Annealing Temperature 6001150 Time 5300 sec Pressure 5760

標準製程 Ø Annealing Temperature: 600~1150 ℃ Time: 5~300 sec Pressure: 5~760 torr Gas: N 2、O 2 Rotate: 60~90 rpm ØOxidation Temperature: 600~1150 ℃ Time: 10~300 sec Pressure: 5~760 torr Gas: O 2 Rotation: 60~90 rpm

Annealing Step 1 Step 2 Step 3 Step 4 Step 5 Step 6 Name Press up Open Loop Stable Temp Slow Pressure(Torr) 300 500 740 480 500 700 10 30 Temperature(℃) Time(s) 100 100 120 Ramp rate 15 T/s 20 T/s 50℃/s N 2/O 2(slm) 10 10 10 Rotation(rpm) 90 90 90 Step 7 Step 8 Step 9 Step 10 Fast Ramp Medium Ramp Slow Ramp Process 60℃/s Step 11 Step 12 Ramp Down 800 60 60 30 T/s 15 T/s 850 950 1000 30 45 60 30 75℃/s 60℃/s 40℃/s 10 10 10 90 90 90

Oxidation Name Pressure(Torr) Step 1 Step 2 Step 3 Step 4 Press Down Press up Stable Temp 11 Step 5 Step 6 Slow Fast Ramp 6 Temperature(℃ ) 480 500 600 900 10 60 60 60℃/s Time(s) 100 120 Ramp rate 20 T/s 15 T/s 50℃/s O 2(slm) 5 5 5 Rotation(rpm) 90 90 90 Step 7 Step 8 Medium Ramp Slow Ramp Step 9 Process Step 10 Step 11 Step 12 Ramp Down 1000 1100 800 600 60 60 10 30 60 60 40℃/s 20℃/s 30℃/s 15℃/s 5 5 5 90 90 90

800℃ 10 s 5 Torr Before After Remain 5. 37 12. 22 6. 85 5. 45 12. 41 6. 96 5. 3 12. 33 7. 03 5. 27 12. 27 7 5. 79 12. 48 6. 69 Mean 6. 906 Uniformity 0. 013

1000℃ 10 s 5 Torr Before After Remain 5. 44 16. 24 10. 8 5. 59 16. 43 10. 84 5. 46 16. 26 10. 8 5. 54 16. 22 10. 68 5. 75 16. 55 10. 8 Mean 10. 78 Uniformity 0. 0074

1100℃ 10 s 5 Torr Before After Remain 4. 5 19. 2 14. 72 19. 44 14. 72 4. 58 19. 28 14. 7 4. 67 19. 17 14. 5 4. 87 19. 53 14. 66 Mean 14. 65 Uniformity 0. 0075