Common PQ Issues and Solutions Mark Stephens PE

EPRI Semiconductor PQ Experience Semiconductor Plant PQ Audits 1. 2. 3. 4. 5. 6.

Importance of Power Quality • What happens to this Ion Implanter process when a

Interrelated Processes NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute,

Outage or Sag ? NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power

Typical Recloser Schemes NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research

Targeting by Cause Three Phases 13% Two Phases 19% One Phase 68% Source: EPRI

NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All

Is it the Plant Equipment’s Fault? 4 Year Data Example Fed from Dedicated Distribution

Important Realization • Utilities Share Responsibility – Tree Trimming, Lighting Arrestors, Grounding, Maintenance, Provide

Protecting Processes Against Voltage Sags

Protecting Equipment Against Voltage Sags Installed Process Equipment • The goal of improving installed

Protecting Equipment Against Voltage Sags Installed Process Equipment Economics Drive the Approach NYSDPS Power

Protecting Equipment Against Voltage Sags Installed Process Equipment • Facility-level Solutions are targeted at

Protecting Equipment Against Voltage Sags Installed Process Equipment • Panel-level Solutions are targeted at

Protecting Equipment Against Voltage Sags Installed Process Equipment • Machine-level Solutions are targeted at

Protecting Equipment Against Voltage Sags Installed Process Equipment • Control-level solutions are targeted at

Generalized Example: Control Level to Equipment/Machine Level Cost vs. Coverage + + NYSDPS Power

Techniques to Improve Voltage Sag Tolerance of Process Equipment New Equipment in Design Phase

Specify Voltage Sag Standards in Purchase Specs ( such as SEMI F 47) NYSDPS

Design with DC Power • Utilize SEMI F 47 compliant DC Power Supplies. •

DC Powered Emergency Off Circuit Design with DC Power • One of the best

Use Sag-Tolerant Components • Require that all electrical components and subsystems meet SEMI F

Ride-Through Adjustments on AC Drives • Depending on the setting of the drive’s undervoltage

Reported Approaches for Semiconductor Plant Voltage Sag Mitigation Strategies • Facility Wide – Centralized

Summary • It’s a team effort to solve these problems, the utility, industrial/commercial, and

For More Information Contact Mark Stephens, PE, CEM, CP En. MS EPRI | Senior

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Common PQ Issues and Solutions Mark Stephens, PE, CEM, CP En. MS Senior Project Manager Industrial PQ and Energy Efficiency Electric Power Research Institute Phone 865. 218. 8022 mstephens@epri. com

EPRI Semiconductor PQ Experience Semiconductor Plant PQ Audits 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16. 17. 18. 19. 20. 21. 22. 23. 24. 25. Albany Nanotech, Albany, NY Asahi Kasei Microsystems, Japan AUO, Hsinchu, Taiwan Chartered Semiconductor, Singapore Chi. Mei Optoelectronics Corp, Tainan, Taiwan Confidential Semiconductor Site, Chandler, AZ Confidential Semiconductor Site, Philippines HP, Singapore IBM, Burlington, VT IBM, East Fishkill, NY International Rectifier, Temecula Kyocera, Kagoshima, Japan Lucent Technologies, Allen Town, PA LSI Logic, Colorado Freescale/Motorola, Ed Bluestien, Austin, TX Freescale/Motorola, Oak Hill , Austin, TX Motorola, Irvine, CA Motorola, Mesa, AZ Philips Semiconductor, San Antonio Qimonda, Sandston, VA Sony Semiconductor, San Antonio, TX SSMC, Singapore ST Microelectronics, San Diego ST Microelectronics, Singapore Winbond Semiconductor Plant, Hsinchu, Taiwan OEMs (SEMI F 47 Testing) 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16. 17. 18. 19. 20. 21. 22. 23. 24. 25. 26. ABB Robotics Accent Optical Advanced Energy Alcatel Rockwell Automation Applied Materials ASML Axcelis Carrier CFM Technologies CTI Densei-Lambda Durr Automation ESI Fanuc Robotics FSI International Ibis Johnson Controls, York, PA KLA-Tencor Kuka Robotics Lambda EMI Mattson Technologies Mc. Quay International Meiden Power Solutions NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 2 OEMs (SEMI F 47 Testing) 27. Mitsubishi 28. Novellus 29. Phoenix Contact 30. Powertron 31. PULS Power 32. Reliability, Inc. 33. Rudolph Technologies 34. Schlumberger 35 Schneider Electric 35. SCP Global Technologies 36. SEMATECH 37. Semitool 38. Siemens 39. SVG Lithography 40. SVG Thermco 41 Tokyo Electron Austin (TEA) 42. Tokyo Electron Kyushu (TKL) 43. Tokyo Electron Massachusetts (TEM) 44. Trane 45. Varian Semiconductor Equipment Associates, Inc. 46. York

Importance of Power Quality • What happens to this Ion Implanter process when a power quality problem occurs? • Who is to blame? • How do we work together to fix the problems? NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 3

Targeting by Cause Three Phases 13% Two Phases 19% One Phase 68% Source: EPRI Distribution Power Quality Study NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 7

Is it the Plant Equipment’s Fault? 4 Year Data Example Fed from Dedicated Distribution Network 5 Year Data Example Fed from Dedicated Substation From Transmission Network NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 9

