Aixtron BM ProBlack magic Key Benefits Highquality graphene
型號 廠牌：Aixtron 型號：BM Pro(原Black magic)
特點說明 ▸ Key Benefits - High-quality graphene and carbon nanotubes on wafers and foil substrates - Showerhead gas distribution for improved uniformity - Bottom and top heating technology, temperatures up to 1050 °C with ramp rate up to 300°C/min - Thermal and plasma enhanced CVD for process flexibility - Up to 10 gas channels for wide gas source selection
規格與功能 ▸ Product Features - Cold wall thermal and plasma enhanced CVD technology - Showerhead gas distribution - Automatic process control with proven recipes - Multi-user management and reporting tools - Integrated process camera - Safety system with full data logging ▸ Substrate size / configurations - Standard substrate sizes: 4 -inch, 6 -inch - Special substrate sizes: 8 -inch, 2 x 8 -inch - HT version for growth on small samples with temperatures up to 1700 °C - Extra feedthroughs, ports and infrastructure options
聯絡資訊 ▸ 業務：楊先生 ▸ M. Yang@aixtron. com ▸ 0965377218
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