Congressional Nanotechnology Caucus September 10 2007 Nanotechnology Electronics

Congressional Nanotechnology Caucus September 10, 2007 Nanotechnology Electronics and Photonics Walt Trybula, Ph. D. IEEE Fellow & SPIE Fellow Director NANOMATERIALS APPLICATION CENTER http: //www. nanotxstate. org Texas State University-San Marcos

Objective of Presentation • Present an update on the status of nano technology developments in Electronics and Photonics • Provide a glimpse of the challenges of implementing nano technology in these areas • Highlight some advantages of implementing the nano technology into products • Indicate the importance of moving forward with nano technology implementations

Format Employed for Examples Topic: A picture or description is employed to indicate the device or structure being described Issues: A short listing of some of the issues that are inhibiting the application of the specific example and will typically include an indication of the sizes involved Potential Solutions: This list contains actions that must be continued/started to develop the specific example to either a concept feasibility state or a production worthy state Benefits: This list indicates some of the advantages of developing products that will employ the device or structure described

Semiconductor Conductivity Issues: • Line widths of less than 50 nm may have conductivity issues due to grain boundaries and crystal orientations • Resultant impact on device performance and yield Potential Solutions: • Revert to Aluminum conductors with an associated loss in properties • Enhanced uniformity of copper with lower actual conductivity • Develop new processes and equipment Benefits: • Improved performance • Higher yields and lower costs • Improved designs and functionality

Transistor Evolution Future: 15 years Non-classical CMOS Issues: • Sizes under 20 nm • Manufacturing capability • Developing theoretical understanding • Experimental data • Radical change from experience Beyond CMOS Potential Solutions: • Continued research and development • Develop understanding of operational characteristics • Industry/academia involvement in materials and functionality evaluations Benefits: • Continue on with existing devices • Extension of Moore’s Law • Existing infrastructure continues to support the industry

What is the Infrastructure? • For Semiconductors – Lithography – – Exposure tools (create images) Mask (pattern for exposure tools) Resist (Form images on wafer) Metrology (measure/characterize images) – [each line above has a corresponding infrastructure] Via • Mask Infrastructure Example – – Pattern Generator Mask Substrate Material Inspection Tools Repair Tools • Laser Repair • Focused Ion Beam (FIB) Repair • E-beam Repair 2 June 2003 Wire The “nano” region

Quantum Dot Transistors Issues: • Primary designs require extremely low temperatures • Possible room-temperature designs would require 10 nm features • Material fabrication is not on silicon Potential Solutions: • New material solutions • Improved III-V compound semiconductors Benefits: • Reduce number of transistors per circuit function • New opportunities for innovative designs • Enhanced security Gated quantum wire in Ga. As/Al. Ga. As heterostructure 2 DEG. Prof. Gregory Spencer – Texas State University

Novel Memory Issues: • Existing memory density • Spacings below 20 nm • Interconnections • Failure mechanisms • Power requirements Potential Solutions: • Nanowire applications • Innovative lithography below 32 nm • Self-assembly of interconnects • Self-assembly of memory units • Molecular storage Picture courtesy of M. Meyyappan Benefits: • Increased density of storage • Dense solid state memory • Improved switching times • Faster computing with greater memory access

Molecular Electronics Konstantin Likharev, The Industrial Physicist, June/July 2003, p. 20

Changed Material Properties Melting point of Gold Potential Solutions: • Quantify and classify the material properties in the range between bulk material properties and quantum phenomena • Establish an effort to develop a database of material properties with contributions from researchers Issues: • Material properties change as the size of the material becomes smaller • Majority of changes start to occur between 20 nm and 10 nm • Some material properties are known, many are not Benefits: • Improve the time to develop nano based devices, due to eliminating the duplication of research efforts • Creation of new products based on applying novel nano properties Example: Creating gold conductors on material that melts below 500 o. C and produces enhanced flexible devices

