Development of a large format chargecoupled device CCD

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Development of a large format charge-coupled device (CCD) for X-ray use in near future

Development of a large format charge-coupled device (CCD) for X-ray use in near future the Sixth International "Hiroshima" Symposium on the Development and Application of Semiconductor Tracking Detectors Carmel Mission Inn, California September 11 -15, 2006 Hiroshi Tsunemi tsunemi@ess. sci. osaka-u. ac. jp Graduate School of Science, Earth and Space Science Osaka University, Machikaneyama, 1 -1 Toyonaka, Osaka, 560 -0043, Japan 1

Co-investigators Hiroshi Tsunemi, Emi Miyata, Hideki Ozawa, Daisuke Matsuura, Masahiro Uchino, Masakuni Tohiguchi Graduate

Co-investigators Hiroshi Tsunemi, Emi Miyata, Hideki Ozawa, Daisuke Matsuura, Masahiro Uchino, Masakuni Tohiguchi Graduate School of Science, Earth and Space Science, Osaka University Shinichiro Takagi, Tatsuya Inui, Takeshi Go Tsuru Department of Physics, Faculty of Science, Kyoto University Hirokazu Ikeda ISAS, Japan Aerospace Explotation Angency (JAXA) Satoshi Miyazaki, Yukiko Kamata Subaru Telescope, National Astronomical Observatory of Japan Ko-ei Yamamoto, Kazuhisa Miyaguchi, Masaharu Muramatsu, Hisanori Suzuki Solid State Division, Hamamatsu Photonics K. K. John P. Doty Noqsi aerospace corp. , CO, USA 2

Talk plan CCDs we have developed so far ASIC for fast readout with low

Talk plan CCDs we have developed so far ASIC for fast readout with low noise Fully depleted a P-channel CCD Scintillator Deposited CCD for high energy X-ray Balloon experiment: Super mirror + SDCCD Summary 3

Employment of our CCD in space We have developed 25 x 25 mm 2

Employment of our CCD in space We have developed 25 x 25 mm 2 CCD with a depletion layer of 90 um. They are employed in the interplanetary mission, “HAYABUSA”, a sample return project to the asteroid ITOKAWA. (Okada et al. , Science, 2006) They are also employed in the ISS-JEM (MAXI) mission that is scheduled to be launched in 2008. 4 HAYABUSA touched down to ITOKAWA ISS-JEM (MAXI)

CCD for X-ray Pixel size : 24μm, 1 K x 1 K array Depletion

CCD for X-ray Pixel size : 24μm, 1 K x 1 K array Depletion layer : 90μm HAYABUSA employed 6 chips MAXI employed 32 chips following models By HAMAMATSU Photonics K. K. 5 Katayama et al. , NIMA 541, 350, 2005

MAXI can cover the whole sky We have the GSC (large area gas counter)

MAXI can cover the whole sky We have the GSC (large area gas counter) and the SSC (X-ray CCD array) on the MAXI mission. – The SSC can measure the distribution of emission lines while the GSC can measure the weak sources. ROSAT All Sky map 6

ASIC (M 01) for X-ray CCD We are now developing an ASIC for X-ray

ASIC (M 01) for X-ray CCD We are now developing an ASIC for X-ray CCD so that we can improve the time resolution by using many readout nodes. The first chip (M 01) functions properly. (Matsuura et al. , 2006) Test board for ASIC chip X-ray shadow obtained 7

Two readout nodes function properly CCD-Ne. XT 1 has two readout nodes which connect

Two readout nodes function properly CCD-Ne. XT 1 has two readout nodes which connect to M 01. A A B B 8

M 01 MD 01 (new type) 9

M 01 MD 01 (new type) 9

Post layout simulation for MD 01 Noise simulation Linearity simulation 10

Post layout simulation for MD 01 Noise simulation Linearity simulation 10

Chain input output 11

Chain input output 11

Specification of test device Specification (design Pixel size Format Wafer thickness Depletion layer Illuminated

Specification of test device Specification (design Pixel size Format Wafer thickness Depletion layer Illuminated method value) 14. 5 mm x 15 mm 328 x 320 200 mm FI (Front illuminated) Schematic of cross section 4. 8 mm electrode Depletion layer : 200 mm 12 Fully depleted CCD

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Responsivity for soft X-ray spectrum of oxygen K line Oxygen K line 527 e.

