2018 Cerium Labs Confidential Proprietary www ceriumlabs com

FE-SEM FEI XL 50; Hitachi 4800 § Field Emission, Ultra-high Resolution Microscopes § Magnification up to 350 kx § Resolution: 0. 8 nm @ 15 k. V § Resolution (Low Energy): 1. 6 nm @1 k. V § Maximum Sample Size: 200 mm Wafer § Image Stitching Functionality © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 3

EDS/EDX Elemental Composition Determination Image of Sample Elemental Maps Spectral Data Element ID ©

EDS/EDX Noran System- Six § Navigation Capability § Energy Resolution: 129 e. V §

Dual-Beam Focused Ion Beam Microscopy DB-FIB Analytical Imaging § Applications: § Sample Preparation Technique Using Ion Beam to Mill in to Very Specific Area(s) of Interest § Defect Analysis § Construction Analysis © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 6

DB-FIB FEI; Strata 400 S, Helios 450 § Strata 400 S § § Electron Column - Elster Ebeam Range: 200 V to 30 k. V Ebeam Resolution: 0. 8 nm @ 2 k. V STEM Resolution: 0. 8 @ 30 k. V § Helios 450 § Ion Column –Sidewinder § Ibeam Range: 2 k. V to 30 k. V § Ion Resolution: 7 nm @ 30 k. V § Features: § Flip Stage with In-Situ STEM Detector § Omniprobe ™ Sample Extraction System § Pt and C GIS System for In-Situ Depositions © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 7

$TEM Composite Imaging / Diffraction Patterning Diffraction Pattern of Epitaxial Ga. N on Si$

TEM Philips CM 300, JEOL 2010, JEOL ARM 200 F § High Resolution Imaging § 0. 23 nm Point Resolution § 0. 14 nm Line Resolution § STEM Probe § ~2 nm for Localized Chemical and Structural Analysis § Elemental Mapping § STEM-EDS § Energy-Filtered TEM (EFTEM) § Lattice Imaging © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 9

AFM Veeco- Digital Instruments § Tapping Mode Scanning Probe § For Measuring Surface Micro. Roughness § Dimension 5000 § Handles up to 200 mm Wafers § Acoustic & Vibration Isolation © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 10

Secondary Ion Mass Spectrometry SIMS Surface Science § Applications: § Depth Profiling § Low Level Bulk Impurity Detection § Low Level Surface Impurity Detection © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 11

SIMS Profiling / B&P Weight % / Silicon Dopant Measurement Reproducible High Precision Implant Profiling © 2018 Cerium Labs – Confidential & Proprietary Boron and Phosphorus Weight % Concentration Measurement in Boro-Phospho-Silicate Glass www. ceriumlabs. com p. HEMT-III-V Measurement. Silicon Dopant; Ga. As/Al. Ga. As/In. Ga. As/Al. Ga. As Matrix 12

SIMS Cameca 6 f, Atomika 4500 § Cameca: Magnetic Sector High Mass Resolution § Atomika: Quadrupole Mass Spectrometer § Depth Profiling to Several µm for Dopants § Spot Size of 100 µm x 100 µm § Quadrupole for Insulating Films and Glasses © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 13

X-Ray Photoelectron Spectroscopy XPS Surface Science § Applications: § Quantitative Surface Composition § Atomic Binding Information § Elemental Speciation © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 14

XPS Quantitative Surface Composition High Resolution Scans of Silicon Surface % Atomic Composition Si O Ti C © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 30. 9 62. 0 0. 6 6. 5 15

XPS Physical Electronics Quantum 2000 § Near Surface Measurement ~5 - 10 nm § Spot Size 100 µm x 100 µm § Sensitivity to 0. 1 Atomic % © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 16

Ion Beam Analysis § Applications: § H and D Profiling § Elastic Recoil Detection Analysis (ERDA) § Trace Impurity Detection § Particle Induced X-Ray Emission (PIXE) § D Profiling § Nuclear Reaction Analysis (NRA) § Profiling Heavy Element in Light Matrix § Rutherford Backscattering (RBS) © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 17

Total Reflection X-Ray Fluorescence TXRF Surface Science § Applications: § High Sensitivity Quantitative Analysis of Surface Contamination § Surface Mapping § Specific Point Analysis © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 18

TXRF Wafer Surface Contamination Analysis Chromium Atom Contamination on Wafer Surface (x 1010 Atoms/cm

TXRF Technos TREX 630 § W & Ag Anodes for Increased Coverage of Elements § Spot Size 100 µm x 100 µm § 100 mm, 150 mm, 200 mm, 300 mm Wafer Compatible § Rapid Scan Mapping Capability © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 20

$X-Ray Diffraction XRD X-Ray Reflectivity XRR Surface Science § Applications: § XRD § Crystal$

X-Ray Diffraction XRD X-Ray Reflectivity XRR Surface Science § Applications: § XRD § Crystal Structure § 2θ-ω Scan § Grazing Incidence XRD for Thin Films § XRR § § Density of Films Buried Interfacial Roughness Thin Film Thickness Thin Film Composition © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 21

XRD Orientation & Grain Size Calculation Poly Si Orientation & Grain Size Calculation ©

XRR Thickness/Density/Roughness Based On Modeling © 2018 Cerium Labs – Confidential & Proprietary www.

