) T. Schneider DT seminar 11/03/2020 Keyence VR 3000 3 D measurement system 5

EP-DT-TFG Infrastructure PVD thin film coating devices Big Cs. I coating unit Generic coating unit (Balzers 1957!) New state of the art coating unit WLS/Zinc coater HPD coating plant Small CSI coater Big production coater (1 m diameter) T. Schneider DT seminar 11/03/2020 6

EP-DT-TFG infrastructure List of detector groups or users profiting of our infrastructure (~last 2 years): • • • • NA 62 Giga Tracker (assembly, cleaning and metrology in cleanroom) LHCb Sci. Fi (close collaboration) SPACAL RD (fibre machining/prototype assembly) LHCb Velo (component cleaning/surface metrology) LHCb Muon (microscopic chamber inspection) CMS HGCal (large silicon sensor cleaning) TE-VSC (ceramic machining/spectroscopy) CAST –CAPP (repair of turning mechanism of cavities) Student workshop (Optics lab of TFG) Neutrino platform (PM QE measurements) Open BE-BI (Fibre detector production) ATLAS ITk (cleaning/surface metrology) DT µ-channel cooling (cleaning/surface metrology) DT µ-fabrication facilities (cleaning/surface metrology) • Picosec project with RD 51 lab? ! (handling of photocathodes) The Perkin Elmer spectrometer (UV-VIS) is used by various CERN users T. Schneider DT seminar 11/03/2020 7

EP-DT-TFG PVD coating technology Motivation for vacuum thin film coating: • High purity thin layers • Low cost of material • Good reproducibility <=vacuum environment <=thin layers with same performance as bulk material <=precise control of process parameters Different kind of technologies available: Physical Vapour Deposition (PVD): Resistive • Thermal Evaporation (30 th) E-beam • Sputtering (70 th) Cathodic Magnetron Chemical Vapour Deposition (CVD) Thermal vs sputtering “Thermal evaporation is the more mature technology. . . it allows coating almost all materials needed for “standard” coating applications” +high flexibility in substrate material and geometry +Also exotic material can be coated (low temp) =>Best candidate for R&D device in TFG lab -need high vacuum level ( ~10 -7 mbar) -lower energy coating (packing density/adherence) T. Schneider DT seminar 11/03/2020 8

EP-DT-TFG PVD schematics Uniformity of layer thickness is key issue concept for uniform large area coating: • Increase distance source –substrate • Rotate substrate • Position source most excentric T. Schneider DT seminar 11/03/2020 9

EP-DT-TFG PVD coating application Optical coatings • Enhanced reflective coatings • Anti reflective coatings Geometer target Fiber beam monitor Mylar foil coating for NA 62 RICH optical feed trough T. Schneider DT seminar 11/03/2020 NA 62 RICH UV mirror system AR quartz window for LHCb RICH 1 10

EP-DT-TFG PVD coating application Other light related coatings • Wavelength shifter coatings (WLS) • Photocathode layers (PC) Compass Thick-gem PC coating (Cs. I) Pico-sec (GDD) PM wavelength shifter coating (TPB) T. Schneider DT seminar 11/03/2020 11

EP-DT-TFG PVD coating application Functional layers • • Pre-coating of conductive layers Transparent conductive layers De-moulding layers Zinc layer for isotropic radicals Micro buses de-molding layer (Au) Titanium (conductive) spirals on CLOUD UV sabre Conductive layer (Cu) on ceramics Zinc layer on gold plates for MEDICIS (Medical Isotopes Collection ISOLDE) T. Schneider DT seminar 11/03/2020 12

EP-DT-TFG Fiber light guide activities • Construction and installation of ATLAS ALFA detector (initially started with lateral fibre coating) • Demonstrator construction of Ax pet • Strongly involved in Sci. Fi development 20142016 • Development and construction of 15 Fibre beam monitors for Neutino Platform (collaboration with BE-BI) • Contribution to prototype of E-cal LHCb • Individual fibre polishing for various detector groups (fibre –fin) • Support to Sci. Fi detector construction assembly Competencies: • Individual fibre polishing • Fibre gluing • Fibre detector construction • Reflective (Al) lateral fibre coating • Fibre end coating T. Schneider DT seminar 11/03/2020 13

EP-DT-TFG Anti Reflective coating I 0 FRESNELReflection (R) i r Refractive index n 1 Refractive index n 2 r’ Refraction λ/2 T. Schneider DT seminar 11/03/2020 14

EP-DT-TFG enhanced reflective coating Enhanced reflective coating of LHCb RICH 1 mirror system Aluminum as best metallic reflector is applied. On top a dielectric layer is applied to enhance the reflectance of the Aluminum layer. In this case the layer thickness (~ λ/2) is adjusted such that the 2 nd reflection is delayed λ. That way the 2 waveforms overlap and add up. In addition these layers act as protection layer for the Aluminum. (oxidation and mechanical scratches) delay T. Schneider DT seminar 11/03/2020 15

EP-DT-TFG LHCb RICH 1 upgrade R&D for LHCb RICH 1 optics system (status mid 2019) • Define recipe for enhanced protected coating according to given requirements (>90% in the range of 275 nm to 400 nm) • Test coating on real size flat mirror (Cr, Al, Si. O 2, Hf. O 2) • Overcome intrinsic problem of big spherical mirrors (thinner layers @ borders) • Test coatings on composite samples Quartz window QC 16 flat glass mirrors (370 mm*440 mm) 4 spherical composite mirrors, (740 mm*650 mm) T. Schneider DT seminar 11/03/2020 16

EP-DT-TFG Jerome T. Schneider DT seminar 11/03/2020 17

EP-DT-TFG Replacement of 2 obsolete generic mid size coater New state of the art Box-coater • • Budget 200 KCHF (EP-DT) and 50 KCHF (BE-BI) Delivery December 2018 Commissioning (SAT test) march 2019 Start up in summer 2019 T. Schneider DT seminar 11/03/2020 18

EP-DT-TFG new state of the art Box-Coater Specifications: Box type process chamber (PC) able to fit substrates up to 0. 5 m • Base pressure 10 -7 mbar • Dry pre-pump (no oil contamination) • Mag Tubo-pump (valve to PC) • Close-loop cooling system • Motor driven rotation (magnetic coupling) max 8 kg and 0 -60 rpm • Viewport at front door • Exchangeable wall protection liners • Shutters for all material sources • 2 quartz monitor (Inficon) readings • 6 pocket E-gun with sweep option, HV supply and Controller • 2 Thermal evaporators (2*6 KW) • Quartz lamp for substrate heating Custom build control software for automatic and manual mode • Automatic pump and vent cycle • Remote software service • PLC controlled installation • PC user interface Upgrade 2020 • Ion source for in-sito substrate cleaning rotation • Thickness sensor Viewport Inficon User interface Thermals sources Turbo pump cooling pre-pump T. Schneider DT seminar 11/03/2020 E-gun with shutter 19

EP-DT-TFG Laura T. Schneider DT seminar 11/03/2020 20