Responsivity for soft X-ray spectrum of oxygen K line Oxygen K line 527 e. V We investigated the responsivity for soft X-ray by using Oxygen K line : 527 e. V Energy resolution FWHM = 81 ± 1 e. V We confirmed that this CCD completely collects the signal charges Because this peak has no low energy tail. This CCD have good responsivities for soft X-ray down to 0. 5 14 ke. V.

CCD performance at low energy Response for emission lines of C(280 e. V)、O(520 e.

CCD performance at low energy Response for emission lines of C(280 e. V)、O(520 e. V)、Al(1. 5 ke. V)、 55 Fe(5. 9 ke. V、6. 4 ke. V). The best performance is achieved at -110℃, while we can manage to function at -50℃ for the balloon experiment. (Miyata et al. , JJAP, 45, L 572, 2006)

SD-CCD 16

SD-CCD 16

SDCCD has high performance Detection efficiency can be expanded by using Cs. I (Miyata

SDCCD has high performance Detection efficiency can be expanded by using Cs. I (Miyata et al. , 2003) scintillator. The signal spreads to some extent. The point of interaction can be determined better than a pixel size. 17

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Characteristics of the SDCCD Output linearity Energy resolution Miyata et al. , IEEE 53,

Characteristics of the SDCCD Output linearity Energy resolution Miyata et al. , IEEE 53, 576, 2006 19

Detector test by balloon in 2005 20

Detector test by balloon in 2005 20

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SDCCD has good spatial resolution Supermirror telescope Miyata et al. , JJAP 41, L

SDCCD has good spatial resolution Supermirror telescope Miyata et al. , JJAP 41, L 500, 2002 We achieved better spatial resolution than the pixel size. Test flight of the balloon experiment verified the performance of the SDCCD. We are going to perform a balloon experiment (SUMIT) at Brazil in this fall (November) SUMIT is a collaboration project : Nagoya university, Osaka university, JAXA (Japan) and INPE (Brazil) Mirror response at 40 ke. V 22

Application to the balloon experiment A large format CCD has been developed by using

Application to the balloon experiment A large format CCD has been developed by using P-ch wafer. It is a fully depleted CCD and fabricated as a backilluminated CCD. We placed a Cs. I scintillator on it so that we can expand the energy range up to 100 ke. V. Area : 3× 6 cm 2, Format : 2 K x 4 K, Cooling by Peltier 23 Front end module

2k×4k CCD for Balloon experiment Flex PCB Ceramic PKG 2 k x 4 k

2k×4k CCD for Balloon experiment Flex PCB Ceramic PKG 2 k x 4 k BI-CCD chip A A’ Acrylic spacer Base plate Peltier A-A’ Cross section 24

Results using 2 K x 4 K chip • Cement the Cs. I of

Results using 2 K x 4 K chip • Cement the Cs. I of 300μm on the CCD • Working temperature is -60℃ • 241 Am X-rays onto the chip • Pixel size is 15μm, 16 x 16 sum mode • Apparent pixel size is 240μm • Imaging area is 30× 30 mm 2、4 readouts • Frame time is 0. 2 sec 25

Summary CCDs we have developed so far are employed in space programs. They are

Summary CCDs we have developed so far are employed in space programs. They are 25 x 25 mm 2. Frame transfer type is also developed. These are front-illuminated CCDs. CCD has poor time resolution. We are developing an ASIC for fast readout with low noise. Revised ASIC employing a sigma-delta modulator will be delivered in this November. Fully depleted a P-channel CCD has been fabricated. They can be back-illuminated CCDs showing good efficiency at low energy. The performance is comparable to that of the FI CCDs. We have developed a Scintillator Deposited CCD that can cover the energy range up to 100 ke. V. Balloon test flight in 2005 verified the performance of the SDCCD. We are planning the balloon experiment in 2006 using a Super mirror and the SDCCD. The CCD is fully depleted back-illuminated CCD, 2 Kx 4 K with 30 x 60 mm 2. The FOV is 13’x 13’ covering the energy range 20— 60 ke. V (focal length is 8 m). 26