6 HSi C Pressure Sensors for High Temperature

6 H-Si. C Pressure Sensors for High Temperature Applications Small Business Innovation Research Kulite Semiconductor Products, Inc. Leonia, NJ INNOVATION A silicon carbide (Si. C) pressure sensor for use at temperatures as high as 500 C, which is approximately 100 C higher than can be withstood by presently available silicon pressure sensors ACCOMPLISHMENTS u Prototype Si. C pressure sensors were developed in Phase II contract Si. C Sensor Mounted on a Header u The pressure sensors were shown to be capable of operating at 500 C for several hours GOVERNMENT/SCIENCE APPLICATIONS u Phase III of $500 K to provide GRC with 6 -10 prototype Si. C pressure sensors. Funding provided by Advanced High Temperature Engine Material Technology Program (HITEMP) and Higher Operating Temperature Propulsion Components (HOTPC) Program. u Provided GRC with prototype Si. C pressure sensors COMMERCIALIZATION u A high temperature pressure sensor for engine aircraft development and test. Fast response pressure measurements in the compressor hot section for stall detection and control u A prototype Si. C pressure sensor was successfully tested at Honeywell in Phoenix, AZ in September 2000. Additional testing is planned at Pratt & Whitney in 2001. u For use in military aircraft and any other turbine engine, e. g. , tanks u This pressure sensor can be used for other high temperature turbine engine applications Glenn Research Center Instrumentation 3 -046 53 1991 Phase II, NAS 3 -27011, rev. 5/01 NASA Contact – Glenn Beheim Company Contact – Alex Ned