XRD/XRR BEDE Scientific D 1 § θ-2θ Scan § Seal Tube Cu Source with Multilayer Filtering § XRR Capability § Non-Destructive Analysis § Epitaxial Growth Feedback- Rocking Curve – High Resolution Capability © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 24

Analytical Chemistry © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 25

Micro Raman Spectroscopy Renishaw System 2000 § Applications: § Molecular Composition § Defect Analysis § Thin Film Monitoring § Bond Vibration Frequencies § Process Control Analysis § Specifications: § Spot Size 1 µm x 1 µm § Analytical Wavelengths § 48 nm § 785 nm © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 26

Raman Bond Vibration Frequencies Reference Spectra of Graphite and Diamond © 2018 Cerium Labs

Neutron Activation Analysis NAA Analytical Chemistry § Applications: § Bulk Analysis in Si Matrix § Halogens & Other Volatile Metals Analysis § Analysis of About 2/3 of the Elements in the Periodic Table § Non-Destructive Analysis with Little to No Sample Preparation § Analysis of Polymer and Plastics for Trace Elements © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 28

NAA Elemental Analysis Gamma Ray Spectrum of a Mineral Sample © 2018 Cerium Labs

NAA § 1 MW Research Reactor § High Purity Ge Detector (20%-100% Efficiency) § Pneumatic Transfer for Short-Lived Isotopes § In-Core Irradiation in Dry Tube § Canberra Data Acquisition and Data Processing Software © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 30

High Resolution Inductively Coupled Plasma Spectrometer HR-ICPMS Analytical Chemistry § Applications: § Trace Metals Contamination Detection on Silicon Wafer Surface § Vapor Phase Decomposition (VPD) § 150 mm, 200 mm & 300 mm Wafer Sizes Accepted § Quantitative Trace Levels Analysis for Metals § Isotope Ratio Analysis © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 31

HR-ICPMS Thermo Finnigan Element 2 High Resolution Mass Spectrometer § Industry Leading Method Detection Limits and Quality Control § NIST Trace Standard Reference Materials § Range sub ppt to ppb © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 32

Inductively Coupled Plasma Optical Emission Spectrometer ICP-OES Analytical Chemistry § Applications: § Bulk Quantitative Analysis of Major, Minor, & Trace Elements in: § Liquids § Suspensions § Solids with Digestion © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 33

ICP-OES Varian Liberty II § HF Resistant, Cross-Flow Pneumatic Nebulizer for Liquids Containing Up to 1% Solids § Ultrasonic Nebulizer for Liquids Containing Up to 0. 1% Solids § Range Low ppb to % © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 34

FTIR Interstitial Oxygen Peak Intensity is Used to Calculate the Oxygen in the Crystal

Automated Thermal Desorption. Gas Chromatograph-Mass Spectrometer ATD-GC-MS Analytical Chemistry § Applications: § Liquids Analysis § Purge and Trap § Head Space § Direct Inject § Whole Wafer Thermal Desorption Analysis § Materials Outgassing Analysis © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 36

ATD-GC-MS Spectral Identification A 75878 AIR 003 2. 68 100 Scan EI+ TIC 2. 83 e 7 2. 68 7. 92 8. 78 11. 96 17. 13 % 2 -propanol propylene glycol toluene ethylene glycol butyl ether cyclopentasiloxane 7. 92 17. 13 11. 96 8. 78 5. 96 7. 00 0 Time (Mins) 4. 00 6. 00 11. 33 8. 00 10. 00 13. 05 12. 00 14. 2815. 53 16. 17 14. 00 16. 00 17. 91 18. 00 20. 00 Spectral Identification of Air Borne Contaminants © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 37

ATD-GC-MS Perkin-Elmer ATD 400 -Autosystem XL- Turbomass § Signal Detected is Molecular Ions & Characteristic Fragment Ions § Molecular Ions Detected 30 to 530 m/z § Detection Limits as Low as 1 ng Introduced to the Column © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 38

Clay Fullwood Chief Executive Officer 512 -934 -6229 Clay. Fullwood@Ceriumlabs. com Tim Hossain, Ph. D. Chief Technology Officer (512) 934 -5331 Tim. Hossain@ceriumlabs. com Lynette Ballast Director of Operations, Imaging (512) 934 -5080 Lynette. Ballast@ceriumlabs. com Mike Benjamin Manager, Chemistry (512) 934 -6026 Mike. Benjamin@ceriumlabs. com Steve Popst Director of Business Development (830) 822 -5719 Steve. Popst@ceriumlabs. com © 2018 Cerium Labs – Confidential & Proprietary www. ceriumlabs. com 39