Nanowires Issues: • Research applications with dimensions below 20 nm • Manufacturing processes rely on fabrication in “forms” • Large scale, ordered fabrication is not available Potential Solutions • Development of new processes based on ongoing research • Additional efforts in related materials • Improved processes/equipment Benefits: • Unique electrical and optical properties • Building units for devices • Wire diameter change results in band gap changes, which implies customizable effects Ray Solanki, Oregon Science and Health University, Feb. 23, 2004 issue Applied Physics Letter

Carbon Nano Tubes (CNT) Issues: • Production of Single Walled CNTs yield a mixture of types (dimensions to less than 1 nm) • Metallic • Semiconductive • Separation of types is time consuming Benefits: • Novel electronic devices • High temperature applications • Improved microscopy Potential Solutions • Continue development efforts

Solar Cells (Organic) Issues: • Efficiencies • Material development • Manufacturing processes Potential Solutions • Development of organic plastics with improved efficiency • Development of adsorptive dyes • Flexible conductors • Enhanced property covering material Benefits: • Low cost energy • Inexpensive to manufacture yielding to wide spread applications Credit: Nicole Cappello and the Georgia Institute of Technology

New Material Properties Issues: • Unanticipated properties are being found in nano materials – Example: • • Potential Solutions: • Quantify and classify the material properties in the range between bulk material properties and quantum phenomena • Establish a program to employ theoretical projections to verify experimental data Thirteen atoms of Silver have been shown theoretically to be magnetic Thirteen atoms of Platinum have been experimentally shown to be magnetic Benefits: • Improve the time to develop nano based devices, due to eliminating the duplication of research efforts • Creation of new products based on applying novel nano properties Example: The creation of new memory devices that are 100 x more dense than current technology Silver properties reported May 30, 2006 in Nano. Tech. Web Platinum experiments reported by University of Stuttgart

Metrology Au dot structure & Nanowire Twinning Potential Solutions: • New solutions for metrology • Enhancements to equipment • New technologies Aberration Corrected HR-TEM Korgel Group Si Nanowire Issues: • Imaging realm is at limits of resolution, in the 1 nm range • Time per image is long >one hour • Effective imaging applications require multiple images in minutes or less Benefits: • Improved resolution of material properties • Capability to employ in manufacturing processes • If one can not measure something, it can not be manufactured

Metrology Aberration Corrected TEM Imaging Corrected Not corrected K & I in nanotube Potential Solutions • Development and execution of validation plan • Improved algorithms • Improved equipment for rapid imaging Sloan, et al. , MRS Bulletin, April 2004 Issues: • Imaging is slow and computations are time consuming • Unique structures can not be verified • No validation results • Dimensions extend to below 1 nm Benefits: • Improved understanding of materials • Ability to identify unique nano structures • Ability to create and verify novel materials

Photonics Issues: • Many developmental applications, no outstanding “hit” in the public’s awareness • Much solid, but diverse research without significant cross discipline fertilization Potential Solutions • Continue/expand the research efforts, especially in health and energy • Encourage development of technology to support national priorities S. R. J. Brueck, University of New Mexico Benefits: • Numerous application with substantially enhanced performance in health and military applications • Sensor technology connected to electronics will provide improved diagnostic capability

Optical Transmission on a Chip Issues: • Devices are in early prototype stages • Testing and evaluation of devices to ensure reliability • Integration with existing circuitry Potential Solutions • Commercialization development • High performance applications employing alternative materials • Integration into wide spread use based on reduced costs Intel picture – April 2004 in Device. Force. com Benefits: • High speed data communications • Built in Self Test • Projected 20 Gps transfer rates

Why Employ Photonics? • • • Signals travel at the speed of light Photons, unlike electrons have no weight and create no resistance. Focused light generated by lasers constitutes the highest concentration of energy known on earth A pulse of photons can be as short as one-millionth of a billionth of a second, the dimension of time in which molecular and atomic reactions take place Light beams are well-suited not only to help us see, but also to hold and manipulate atoms As light acts virtually contact-free; it can be used as a tool even under extreme conditions. Consolidated European Photonics Research Initiative Photonics for the 21 st Century

