Actividades 3 D G Pellegrini C Fleta D

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Actividades 3 D G. Pellegrini, C. Fleta, D. Quirion, JP Balbuena, D. Bassignana Giulio

Actividades 3 D G. Pellegrini, C. Fleta, D. Quirion, JP Balbuena, D. Bassignana Giulio Pellegrini

Radiation-hard 3 D detectors for the (s)LHC Inner pixel layer (IBL) replacement for ATLAS

Radiation-hard 3 D detectors for the (s)LHC Inner pixel layer (IBL) replacement for ATLAS (2014) • Fluence of 4. 4 x 1015 1 Me. V neq/cm 2 Super-LHC (2017) – Atlas and CMS • 10 * luminosity upgrade on present LHC • Fluence up to ~ 1 x 1016 1 Me. V neq/cm 2 LHCb VELO upgrade • Integrated fluence ~ 1 x 1016 1 Me. V neq/cm 2 TOTEM experiment • Integrated fluence ~ 1 x 1016 1 Me. V neq/cm 2 Design fluences for ATLAS sensors (includes 2 x safety factor) : Innermost Pixel Layer ~ 5 cm radius : 1. 6 x 1016 1 Me. V neq/cm 2 = 500 Mrad Outer Pixel Layers ~ 30 cm radius: 3 x 1015 1 Me. V neq/cm 2 = 150 Mrad 2 Giulio Pellegrini

3 D Detectors Array of electrode columns passing through substrate Electrode spacing << wafer

3 D Detectors Array of electrode columns passing through substrate Electrode spacing << wafer thickness (e. g. 10 m: 300 m) Benefits: First proposed by Parker et al. • Low full depletion voltage Nucl. Instr. Meth. A, 395 (1997) 328 • Fast collection times → Reduced charge trapping • Reduced charge sharing due to E-field shape → Higher signal in one pixel More complicated fabrication - micromachining Planar 300 µm Double sided 3 D Giulio Pellegrini 3

CNM Double-sided 3 D fabrication runs Hole aspect ratio 25: 1 10µm diameter, 250µm

CNM Double-sided 3 D fabrication runs Hole aspect ratio 25: 1 10µm diameter, 250µm deep p-type and n-type substrates 285µm thick. Only one guard ring 10 um wide Devices designed at Glasgow & CNM Fabricated at CNM 3 D-wafer ATLAS Medipix 2 Pads Strips 4 inch wafer ICP is a reliable and repeatable process (many test runs always successful). Yield: Strip detectors = 88%. ATLAS pixels = 50% Giulio Pellegrini 4

Irradiations of strip 3 D 1 x 1016 1 Me. V neq cm-2 ALIBAVA

Irradiations of strip 3 D 1 x 1016 1 Me. V neq cm-2 ALIBAVA Short strip detectors readout columns Charge multiplication? n+ Irradiated at Karlsruhe with 26 Me. V protons. 1 x 1016 1 Me. V neq cm-2 Measurements also from testbeam available. Giulio Pellegrini Word done with Glasgow Uni and Universität Freiburg. 5

Atlas pixels, FE-I 3 and new FE-I 4 fabrication and irradiation for Insertable B-Layer

Atlas pixels, FE-I 3 and new FE-I 4 fabrication and irradiation for Insertable B-Layer and testbeam. In the framework of the Atlas 3 D collaboration (http: //test-3 dsensor. web. cern. ch/test 3 dsensor/). Common layout in the Atlas 3 D collaboration (CNM, FBK, SINTEF, Stanford). New FE-I 4 design (2 x 2 cm 2). A module should be fabricated with 3 D detectors. CNM already fabricated 24 6” wafers to test the bump bonding at IZM and 8 4” wafers to test the bump bonding at SELEX. Dummies include one structure to test pixel detectors with ALIBAVA read out electronics. Work done with IFAE and Glasgow Uni. 6 Giulio Pellegrini

CMS pixels We are designing a new mask with single chips and one module

CMS pixels We are designing a new mask with single chips and one module 8 x 2. We are also implementing a new bias grid for 3 D detectors without punch trough Work done with PSI, access to GICSERV. 7 Giulio Pellegrini

TOTEM strips We are designing a new mask to fabricate TOTEM strip detectors with

TOTEM strips We are designing a new mask to fabricate TOTEM strip detectors with 3 D detectors. • Strip pitch 66 um • AC coupled. • 3 cm long • n+ readout Work done with CERN, access to GICSERV. 8 Giulio Pellegrini

LHCb pixels • Secondary 120 Ge. V pion beam from SPS • 4 Timepix,

LHCb pixels • Secondary 120 Ge. V pion beam from SPS • 4 Timepix, 2 Medipix planes in telescope • DUT: double sided 3 D N-type sensor from CNM/Glasgow • Expected track extrapolation error: < 3 μm 7 ADC 30 ADC 7 ADC shared 6 medipix 2 3 d irradiated with neutrons and waiting for bump bonding Pion beam Individual pion tracks Measurements at 0º. No true with tilting Preliminary results with scan to 10º. telescope DUT 9 Giulio Pellegrini

Synchrotron Applications New medipix 3 detectors already fabricated and bonded at CNM B 16

Synchrotron Applications New medipix 3 detectors already fabricated and bonded at CNM B 16 Test beamline at the Diamond Monochromatic X-ray beam of 14. 5 ke. V Beam size FWHM were measured as • 4. 5± 0. 3 µm in x • 6. 7± 0. 3 µm in y Inefficiencies Centre Corners* Planar 0% 7% 3 D N –Type 3% 7% 3 D P –Type 4% 7% THL~25% THL~50% THL~75% Work done with Diamond light source and Glasgow Uni. Giulio Pellegrini Reduced level of over counting and under counting in 3 D 10

Stripixels 3 D strip detectors with 2 D positioning on one side. Double metal

Stripixels 3 D strip detectors with 2 D positioning on one side. Double metal process. Mask already designed, detectors are being fabricated at CNM. Work done with Brookhaven National Laboratory. Giulio Pellegrini 11

Resume of the projects • Strip 3 D was financed by SCTESP 3 and

Resume of the projects • Strip 3 D was financed by SCTESP 3 and Rd 50. • Atlas pixels is part of the NEWATLASPIX CYCYT project • LHCb project is a GICSERV access from Universidad de Santiago • CMS project is a GICSERV access from PSI • TOTEM project is a GICSERV access from CERN • Synchrotron project is a GICSERV access from Diamond light source. • Stripixels project is a GICSERV access from University of Laaperanta (and BNL). 12 Giulio Pellegrini