Carbon Atomic Bond Structure What is DLC Amorphous

Carbon Atomic Bond Structure

What is DLC ? • Amorphous Solid Carbon Film • Mixture of sp 1, sp 2 and sp 3 Hybridized Bonds • High Content of Hydrogen (20 -60%) • Synonyms – – Diamond-like Carbon (Hydrogenated) amorphous carbon (a-C: H) i-Carbon Tetrahedral Amorphous Carbon

sp 3 TAC: H TAC DAC PAC GAC sp 2 No film H

a-C: H ta-C

Properties of Solid Carbon Property Diamond DLC Graphite Density (g/cm 3) 3. 51 1. 8 – 3. 6 2. 26 Atomic Number Density (Mole/cm 3) 0. 3 0. 2 – 0. 3 0. 2 Hardness (Kgf/mm 2) 7000 - 10000 2000 - 8000 <500 Friction Coeff. 0. 05 0. 03 – 0. 2 Refractive Index 2. 42 1. 8 – 2. 6 2. 15 – 1. 8 Transparency UV-VIS-IR Opaque Resistivity (Wcm) >1016 1010 - 1013 0. 2 – 0. 4

Structure and Mechanical Properties • Hardness – 3 -D interlink of the atomic bond network • Residual Stress – Distortion of bond angle and length 2 -D Analogy of the Structure • Both are dependent on the degree of 3 -D interlinks.

Electronic Structure p state has strong tendency of clustering. • Two phase model was suggested p bonded clusters : Electric properties sp 3 Interlinks : Mechanical properties • • Electronic structure depends mainly on p states, because the states are located near Fermi level. • Eg (optical gap) depends on the degree of clustering of the p state.

Electrical Properties • Conduction Mechanism – Discontinuous hopping between localized states distributed in the mobility gap either near a conduction band edge or near Fermi energy. (Hopping Mechanism) – Mixture of Crystalline and Amorphous Phases – Mixture in Conduction Mechanism

Structure and Electrical Properties • Graphitic bonds localized conduction state • Overlap of the localized state metallic conduction • Higher hydrogen higher resistivity – By reducing dangling bond, i. e. localized conduction state

Historical Survey • 1972 – Aisenberg and Chabot : Arc Ion Beam • 1979 – Holland Ohja : PACVD • 1984 – Mori and Namba : Ion Plating • 1986 – Savvides : Sputtering • 1992 – Collins et al : Laser Ablation – Filtered Vacuum Arc

Deposition Methods 1000 Energy Cold Substrate Impact Energy (e. V) Ion Source 100 Dense Carbon Polymer Like Carbon 10 1 Dense Hydro. Carbon Amorphous Carbon (sp 2) Carbon Source Plasma Polymers Hydrocarbon Source

Energy Dependence of DLC

Ion Energy Distribution PACVD

Examples of Deposition Methods

Examples of Deposition Methods

합성방법의 특징 합성 방법 특징 PECVD High Productivity, Very Smooth Film Low Hardness & Thermal Stability Non Uniform in Complicated Shape Sputtering : ion beam Process Compatibility for HDD Low Adhesion, Poor Film Quality Ion Beam Deposition Medium Hardness, Medium Productivity Uniform Coating for Complicated Shape High Residual Stress, Poor Adhesion Complicated Deposition System Laser Ablation High Adhesion & Hardness Low Productivity FVA (Filtered Vacuum Arc) High Hardness & Thermal Stability High Residual Stress, Poor Adhesion (DC, HF, RF, ECR, pulsed DC)

Properties of Solid Carbon Property Diamond DLC Graphite Density (g/cm 3) 3. 51 1. 8 – 3. 6 2. 26 Atomic Number Density (Mole/cm 3) 0. 3 0. 2 – 0. 3 0. 2 Hardness (Kgf/mm 2) 7000 - 10000 2000 - 8000 <500 Friction Coeff. 0. 05 0. 03 – 0. 2 Refractive Index 2. 42 1. 8 – 2. 6 2. 15 – 1. 8 Transparency UV-VIS-IR Opaque Resistivity (Wcm) >1016 1010 - 1013 0. 2 – 0. 4

Advantages of DLC Films • Low Deposition Temperature (R. T. – 200 o. C) – No limitation of Substrate Materials • Smooth Surface – Roughness : few nm • Wide Range of Physical Properties – Tunability of the Properties • Uniform Large Area Deposition – High Productivity and Low Cost

AFM Image of DLC coated Si

Advantages of DLC Films • Low Deposition Temperature (R. T. – 200 o. C) – No limitation of Substrate Materials • Smooth Surface – Roughness : few nm • Wide Range of Physical Properties – Tunability of the Properties • Uniform Large Area Deposition – High Productivity and Low Cost

