a Film transfer process b Device transfer process

追加 (a) Film transfer process, 　 (b) Device transfer process, 　(c) Device transfer process (via-last) (via-first) 　　　　ヘテロ集積化プロセス 8

通信信号波形変更触覚センサネットワーク (M. Makihata, M. Muroyama et. ai. , 2012 MRS Spring Meeting, San Francisco (2012) B 3. 2) 10

追加 Whole-angle gyro (積分ジャイロ) (I. P. Prikhodko, A. M. Shkel et. al. , Sensors & Actuators A, 177 (2012) p. 67)

HF 2 LI Lock-in Amplifier Zurich Instruments The HF 2 LI is an advanced digital lock-in amplifier with an extended signal frequency range of 50 MHz. With its 2 physical units, it replaces 2 traditional lock-in amplifiers for measurement setups; its 128 -bit processing delivers unprecedented performance. The HF 2 LI is a technology milestone in both the support of existing applications and in the enabling of the development of many new ones. HF 2 LI Key Features 2 independent lock-in units 1 fundamental and 2 harmonic frequencies per lock-in unit 1 µHz - 50 MHz frequency range 210 MSample/s, 14 bit A/D conversion 5 n. V/√Hz input noise voltage 追加 1 µs - 500 s time constant 6 to 48 d. B/oct filter slope (1 st to 8 th order) 4 x 1 MSample/s, 16 bit, ± 10 V auxiliary analog output 2 x 400 k. Sample/s, 16 bit, ± 10 V auxiliary analog input USB 2. 0 high-speed host connection Included graphical user interface, programing interfaces and data server

追加 (I. P. Prikhodko, A. M. Shkel et. al. , Sensors & Actuators A, 177 (2012) p. 67)

追加位相検出、自己校正　MEMSジャイロ (A. N. Shirazi, F. Ayazi et. al. (Georgia Tech. USA), Transducers 2013, p. 960) 21

追加 M. Daial, F. Ayazi et. al. , 2012 Solid-State Sensors, Actuators and Microsystems Workshop (2012) pp. 328 -331) 22

歩行速度の分解能を 100μm/secに改善靴底面圧分布計測用GRSA (Ground Reaction Sensor Array) (Q. Guo et. al. (Univ. of Utha, USA), Transducers 2013, p. 2535) 追加 29

追加 (Q. Guo et. al. (Univ. of Utha, USA), Transducers 2013, p. 2535) 30

Single ended 追加 (Q. Guo et. al. (Univ. of Utha, USA), Transducers 2013, p. 2535) 31

追加 (Q. Guo et. al. (Univ. of Utha, USA), Transducers 2013, p. 2535) 32

10/31 (Thu. ) μSIC Symposium and Fh. G Symposium Sendai sun plaza, Crystal room, Miyagino room 9: 00 -12: 00 μSIC Symposium (Micro System Integration Initiative先端融合関係) T. Ono (Tohoku Univ) & Group leaders 12: 30 -14: 00 Lunch 14: 00 -17: 30 (18: 00) Fh. G Symposium 14: 00 -14: 05 14: 05 -14: 15 -14: 25 -14: 35 14: 35 -14: 50 14: 50 -15: 00 -15: 30 -16: 00 -16: 30 -17: 00 17: 00 -17: 30 18: 00 -20: 00 L. Granrath (Welcome and Introduction) S. Tillich (Prime minister of Saxony, Germany) Yukimoto Ito (Deputy Mayer) S. Satomi (President of Tohoku Univ) A. v. Zyl (Rector of Chemnitz Univ. ) M. Kotani (Tohoku Univ. ) T. Gessner (Fraunhofer ENAS, Chemnitz Univ. ) Break K. -D. Lang (Fraunhofer IZM) S. Tanaka (Tohoku Univ. ) A. Schubert (Fraunhofer IWU) Banquet 11/1 (Fri. ) Technical　tour (Nishizawa center + company) 追加 35

第 2回東北大- IMEC シンポジウム、日時 : 11月8日（金） 9: 00 -14: 30 場所 : 東北大学　「西澤記念研究センター」　http: //www. music. tohoku. ac. jp/coin/attach/JNRC_access. pdf 内　「仙台MEMSショールーム」主催 : 東北大学マイクロシステム融合研究開発センター(μSIC)　趣旨 : ベルギーのIMECはアジアの戦略連携校である東北大学と、シンポジウムを開催します。今年は東北大学で公開で行いますので、宜しければご参加ください。講演は英語。問合先 : 東北大学　マイクロシステム融合研究開発センター　蛸島武尚、Tel. 022 -795 -6256, Fax 022 -795 -6259、E-mail tako@mems. mech. tohoku. ac. jp 参加 : 無料、当日直接参加可 9: 00 Opening Address　(Masayoshi Esashi) 9: 10 Overview of MEMS Hands-on Facility (Kentaro Totsu) 9: 30 Overview of IMEC (Jo de Boeck) 9: 50 MEMS (Shuji Tanaka) 10: 10 MEMS (Xavier Rottenberg) 10: 50 Biodevice (Yoichi Haga) 11: 10 Bio device (Peter Peumans) 11: 30 Imaging device (Shigetoshi Sugawa (or Rihito Kuroda) 11: 50 Imaging device (Andy Lambrechts) 12: 10 Lunch 13: 10 Body area network, Sensors, Energy harvesters (Hiroki Kuwano) 追加 13: 30 Body area network, Sensors, Energy harvesters (Chris Van Hoof) 13: 50 Photovoltaics and large area device (Seiji Samukawa) 14: 10 Photovoltaics and large area device (Philip Pieters) 36