Automation of SIMS analysis with SCAPS Naoya Sakamoto

Automation of SIMS analysis with. SCAPS Naoya Sakamoto 2002. 11. 1

Contents • Why automate • Advantage • How automate • Stage control

Why automate? Explorer D/H ratio Pre-solar grain Global Structure rim Core-Mantle� etc… SIMS + SCAPS 2 D isotope analysis Automation Manual ×Difficult operation ×Time-consuming ×Get tired Fast and Easy

Advantage • Shortening of measurement time • Save researcher a lot of labor • A view is expanded

time

Start SIMS and Preparation Choose Points Move Stage Choose isotopes Pre Sputter Move Stage Choose isotope Pre Sputter Set Isotope APS reset Beam ON Beam OFF Change? Point Isotope Data Processing End Point Change? Data Processing End Isotope

Include important information

How Automate? Stage Control Sequence Control Hybrid SCAPS Automatic Evaluation

Stage control Function ・Control the SIMS’s sample holder stage. ・Set measurement points using BSE image. Require ・Stage of SIMS and BSE image are matched. Problem ・How to match? ・Accuracy? ・Complex? Affine transform At most 10µm Yes, but you get used to…

Affine transform Translation Scaling Rotation Affine transform

Affine transform

Measurement Point Beam SIMS CCD Max expansion 70µ 10µm is accuracy sufficient for SCAPS.

Future work • Construction of automation system soon

5µm