Photonics – European Projections Estimation for 2003: Prediction for 2010: Focus on: • Information storage • Bandwidth increases • Energy saving applications • Optical applications in health Cell Evaluation • 500, 000 jobs in the EU • € 60 billon worth of products • 15, 000 patents • 1. 5 million jobs in the EU • € 250 billion worth of products • 45, 000 patents Consolidated European Photonics Research Initiative Photonics for the 21 st Century

Early Entry is Required • Being late means losing leading edge capabilities • Catching up requires investing in the old technology and the new technology simultaneously – Requires very deep governmental funding – Requires trained workforce. • Being “leading edge” means always being in the race to improve both people and equipment • Significant benefits come to the early successful entries • High value jobs are part of the reward of being successful in developing the emerging technology

Development Interdependency The U. S. must possess every element of the “nano” manufacturing infrastructure Semiconductor Failure Example: 248 nm Exposure Tool – Ready for production in 1991 – Only reached production in 1995 • Why was there a 4 year delay? – Resists were not production worthy – Resulting in insufficient experience – Resulting in lack of willingness to take risks To be successful with technology introduction, the complete infrastructure must be ready at the beginning 2 June 2003 Presentation : Business and Economics of Nano

Research Challenges Nano technology brings on new challenges • Existing tools for investigations at the atomic level are expensive to acquire and maintain • New research tools need to be developed to explore the nano realm • Specialized facilities are required to maintain the cleanliness need for nano technology • A new infrastructure might be required for the equipment yet-to-be-developed

Education Challenges Nano technology requires education and training in multiple fields for successful collaboration • Combinations of chemistry, physics, engineering, biology, computer science, and many related disciplines are needed to fully understand the development of nano technology • The development of the nano technology industry will require well educated technicians • Scientific education needs to begin early in the learning process

Summary • There are many opportunities to incorporate nano technologies into innovative products • Fundamental research is required to understand the potential applications of the properties of nano materials • Future high tech products will incorporate the advantages of nano-materials • From the national interests, it is important for researchers to continue to push the understanding of nano technology

Conclusions • The U. S. has the technical capability and is evolving nano-technology into a business environment • Building from S/C 1 provides ability to coordinate industry, university, and infrastructure roles in developing “nano” in more than electronics • Tools and facilities for nano are expensive • Nano-technology requires being on the leading edge of developments including equipment • Infrastructure development must be sustained • Continual evaluation of “weak” links is required 1 S/C = semiconductor

n. Texas State University-San Marcos is a premier, studentcentered public university offering baccalaureate, masters and doctoral degrees to students on a traditional residential campus. n. Founded: 1899 as SWT State Normal School n. President: Dr. Denise M. Trauth n. Campus area: 427 acres in main campus (including 4, 322 acres of farm, ranch & recreational areas) ABOUT TEXAS STATE 110 Undergraduate majors (7 academic colleges) 84 Masters programs 6 Ph. D programs EE Program (Fall ’ 07) MSE Ph. D. Program (‘ 09) • • • Total student enrollment (27, 503) Undergraduate (23, 022) Hispanic/ Latino (5, 025) (21%) 1110 Faculty 93% teach on the undergraduate level. http: //www. txstate. edu Fall 2007

NANOMATERIALS APPLICATION CENTER MISSION: The NANOMATERIALS APPLICATION CENTER at Texas State University-San Marcos coordinates, facilitates, disseminates information, and expedites nanoscience and nanoengineering developments to expedite the commercialization of innovation. GOAL: Accelerate the development of high technology and the dissemination of these developments in order to expedite commercialization.

NANO-SAFETY The NANOMATERIALS APPLICATION CENTER is addressing four key areas for developing a NANOSAFETY collaborative effort that identifies the nanomaterial properties, the effect on humans and the environment, the means of handling the materials correctly, and the procedures that must be in place to minimize risk in applications. Discussions have been initiated with numerous organizations in order to address this critical issue.

Contact Information Walt Trybula, Ph. D. IEEE Fellow & SPIE Fellow w. trybula@ieee. org Director Nanomaterials Application Center Texas State University-San Marcos w. trybula@txstate. edu +1. 512. 245. 6062 Director The Trybula Foundation, Inc. w. trybula@tryb. org +1. 512. 695. 4026