Berkeley Sensor Actuator Center The National Science Foundation

Berkeley Sensor & Actuator Center: The National Science Foundation Industry/University Cooperative Research Center on MEMS “BSAC conducts industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, and processes, and systems that take advantage of progress from integrated circuit, networking, bio, and polymer technologies”

25 Years National Science Association Affiliation 30 -40 Partner Organizations Five @ 20+ Years 160 Researchers 122 Projects 13 Faculty Co. Directors 13 Affiliate Faculty 7 Engineering Departments Three Campuses of UC System Berkeley Sensor & Actuator Center Statistics

BSAC Member Organizations

BSAC-Inspired Microtechnology/MEMS Startups circa 2011 From http: //www-bsac. eecs. berkeley. edu/startups/

BSAC Membership Summary Annual Membership Fee $50 K Semiannual 3 -Day Research Reviews (+ Regional in Japan/Europe) Business/technology relationships with other industrial members. Patent license advantages Special Programs Available for Members • Leveraged Research: 20% of funding, 100% visibility • Prepublication Review • 500+ page proceedings each meeting • Secure Web Access to all Materials & Patents • Meet regularly w/Industry Colleagues • 90 Day option for most BSAC Inventions. • (Licenses negotiated directly with University) • BSAC generates 12% of Berkeley Disclosures • Use of Berkeley Micro. Lab at a Discount • Visiting Industrial Fellows (Embedded Researchers) • Sponsored (Contracted) BSAC Research Projects • Graduate Recruiting & Internship

BSAC Research Areas Organized by Technologies & Applications

© 2012 University of California Berkeley Sensor & Actuator Center

© 2012 University of California Berkeley Sensor & Actuator Center

© 2012 University of California Berkeley Sensor & Actuator Center

© 2012 University of California Berkeley Sensor & Actuator Center

SAMPLE PROJECTS MATERIALS DEVICES SYSTEMS

Gabriele Vigevani Advisor Prof. Albert P. Pisano Al. N Piezo: MEMS Aluminum Nitride Technology for Inertial Sensors (MANTIS) BPN 481 © 2012 University of California Berkeley Sensor & Actuator Center

Yang Lin, Tommi Riekkinen Advisor: Prof. Nguyen A Micromechanical Power Converter BPN 433 © 2012 University of California Berkeley Sensor & Actuator Center

Mehmet Akgul Advisor: Prof. Nguyen Micromechanical RF Channelizer BPN 434 © 2012 University of California Berkeley Sensor & Actuator Center

Ernest Ting-Ta Yen Advisor: Prof. Pisano HEa. TS: Al. N Narrowband RF Filter BPN 369 Gap Al. N Gap © 2012 University of California Berkeley Sensor & Actuator Center

Yingqi Jiang Advisor Liwei Lin MEMS Supercapacitor BPN 362 Electrolyte: 1 -Butyl-3 -methylimidazolium tetrafluoro-borate ([BMIM][BF 4]) ionic liquid Future Prospects © 2012 University of California Berkeley Sensor & Actuator Center

© 2012 University of California Berkeley Sensor & Actuator Center

Igor Paprotny Advisor: Prof. Richard White Mobile Airborne Particulate Matter Monitor for Cellular Deployment BPN 392 © 2012 University of California Berkeley Sensor & Actuator Center

Michell Kline Advisors: Profs. Boser, Sanders Power Transfer Over a Capacitive Interface BPN 555 © 2012 University of California Berkeley Sensor & Actuator Center

Steven Lanzisera Advisor Prof. Kris Pister Location Estimation Using RF Time of Flight KSJP 28 © 2012 University of California Berkeley Sensor & Actuator Center

Thomas Watteyne Advisor: Prof. Kris Pister Open. WSN: Open-Source Standards. Based Protocol Stacks for Wireless Sensor Networks BPN 477 © 2012 University of California Berkeley Sensor & Actuator Center