52300 Sensing and Actuation in Miniaturized Systems Topics

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52300 Sensing and Actuation in Miniaturized Systems Topics： Microlens array bio-sensing system Professor：Cheng-Hsien Liu

52300 Sensing and Actuation in Miniaturized Systems Topics： Microlens array bio-sensing system Professor：Cheng-Hsien Liu Students：Den-Hua Lee Tsu-Wei Huang 2008/11/11 1

Contents • Introduction • The Goal • Discussion • Conclusion 2008/11/11 2

Contents • Introduction • The Goal • Discussion • Conclusion 2008/11/11 2

Introduction • Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays.

Introduction • Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays. 2002 • A novel method to fabricate gapless hexagonal micro-lens array. 2004 • Microlens array film with full fill factor for enhancing outcoupling efficiency from OLED lighting. 2007 2008/11/11 3

Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays S. Möller

Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays S. Möller and S. R. Forrest J. of Applied Physics, 91 p. 3324 -3327 (2002) 2008/11/11 4

Mold transfer process Si mold was etched in HNO 3+CH 3 COOH+HF used Si

Mold transfer process Si mold was etched in HNO 3+CH 3 COOH+HF used Si 3 N 4 layer as a mask 2008/11/11 PDMS microlens array fabricated from the mold 5

Paper printout Lens sheet covered Image blurring due to the thickness 2008/11/11 OLED with

Paper printout Lens sheet covered Image blurring due to the thickness 2008/11/11 OLED with lens sheet covered Covered area is brighter 6

A novel method to fabricate gapless hexagonal micro-lens array M. C. Chou, C. T.

A novel method to fabricate gapless hexagonal micro-lens array M. C. Chou, C. T. Pan, S. C. Shen, M. -F. Chen, K. L. Lin, and S. T. Wu Sensors and Actuators A, 118, p 298 -306 (2005) 2008/11/11 7

Si Reflow process of AZ 4620 thick PR for fabricating half-spherical column 2008/11/11 Ni

Si Reflow process of AZ 4620 thick PR for fabricating half-spherical column 2008/11/11 Ni as seed layer Electroplate Ni-Co mold CMP Hot embossing PMMA 8

90% 95% 45% 100% Different shape with different fill factor 2008/11/11 Distribution reflowing to

90% 95% 45% 100% Different shape with different fill factor 2008/11/11 Distribution reflowing to form gapless hexagonal lens 9

Sequence of Ni-Co electroplating process 2008/11/11 Different gapless lens form by different distributions 10

Sequence of Ni-Co electroplating process 2008/11/11 Different gapless lens form by different distributions 10

Laser passes through hot-embossed PMMA-based gapless hexagonal micro-lens. 2008/11/11 11

Laser passes through hot-embossed PMMA-based gapless hexagonal micro-lens. 2008/11/11 11

Microlens array film with full fill factor for enhancing outcoupling efficiency from OLED lighting

Microlens array film with full fill factor for enhancing outcoupling efficiency from OLED lighting Hyouk Kwon, Youngjoo Yee, Chi-Hwan Jeong 1, Hyo. Jin Nam, Ki-Won Park, Gun-Woo Lee, and Jong-Uk Bu u. TAS proceeding, 2 EK 5 P, p 1091 -1094 (2007) 2008/11/11 12

Micro Lens Array provide brightness increasing Higher fill factor, higher efficiency 2008/11/11 13

Micro Lens Array provide brightness increasing Higher fill factor, higher efficiency 2008/11/11 13

Trench structure keep lens’ shape closing to half-spherical Conformal coating process decrease the height

Trench structure keep lens’ shape closing to half-spherical Conformal coating process decrease the height of lens Outcoupling efficiency according to the sag ratio Applying trench to keep higher sag height 2008/11/11 14

MLA is made by UV stamping on transparent PET film 2008/11/11 15

MLA is made by UV stamping on transparent PET film 2008/11/11 15

31. 3% improvement 2008/11/11 16

31. 3% improvement 2008/11/11 16

OLED with MLA looked brighter 2008/11/11 17

OLED with MLA looked brighter 2008/11/11 17

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