Important Realization • Utilities Share Responsibility – Tree Trimming, Lighting Arrestors, Grounding, Maintenance, Provide PQ information to industrials, etc – Understand PQ Environment of Grid • Industrials Share Responsibility – Understanding Equipment Vulnerability, PQ Specifications, Power Conditioning, Proper Wiring/Grounding, etc – Understand PQ Environment at Site • Most effective solutions are reached when both sides work together to see what can be done NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 10

Protecting Processes Against Voltage Sags

Protecting Equipment Against Voltage Sags Installed Process Equipment • The goal of improving installed process equipment is to improve the overall voltage sag tolerance of the machine • Four common approaches have been proven to to be effective at protecting installed process equipment • Facility Level • Panel Level • Equipment/Machine Level • Control Level NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 12

Protecting Equipment Against Voltage Sags Installed Process Equipment Economics Drive the Approach NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 13

Protecting Equipment Against Voltage Sags Installed Process Equipment • Facility-level Solutions are targeted at protecting an entire facility and can be very costly ($500 k - $$M+) Dynamic Voltage Restorer Large Flywheel Large UPS NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 14

Protecting Equipment Against Voltage Sags Installed Process Equipment • Panel-level Solutions are targeted at protecting loads fed from a common circuit (Panel or Branch) $100 k - $500+ NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 15

Protecting Equipment Against Voltage Sags Installed Process Equipment • Machine-level Solutions are targeted at protecting one machine ($20 k - $200 k) NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 16

Protecting Equipment Against Voltage Sags Installed Process Equipment • Control-level solutions are targeted at protecting only the most sensitive components, most cost effective solution ($100 - $5, 000) NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 17

Generalized Example: Control Level to Equipment/Machine Level Cost vs. Coverage + + NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 18

Embedding the Solution

Techniques to Improve Voltage Sag Tolerance of Process Equipment New Equipment in Design Phase • Specify Compliance to PQ Standards (such as SEMI F 47) • Design with DC Power • Use Sag-Tolerant Components • Select Appropriate Trip Curves for Circuit Breakers Existing Equipment • Provide Conditioned Power for AC Control Circuits • Provide Backup Power for DC Buses Either Existing or New Equipment • Apply Custom Programming Techniques • Drive Configuration Settings NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 20

Design with DC Power • Utilize SEMI F 47 compliant DC Power Supplies. • Whereas control power transformers (CPTs) and AC components do not have inherent energy storage to help them ride through voltage sags. NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 22

DC Powered Emergency Off Circuit Design with DC Power • One of the best methods of increasing the tolerance of control circuits is to use direct current (DC) instead of alternating current (AC) to power control circuits, controllers, input/output devices (I/O), and sensors. • DC power supplies have a “built-in” tolerance to voltage sags due to their ripple-correction capacitors, whereas control power transformers (CPTs) and AC components do not have inherent energy storage to help them ride through voltage sags • Many OEMs are moving in this direction to harden their equipment designs NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 23 DC Powered PLC Circuit

Use Sag-Tolerant Components • Require that all electrical components and subsystems meet SEMI F 47 or other recognized voltage-sag standards NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 24

Ride-Through Adjustments on AC Drives • Depending on the setting of the drive’s undervoltage trip point and the severity of the sag, the drive may trip after the DC bus decreases below the undervoltage trip point. • Sometimes, the voltage-sag tolerance of drives can be increased through parameter settings, including restart options • Example AC Drive Parameters that could improve ride-through are; • Automatic Reset and Restart Functions • Motor- Load Control Functions (Flying Restart) • Phase-Loss and DC Bus Undervoltage Functions • Acceleration / Deceleration / Current / Torque - Limits NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 25

Reported Approaches for Semiconductor Plant Voltage Sag Mitigation Strategies • Facility Wide – Centralized UPS for critical loads in the fab. • Distributed Approach - mitigate voltage sags on a tool-by-tool basis. Local UPS ranging from of 30 to 80 k. VA. • Control Level Approach - This approach requires that the OEM/fab conditions the sensitive circuits that need power conditioning within each tool or subsystem. • No Organized Approach – No plan. • Partnership with Utility - key to making iterative improvements. REF: Impact of SEMI F 47 on Utilities and Their Customers, EPRI, Palo Alto, CA: 2004. 1002284. NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 26

Summary • It’s a team effort to solve these problems, the utility, industrial/commercial, and sometimes consultants need to come together. • Understanding why your equipment is vulnerable is paramount. You can’t fix a problem without understanding the true cause. • Moving forward (sometimes with some simple modifications) you can make production systems more robust. • Don’t forget including PQ standards in your purchase specs. • Don’t assume battery based systems are required. NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 27

For More Information Contact Mark Stephens, PE, CEM, CP En. MS EPRI | Senior Project Manager Industrial PQ & Energy Efficiency 942 Corridor Park Blvd, Knoxville, TN 37932 Desk: 865 -218 -8022 Mobile: 865 -773 -3631 www. epri. com http: //f 47 testing. epri. com http: //mypq. epri. com NYSDPS Power Quality Technical Conference 12/12/2013 © 2013 Electric Power Research Institute, Inc. All rights reserved. 28 mstephens@epri. com