Bulk Micromachining of Silicon for MEMS Mustafa G
Bulk Micromachining of Silicon for MEMS Mustafa G. Guvench, Ph. D. University of Southern Maine
Single Crystal Silicon for MEMS
Mechanical Material SILICON? Stiff => Thinning is required for appreciable strain
Single Crystal Silicon for MEMS
Single Crystal Silicon for MEMS
Structure of Single Crystal Silicon
Miller Indices for Single Crystal Silicon
Miller Indices for Single Crystal Silicon SCS has anisotropic properties: Electrical, Thermal, Mechanical, Chemical
ETCHING for BULK MICROMACHINING (Isotropic/Anisotropic)
ETCHING for BULK MICROMACHINING (Isotropic/Anisotropic)
ETCHING for BULK MICROMACHINING (Cavity/Cantilever Anisotropic)
DRY (Plasma) ETCHING
Deep Reactive Ion Etch (DRIE)
Single Crystal Silicon for MEMS
Single Crystal Silicon for MEMS
Single Crystal Silicon for MEMS
What is MICRO-MACHINING?
h. What can Micromachined Parts/Systems do for us? Be a Conduit to Microscopic Domain: 1. 2. 3. 4. Sensing (Information) Information Processing Communication Manipulation (Actuation and Control)
Why / Why not SILICON? Semiconductor: Active Devices + Sensors (Photo-Magneto-Strain Sensing) Insulator: Si. O 2 , Si 3 N 4 , Glass Thin Film Conductor: Aluminum, Gold, Silicides Photo. Lithography: Planar control (+ & -)
Mechanical Material SILICON? Stiff => Thinning is required for appreciable strain
Micromachining of SILICON? Additive Processes: Chemical and Physical Deposition (Thin Layers only) (Single/Poly) Removal Processes: Chemical and Physical Etching (Wet/Dry/Plasma/Inert/Reactive) (Bulk/Film) (Anisotropic/Isotropic) MICROMACHINING of SILICON => (a) BULK (substrate) (b) SURFACE (films)
BULK MICROMACHINING (Etchants: Isotropic/Anisotropic)
BULK MICROMACHINED (Silicon Capillary for Insulin Infuser)
BULK MICROMACHINED (Silicon Capillary for Insulin Infuser)
BULK MICROMACHINED (Silicon Capillary for Insulin Infuser)
BULK MICROMACHINED (Silicon Mask for Cylindrical Micromotion Sensor)
BULK MICROMACHINED (Series Connected Photovoltaic Converter Battery)
BULK MICROMACHINED (Series Connected Photovoltaic Converter Battery)
BULK MICROMACHINED (Series Connected Photovoltaic Converter Battery)
MOTION? HANDLING? ASSEMBLY? COUPLING? =>
Micro Electro Mechanical Sytems
M (CMOS-IC Technology) + E (CMOS-IC Technology) + M (Silicon and Sacrificial Layers) O (Aluminum) + S (IC Packaging Technology)
Three-Layer Poly-Silicon Surface Micromachining Process (to build Mechanical Parts on CMOS IC) Final cross sectional view with 7 layers
Three-Layer Poly-Silicon Surface Micromachining Process
Surface Micromachined
Micromachining of Projection Camera
M. G. Guvench M (CMOS-IC Technology) + E (CMOS-IC Technology) + M (Silicon and Sacrificial Layers) O (Aluminum) + S (IC Packaging Technology) +
Surface Micromachined Silicon Sensors M. G. Guvench
Surface Micromachined Silicon Sensors M. G. Guvench
Electrostatic Field Sensors M. G. Guvench
Electrostatic Field Sensors M. G. Guvench
Electrostatic Field Sensors M. G. Guvench
Mass (Absorption/Deposition) Sensor M. G. Guvench
Mass (Absorption/Deposition) Sensor M. G. Guvench
Mass (Absorption/Deposition) Sensor M. G. Guvench
Electrostatic Field Sensors M. G. Guvench
Flow Skin Friction Sensors M. G. Guvench
Flow Skin Friction Sensors M. G. Guvench
CMOS Analog Chip Design (Operational Amplifier) M. G. Guvench
Micro. Fab Laboratory
Programmable Diffusion/Oxidation System’s Controller in The Micro. Fab Laboratory
Double-Diffused P+NN+ Junction Photo. Diode Made Being Tested in The Micro. Fabrication Lab.
Micro. Fab Laboratory
Surface Micromachined Silicon Sensors M. G. Guvench
3 -Poly Surface Micromachining Processed Sensors Cross Section
MEMS Switch
MEMS Micromotor
A Mass (Absorption/Deposition) Sensor M. G. Guvench
- Slides: 66