Advanced Lithography Soft lithography Imprint lithography SPM lithography

Advanced Lithography • • Soft lithography Imprint lithography SPM lithography 3 D lithography

Soft Lithography Douglas B. Weibel, Willow R. Di. Luzio and George M. Whitesides Nature Reviews Microbiology 5, 209 -218 (March 2007)

Contact printing: Patterning of rounded surfaces http: //www. nanoterra. com/soft_lithography. asp Article from IBM J. Res. and Dev. http: //www. research. ibm. com/journal/rd/455/michel. html

Patterning organic single-crystal transistor arrays Alejandro L. Briseno, Stefan C. B. Mannsfeld, Mang M. Ling, Shuhong Liu, Ricky J. Tseng, Colin Reese, Mark E. Roberts, Yang, Fred Wudl and Zhenan Bao Nature 444, 913 -917(14 December 2006) www. nature. com OTS: octadecyltriethoxysilane Organic single crystals on substrates patterned by microcontact printing. The printing uses PDMS stamps with relief features that are inked with a thick OTS film and then pressed onto the substrates. Patterned single-crystal arrays of different organic semiconductor materials.

Soft Lithography Douglas B. Weibel, Willow R. Di. Luzio and George M. Whitesides Nature Reviews Microbiology 5, 209 -218 (March 2007)

Micro-Transfer Molding 3 -D structures using TM http: //www. ameslab. gov/final/News/Images/12 -layer%20 structure. jpg http: //www. sciencedaily. com/releases/2006/06/060605081758. htm

Nano-Imprint Lithography (NIL) Hot embossing ~20 nm holes Imprint of sub-25 nm vias and trenches in polymers Chou, S. Y. (Dept. of Electr. Eng. , Minnesota Univ. , Minneapolis, MN, USA); Krauss, P. R. ; Renstrom, P. J. Source: Applied Physics Letters, v 67, n 21, 20 Nov. 1995, 3114 -16 UV-curable

Nano-Imprint Lithography - UV curable http: //news. rpi. edu/update. do? artcenterkey=2394 Patterned polyset epoxy siloxane using UV-NIL

Fabrication of NIL template

AFM Lithography - Scratching http: //www. ntmdt. com/spm-principles/view/afm-lithography-scratching • Scratching – Tip is scanned over substrate with strong loading force, leaving behind trenches – Direct patterning of substrate or patterning of resist http: //www. asylumresearch. com/Gallery/3 d/3 d 5. shtml Scratch lithography on blood cell Scratch lithography on polycarbonate

AFM Lithography - Dynamic Plowing • Dynamic Plowing – Indenting of surface with vibrating tip – Surface is machined in three dimensions www. veeco. com Poem writtenn in PMMA using dynamic plowing. Storage capacity greater than a compact disk

AFM Lithography - Anodic Oxidation http: //www. nano. physik. uni-muenchen. de/ • Anodic Oxidation – Applying voltage between tip and metallic surface in wet environment – Tip and the surface interact electrochemically as anode and cathode correspondingly. – Oxide will grow on the point right under the tip http: //www. lamia. infm. it/afm_anodic_oxidation. htm AFM image of a Ti/Ti. Ox barrier. The image shows the 70 nm wide metallic wire(black), defined by AFM induced oxide, and the barrier. Local Anodic Oxidation (LAO) of perovskite oxides

AFM Lithography - STM Lithography http: //www. ntmdt. com/spm-principles/view/afm-lithography-scratching • STM Lithography – Pulsing current causes sample to melt and evaporate under tip STM lithography on Langmuir-Blodgett film