AZ AQUATARVIII SERIES PCN Process change notification Merck

AZ AQUATAR-VIII SERIES PCN (Process change notification) Merck Performance Materials Ltd. Shizuoka Site, Quality Assuarce July, 2018 Confidential

AZ AQUATAR-VIII series / Process Change Notification Summary for the change 1. Applicable products • AZ AQUATAR-VIII-A 25 / 30 / 45 • AZ AQUATAR-8 B 30 2. Detail of change • Raw material (Additive-1) supplier change >Current: Supplier-A >After change: Supplier-B 3. Reason of change • Current Supplier-A have stopped production of Additive-1 due to business situation (lower demand for other customer / products). • So Merck have internally evaluated and qualified alternative supplier (Supplier-B). • Please refer next pages for evaluation results by Merck. 4. Timing of change 2 • After customer approval Confidential

AZ AQUATAR-VIII series / Process Change Notification Test retuls of. Additive-1 ü Additive-1 of Supplier-B is the same purity and metal level as current Supplier-A’s one. 3 Confidential

AZ AQUATAR-VIII series / Process Change Notification Test retuls of. AZ AQUATR-VIII-A 30 (Small scale for internal test) ü PCN internal trail batch using Additive-1 of Supplier-B is the same quality as current Supplier-A’s one. 4 Confidential

AZ AQUATAR-VIII series / Process Change Notification Litho test retuls of AQUATAR-VIII-A (Small 30 scale for internal test) 1: 1 1: 5 18 17 17 15 14 14 17 16 16 16 15 15 Process Conditions Substrate : 8” Si wafer BARC : AZ Kr. F-17 B(BARC), FT 80 nm, PB 180 o. C/60 s Resist : AZ DX 6270 P(Resist), FT 445 nm, PB 120 o. C/90 s, PEB 130 o. C/90 s TARC : AZ AQUATAR-VIII-A 30, FT 45 nm Illumination : Kr. F stepper, NA=0. 63, ½ Annular, Conventional mask Development: AZ 300 MIF (2. 38%) Puddle 23 o. C/60 s Target CD : 200 nm LS 1: 1/1: 5, 250 nm LS 1: 1/1: 5 Side view Eo (m. J/cm 2) 250 nm LS PCN Side view Eo (m. J/cm 2) 1: 1 Current Side view Eo (m. J/cm 2) 200 nm LS without TARC Side view Eo (m. J/cm 2) ü PCN internal trail batch using Additive-1 of Supplier-B is the same Litho performance as current Supplier-A’s one. 5 Confidential