Environmental Health and Safety Japan TC Chapter Liaison

Environmental, Health and Safety Japan TC Chapter Liaison Report Taiwan EHS TC Chapter Meeting March, 2017

Leadership • Committee Co-chairs – Hidetoshi Sakura/Nuflare • GCS voting member • EHS Committee representative to the JRSC – Moray Crawford/Hatsuta Seisakusho • GCS voting member – Supika Mashiro/Tokyo Electron • Leadership Changes – Naokatsu Nishiguchi/SCREEN BSS stepped down from Seismic Protection Task Force. New task force leader is not assigned yet.

TC Chapter Organization EHS Japn TC Chapter Hidetoshi Sakura/ Nuflare Technology Moray Crawford/ Hatsuta Seisakusho Supika Mashiro/ Tokyo Electron STEP Planning WG Kenji Sugihara/ Panasonic Seismic Protection TF TBD SDRCM TF Supika Mashiro/ Tokyo Electron S 23 Revision Global TF George Hoshi / Tokyo Electron Lauren Crane / Tokyo Electron U. S. GHG Emission Characterization TF George Hoshi / Tokyo Electron

Meeting Information • Previous Meetings – 10: 00 -14: 00, December 16, 2016 at Conference Tower, Tokyo Big Site, Tokyo, Japan • Next Meeting – 13: 30 -17: 00 (TBD), April 25, 2017 at Meeting Room, SEMI Japan, Tokyo, Japan

Technical Ballot and Ratification Ballot Result • Doc. 5556 B: Line Item Revision to SEMI S 2 -0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, Revisions to § 19 “Seismic Protection” (In Delayed Effective Date Format) – Passed with editorial changes and technical changes on June 28 • Ratification Ballot to be issued to validate all of the technical changes made by a TC Chapter during adjudication of 5556 B – Ratification Ballot R 5556 B was submitted to be voted for Cycle 6 • Cleared the condition to pass – Also both 5556 B and R 5556 B passed the A&R process, published as S 2 -1016 a

Ballot Result on June 28 and Ratification Ballot • Doc. 5947 A: Revision to SEMI S 23 -0813, with title change from “GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT” to “GUIDE FOR ENERGY, UTILITIES AND MATERIALS USE EFFICIENCY OF SEMICONDUCTOR MANUFACTURING EQUIPMENT” – Passed with editorial changes and technical changes on June 28 • Ratification Ballot to be issued to validate all of the technical changes made by a TC Chapter during adjudication of 5947 A – Ratification Ballot R 5947 A was submitted to be voted for Cycle 6 • Cleared the condition to pass – Also both 5947 A and R 5947 A passed the A&R process, published as S 23 -1116

Upcoming Ballots • NONE

5 year Review • S 16 -0307 (Reapproved 0812) Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life – SNARF for reapproval will be prepared. • S 17 -0113 Safety Guideline for Unmanned Transport Vehicle (UTV) Systems – SNARF for re-approval will be prepared • S 18 -0312 Environmental, Health and Safety Guideline for Flammable Silicon Compounds – SANRF for the item ballot with the title change (PM A 4 -1) • S 21 -1106 E (Reapproved 0612) Safety Guideline for Worker Protection – SNARF for re-approval will be prepared • S 29 -0712 Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction – The task force will discuss • S 24 -0306 (Reapproved 0811) Safety Guideline for Multi-Employer Work Areas – Inactive 8

TF/ WG/ SG Reports -1 • S 23 Revision Global Task Force – New SNARF for revision to S 23, adding the guide for COo 2 equivalent conversion (line item) will be discussed among global task force members. • Greenhouse Gas (GHG) Emission Characterization Task Force – No special update from the last report

TF/ WG/ SG Reports -2 • Seismic Protection Task Force – Recruiting new task force leader – Disapproval Comments to R 5559 B • As a result of TF/TC Chapter discussions, five out of eight items are to be addressed as new business in future. • STEP Planning Working Group – STEP/ SEMI S 2 was held on November 22 at SEMI Japan Office.

Thank you! Staff contact Junko Collins SEMI Japan jcollins@semi. org