DP Series Springless Diaphragm Valves 2000 Swagelok Company
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DP Series Springless Diaphragm Valves © 2000 Swagelok Company
Why develop a new valve? • Semiconductor industry driving for lower costs • Availability of new technology • Swagelok’s drive to help customers win © 2000 Swagelok Company
DP Series Objectives • Provide a 1/4 inch UHP valve for low and high-pressure applications • Provide a high-performance seat • Improve flow capabilities • Provide integral locking handle • Drop in replacement • Provide a competitively priced valve © 2000 Swagelok Company
Topics to be Discussed • Technology 3 3 Design tools Seat performance • Valve overview 3 3 DP specifications DP components • Valve highlights © 2000 Swagelok Company
DP Series Computer Modeling Technology © 2000 Swagelok Company
Fully Swept Flow Path Diaphragms CFD Analysis Valve inlet © 2000 Swagelok Company Valve outlet
Finite Element Analysis Featured area © 2000 Swagelok Company
Repeatable Shutoff Performance FEA Analysis © 2000 Swagelok Company
Finite Element Analysis Featured area © 2000 Swagelok Company
Diaphragm Cycle Life FEA Analysis Actuator button Bonnet nut Diaphragms © 2000 Swagelok Company
DP Series Valve Seat Technology © 2000 Swagelok Company
Helium Leak Test Performance Inboard helium leak testing of the seat with 145 psig inlet pressure 1 x 10 -7 _ 1 x 10 -8 _ (std cm 3/s) 1 x 10 -9 _ 1 x 10 -10 _ *Minimum required by SEMI F 1 -96 © 2000 Swagelok Company *15 Time in seconds
¼ in. DP Series Technical Issues • Dimensions: 3 Same O. A. L. • Pressure Rating: 3 145 psi / 10 bar: Low Pressure 3 3045 psi / 210 bar: High Pressure • HLT: 3 1 x 10 -9 std cm 3/s • Surface Finish: • Cv: 5 in Ra 3 0. 27: Low Pressure 3 0. 20: High Pressure 3 © 2000 Swagelok Company
Low Pressure Internal Components © 2000 Swagelok Company
Actuator Options Low-pressure air actuator Low- and highpressure Low- and highlocking handle pressure “T” handle High-pressure air actuator Common body, diaphragms and seat © 2000 Swagelok Company
Locking Handle © 2000 Swagelok Company
DP Series Valve Highlights • • Both high- and low-pressure options Improved seat performance Improved flow capabilities Standard locking handle option for safety • Drop in replacement • Competitively priced © 2000 Swagelok Company
DP Series Springless Diaphragm Valves © 2000 Swagelok Company