Properties of Solid Carbon Property Diamond DLC Graphite Density (g/cm 3) 3. 51 1. 8 – 3. 6 2. 26 Atomic Number Density (Mole/cm 3) 0. 3 0. 2 – 0. 3 0. 2 Hardness (Kgf/mm 2) 7000 - 10000 2000 - 8000 <500 Friction Coeff. 0. 05 0. 03 – 0. 2 Refractive Index 2. 42 1. 8 – 2. 6 2. 15 – 1. 8 Transparency UV-VIS-IR Opaque Resistivity (Wcm) >1016 1010 - 1013 0. 2 – 0. 4

IR Transmittance of DLC Coated Ge Windows

Advantages of DLC Films • Low Deposition Temperature (R. T. – 200 o. C) – No limitation of Substrate Materials • Smooth Surface – Roughness : few nm • Wide Range of Physical Properties – Tunability of the Properties • Uniform Large Area Deposition – High Productivity and Low Cost

Courtesy of J&L Tech. Ltd

Problems of DLC Films • Thermal Instability – Degradation at High Temperature (400 – 600 o. C) • High Residual Compressive Stress – Max. 10 GPa • Poor Adhesion – Stable Chemical Bonds – Especially on Ferrous Materials

Structure and Mechanical Properties • Hardness – 3 -D interlink of the atomic bond network • Residual Stress – Distortion of bond angle and length 2 -D Analogy of the Structure • Both are dependent on the degree of 3 -D interlinks.

Self Delamination Failure during Tribotest

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

Video Cassette Recorder

DLC 코팅 VTR 헤드 드럼 Courtesy of Daewoo Electronics Co.

DLC Coated Digital VCR Tape

HDD용 Hard Disk

DLC coated Head Slider

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

Schematic of Diesel Engine

Results of Wear Test under Dry Lubrication Conditions

Result of Dynamo Test (900 h) Hard Cr Coated Ring DLC coated Ring Before Test After test

Hard Cr Coated Piston Ring DLC/Cr Coated Piston Ring 6. 5 mm 100 mm Before Test 5. 3 mm After Test

Sliding Tools for Electron Gun • Grids (2) manipulate the electron beam. • Sliding Tools is used to make spacing between the grids (Tolerance is about 4 mm) • Smooth grid surface and parallel positioning are important.

DLC Coated Sliding Tools • • Low friction Long life time Electrical insulation No corrosion on the shelves Courtesy of J&L Tech. Co. , Ltd.

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

IC Packaging

IC Packaging Process (DIP, SOP, QFP, LCC)

DLC Coated EMC Molding Cavity • High Wear Resistance • Low Friction • Surface Stability

DLC Coated Forming Dies • High Wear Resistance • Low Friction • Separability from Solder

DLC Coated Chip Carrying Tools • High Wear Resistance • Surface Stability

DLC Coated CD-R Pressing Die Courtesy of J&L Tech. Co. , Ltd.

CD Surface Formed by Using Uncoated Mold RMS roughness = 1. 31 nm

CD surface formed by using DLC coated mold RMS roughness = 0. 95 nm

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

Biological Application of DLC Coating for Wear Resistance

DLC Coated Stents

Schematic of Wear Tester Load Test disk Ruby Ball Load : High &Low Surroundings : Wet Condition Saline Dry Condition

Wear Volume DLC on Ti-Alloy 0. 026 mm 3 0. 021 mm 3 Condition : High Load 0. 002 mm 3 Dry Wet Dry 0. 002 mm 3 Wet 3000 cycle

Life Time of DLC Coatings Fracture Cycle 92250 cyc DLC on Ti-Alloy Condition : High Load 10250 cyc 6750 cyc 3172 cyc Dry Wet

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

IR Windows for Missile and Night Vision System

IR Transmittance of DLC Coated Ge Windows

Sand Blast Type Erosion Rig J. E. Field, Carvendish Lab. Cambridge University

Solid Particle Impact Erosion

Damage Pattern of Multilayer Coated Ge windows 1000 nm DLC 690 nm a-Si 200 sec 1900 nm DLC 510 nm a-Si Ge Multilayer Structure 600 sec

DLC 필름의 특성과 응용 구 분 특 성 High hardness 2, 000 - 8, 000 Hv (cf. Diamond 10, 000 Hv) Low friction and high wear resist. 마찰계수 0. 05 - 0. 2 (cf. Stainless Steel : 0. 6 - 0. 7) Chemical Inertness Optical Transmittance 산 또는 알카리와 반응치 않는다 특히 적외선 영역의 높은 광투과도 응 용 비철금속 가공용 공구, 정밀금형의 표면경화코팅 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING IR WINDOW, SCANNER WINDOW의 표면보호 코팅

Application to MEMS

DLC Coated Si Tip Array Sharpened Si Tip Array by Ar Plasma Treatment DLC Coated Si Tip Array By RF PACVD

Conclusions • Quite Matured Technology with Global Competency. • Application Technology Issues are still remained. – Improved adhesion to various substrate – Residual stress control – Design of new film structure and composition • Future Application by an Advanced Coating Technology – Bio-materials – MEMS Devices : Anti-stiction – Nano-Probe and Memory Devices