Dipartimento di Fisica Universit di Ferrara Italy INFM
- Slides: 12
Dipartimento di Fisica Università di Ferrara - Italy INFM - INFN The sensors and semiconductors laboratory Vincenzo Guidi Dipartimento di Fisica Università di Ferrara
Activities at the Sensors and semiconductors group • Fundamental and applied research on nanostructured materials • Micromachining of microdevices • Production and characterization of gas sensors and photovoltaic cells
Overview Prof. Giuliano Martinelli Andrea Antonini Federico Bizzi Luca Bonazzi Mariangela Butturi Moira Buzzolani Maria Cristina Carotta Barbara Cavicchi Andrea Chiapatti Luigi Crema Matteo Ferroni Alessio Giberti Dario Gnani Vincenzo Guidi Cesare Malagù Federico Montoncello Marco Piga Alessandro Ronzoni Marco Stefancich Donato Vincenzi
Chemoresistive gas sensors Powder preparation gold electrodes Thick film process 0 250 paste preparation substrate temperature feed-back resistor platinum heater 500 nm printing of the paste 1 mm thick film the sensor
Ti. O 2 gas sensing films 650 o. C 850 o. C CO = 100 ppm wet air 1 m Doping with tantalum (10 at. % ) 650 o. C 850 o. C Ggas/Gair 2. 2 T = 400 o. C 1. 8 1. 4 1. 0 1 m 0 20 40 time (min) 60
Comparison between conventional and innovative microsensors in CO detection CO concentration (ppm) Microsensor Conv. instrum. 1: 00 8: 00 18: 00 0: 00 Time (h) 8: 00 18: 00 0: 00
Monitoring experiments in the frame of a project for evaluating the degradation level of the historical buildings in Ferrara 3 2 1 4 Air quality assessment in urban environment…… Palazzo dei Diamanti
Microsensors deposited on a micro hotplate Si. O 2+Si 3 N 4 Polysilicon resistor Insulating film Low power consumption because of low thermal conductivity: 30 m. W @ 400 ºC Anisotropic etching
Gas microsensors with hybrid technology
Traditional gas-chromatografic with a capillary in fused silica 30 cm Miniaturized gas-cromatografic facility made of micromachined silicon 0, 5 mm
High-concentration photovoltaic solar cells 100 m Mirrors are used to concentrate the radiation of the Sun on highefficiency PV cells are fabricated through microlithography P N ox P+ N+
