Introduction • A sensor measure various physical parameters – – – – Motion Height, weight and volume Pressure, Tensile stress Temperature Flow Irradiation Energy ………
Semiconductor detectors Lateral photoeffect PSD L i 1 hv Xc i 2 0 P+ eh eh n-type Si substrate e h n+ Al • Low non linearity ~0. 1% • Independent of light spot focus • Simple calculation of the position Si. O 2