Copper Wire Bonding Training Prepared by Ning wy

Copper Wire Bonding Training 铜线焊线培训 Prepared by: Ning wy Shenzhen STS Microelectronics

Copper Wire Bonding Content of Presentation 内容介绍 Advantages优点 Disadvantages缺点 Wire Bonding Cycle Material材料 Machine机器 Transfer Procedure from Au to Cu 转换步骤AU Cu Parameters Transfer Procedure from Cu to Au 转换步骤 CU Au Parameters Cu Pull and Ball Shear Cu Wire Bonding Problems铜线焊线常见问题 Prepared by: Ning wy CU AU

Copper Wire Bonding Advantages优点 -Cost saving 节约成本 -Higher electrical conductivity 较高的电导性 -Resistant to wire sweeping防止线下垂 -Compatible to Cu metallization 铜材料的兼容性 Prepared by: Ning wy

Copper Wire Bonding Disadvantages缺点 -Control Ambient(95%N 2/5%H 2) 必须控制周围环境，加混合气体防止焊球氧化 -Oxidation of Cu wire 铜线易氧化，必须放在氮气柜中保存, 拆开包装后保存期为 4天 -2 nd bonding 第 2个焊点问题 Prepared by: Ning wy

Copper Wire Bonding Cavity bar Wire Bonding Cycle Prepared by: Ning wy

Copper Wire Bonding Ball Formation • Reduced Atmosphere • Cu oxides make the ball harder Oxidation Prevention Process • Minimized gas turbulence • Coating Cu wire(<7 angstrom) • Bag sealing • Preheat temperature: 175 -225 C Prepared by: Ning wy

Copper Wire Bonding Material 材料 • Cu wire: 1. 3 mil, 1. 5 mil, 2 mil • Capillary劈刀 Cu wire size 1. 3 mil Capillary UTS-43 IE-CM-1/16 -XL 1. 5 mil UTS-48 JF-CM-1/16 -XL 2 mil UTS-58 LJ-CM-1/16 -XL Prepared by: Ning wy

Copper Wire Bonding Material 材料 • Device : MZGR* • Lead frame: 5 FT 71302 注意： 1 根据随 单上产品名称，选择相应BSA 2 确认正确的FRAME型号，线材料，线径和劈刀 Prepared by: Ning wy

Copper Wire Bonding Transfer Procedure from Au to Cu 转换步骤AU CU 1. Change Cu capillary 换AU劈刀 2. Setup forming gas安装和检查gas 10% Forming gas Flow: 0. 7+/- 0. 1 l/min 3. Adjust the machine setting 3 Parameter 1 Bond parameter Wire type Prepared by: Ning wy 7 EFO parameter Copper

Copper Wire Bonding Transfer Procedure from Au to Cu 转换步骤 AU CU 4. CPU cold start machine 冷启动 5. Confirm 3 rd item 确认第 3项是否正确 Wire type Copper 6. Adjust the machine setting 机器设置 Ftn 15 0 Bonding tool Bond Pt Tol Flag Prepared by: Ning wy 4 Safety control -Disable

Copper Wire Bonding Transfer Procedure from Au to Cu 转换步骤AU CU 7. Modify Cu parameters. (see annexe 1) 修改CU线参数，见附件 1 8. Conversion similar to Au 换产品，与AU线相似 9. Measure pull force and Ball shear 测试拉力和球推力 10. Check 检查 Prepared by: Ning wy

Copper Wire Bonding Cu Parameters Heater Block Temperature Pre heat: 265+/-5 Deg C Heater Block Temperature Heater: 260+/-5 Deg C 10% Forming gas Flow: 0. 7 +/-0. 1 l/min Prepared by: Ning wy Annexe 1

Copper Wire Bonding Transfer Procedure from Cu to Au 转换步骤 CU AU 1. Change Au capillary换AU劈刀 2. 2. Adjust the machine setting机器设置 3 Parameter 1 Bond parameter Wire type 7 EFO parameter Gold 3. CPU cold start the machine冷启动 4. Confirm 2 nd item确认第 2项是否正确 Wire type Prepared by: Ning wy Gold

Copper Wire Bonding Transfer Procedure from Cu to Au 转换步骤 CU AU 5. Adjust the machine setting机器设置 Ftn 15 0 Bonding tool Bond Pt Tol Flag 4 Safety control -Disable 6. Modify Au parameters(see annexe 2) 修改AU线参数，见附件 2 7. Conversion换产品 Prepared by: Ning wy

Copper Wire Bonding Transfer Procedure from Cu to Au 转换步骤 CU AU 8. Measure pull force and Ball shear 测试拉力和球推力 9. Check 检查 Prepared by: Ning wy

Copper Wire Bonding Au Parameters Prepared by: Ning wy Annexe 2

Copper Wire Bonding Cu Pull and Ball Shear 铜线拉力和推力测试最低值，及焊球大小 Prepared by: Ning wy

Copper Wire Bonding Cu Wire Bonding Problems 铜线焊线常见问题 Prepared by: Ning wy